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An integrated Terahertz Mach-Zehnder interferometer is presented in order to perform differential measurements in a chip. Both simulation and experiment are performed for validating the interferometer structure. Destructive interference peaks are observed, and destructive frequencies are predicted by a mathematical model with a good agreement. The structure is then used to characterize dielectric constant of materials. Simulation results enable to quantify the device sensitivity. An experimental validation is given with the characterization of a thermosensitive polymer (Cyclotene BCB) in the sub-THz frequency band. Perspectives to increase investigated frequencies are discussed. [ABSTRACT FROM AUTHOR]

In this letter, the microwave and noise performance of SiGe heterojunction bipolar transistors (HBTs) has been characterized when cooling down the temperature. It was found that SiGe HBTs (fabricated in the framework of BiCMOS process) exhibit a maximum oscillation frequency fmax of about 292 GHz at 78 K, which represents an increase of about 30% with the value measured at room temperature. The noise performance has also been characterized at cryogenic temperatures, using an original de-embedding approach. Then, using the Hawkin's noise model in conjunction with an accurate small signal equivalent extraction, the four noise parameters have been estimated. The noise figure with a 50 Ω source impedance was measured to be equal to 1.5 dB at 40 GHz at 78 K, which is one of the lowest value reported for BiCMOS SiGe HBT in the millimeter-wave range. [ABSTRACT FROM AUTHOR]

We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer deposited by a "cold" plasma technique. We can use it for a surface functionalization or for the encapsulation with plasma assisted wafer bonding.