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With ongoing economic, scientific, and technological developments, the electronic devices used in daily lives are developing toward precision and miniaturization, and so the demand for high-precision manufacturing machinery is expanding. The most important piece of equipment in modern high-precision manufacturing is the macro-micro motion platform (M3P), which offers high speed, precision, and efficiency and has macro-micro motion coupling characteristics due to its mechanical design and composition of its driving components. Therefore, the design of the control system is crucial for the overall precision of the platform; conventional proportional–integral–derivative control cannot meet the system requirements, and so M3Ps are the subject of a growing range of modern control strategies. This paper begins by describing the development history of M3Ps, followed by their platform structure and motion control system components, and then in-depth assessments of the macro, micro, and macro-micro control systems. In addition to examining the advantages and disadvantages of current macro-micro motion control, recent technological breakthroughs are noted. Finally, based on existing problems, future directions for M3P control systems are given, and the present conclusions offer guidelines for future work on M3Ps.

With the development of modern industry and ever more complex structural loads, the possibility of fatigue failure is increasing. Fatigue analysis can be used to evaluate the service life of components and reduce the probability of accidents. Therefore, the development and application of fatigue-analysis technology have important research significance. This paper collects information from a wide field of literature and summarizes the current status of fatigue-analysis research. It covers related theoretical knowledge, fatigue-life prediction methods, and fatigue design methods and their application scenarios, and it summarizes the challenges and research hotspots in the field. On the basis of this examination, future development directions of fatigue-life prediction methods are proposed. The conclusions will have a certain guiding role in the development of fatigue-analysis methods.

Integrated circuits industry is inherently linked to the national economy development and the security national defense in China. Its product quality and productivity as bottleneck resolutions are crucially depended on the performance of microelectronic equipment motion platform. However, motion platforms face a series of requirements including high-acceleration, ultra-precision positioning and so on. These requirements can be theoretically addressed by a typical macro-micro driving concept platform. Therefore, kinds of motion platform are proposed and Implemented. In the process of exploring analysis of macro-micro motion platform, especially for some key structures such as link frames, flexible hinge mechanisms, etc., many effective multiphysics coupling optimization methods are proposed to obtain superior performance of platform. Meanwhile, the vibration suppression of macro-micro motion platform is described to ensure ultra-precise positioning. At last, the development trends and facing problems of macro-micro motion platform are suggested. This review will promote the upgrading of microelectronics manufacturing equipment and accelerate the rapid development of microelectronics manufacturing industry.