1. The formation of an oscillating system during the sputtering of sapphire single crystal with pulsed glow discharge
- Author
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Valeriy M. Nemets, Victoria Bodnar, Alexander Ganeev, Nikolay Solovyev, Anna Gubal, Nikita Gubal, and Boris Korotetski
- Subjects
Glow discharge ,Glow Discharge Mass Spectrometry ,Materials science ,010401 analytical chemistry ,Corundum ,02 engineering and technology ,General Chemistry ,Dielectric ,engineering.material ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,0104 chemical sciences ,Crystal ,Surface conductivity ,Sputtering ,engineering ,Sapphire ,General Materials Science ,Atomic physics ,0210 nano-technology - Abstract
Sapphire (α-Al2O3, transparent corundum) single crystals were analyzed with pulsed direct current glow discharge mass spectrometry. Combined hollow cathode was used as a discharge cell. To obtain stable sputtering of dielectric material, a formation of initial surface conductivity via preliminary vacuum deposition of thin metallic layer was proposed. Al and Ta film of different thickness (30–200 nm) were considered for this purpose. The approach was found to provide the effective sputtering of dielectrics. The formation of an oscillating system was shown during the sputtering of sapphire samples in a tantalum combined hollow cathode cell. For oriented sapphire single crystals, periodic oscillations of 27Al+ intensity were acquired. This phenomenon was observed only for dielectric single crystals and not for other dielectric samples, e.g. alumina ceramic or fused quartz. The linear dependence of oscillation period on the duration of discharge pulse was found. The origin of these oscillations seems to be attributed to periodic fluctuations of surface conductivity. Oscillation periods calculated for two different orientations of sapphire single crystals (001 and 012) were found to be proportional to the main period of sapphire lattice. Therefore, an assumption that the crystal internal structure of the sample might be the cause of the oscillations is discussed.
- Published
- 2018
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