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Plasmas growing or containing nanometric dust particles are widely used and proposed in plasma technological applications for production of nano-crystals and surface deposition. Here, we give a compact review of in situ methods for the diagnostics of nanodust and nanodusty plasmas, which have been developed in the framework of the SFB-TR24 to fully characterize these systems. The methods include kinetic Mie ellipsometry, angular-resolved Mie scattering, and 2D imaging Mie ellipsometry to get information about particle growth processes, particle sizes and particle size distributions. There, also the role of multiple scattering events is analyzed using radiative transfer simulations. Computed tomography and Abel inversion techniques to get the 3D dust density profiles of the particle cloud will be presented. Diagnostics of the dust dynamics yields fundamental dust and plasma properties like particle charges and electron and ion densities. Since nanodusty plasmas usually form dense dust clouds electron depletion (Havnes effect) is found to be significant.

A cloud of nanodust particles is created in a reactive argon-acetylene plasma. It is then transformed into a dusty magnetized argon plasma. Plasma parameters are obtained with the dust-density wave diagnostic introduced by Tadsen et al. [Phys. Plasmas 22, 113701 (2015)10.1063/1.4934927]. A change from an open to a cylindrically enclosed nanodust cloud, which was observed earlier, can now be explained by a stronger electric confinement if a vertical magnetic field is present. Using two-dimensional extinction measurements and the inverse Abel transform to determine the dust density, a redistribution of the dust with increasing magnetic induction is found. The dust-density profile changes from being peaked around the central void to being peaked at an outer torus ring resulting in a hollow profile. As the plasma parameters cannot explain this behavior, we propose a rotation of the nanodust cloud in the magnetized plasma as the origin of the modified profile.

A novel approach of using microparticles as probes for the sheath structure of radio-frequency discharges is presented. Starting with a heavy (large) particle confined deep in the plasma sheath, the ambient plasma causes a continuous mass loss, which increases the levitation height of the particle. It is shown that this process can be precisely monitored with the phase-resolved resonance method, which allows probing the force balance of the particle with high spatial resolution. The resulting force profile is in reasonable agreement with recent sheath models.

The 3D dust distribution in dense dust clouds confined in argon rf plasmas is measured by a computed tomography (CT) technique based on the extinction of visible light. On the one hand, clouds of micron-sized particles were created by injecting standardized plastic particles into the plasma. On the other hand, sub-micron sized dust with well-defined properties is grown in situ in an argon acetylene mixture. Once created, both kinds of dust clouds decay in the course of minutes to hours. This decay is monitored by CT measurements. It is revealed that micro-dust clouds feature a drastic change of the dust distribution due to a size reduction of the dust. Dust clouds of sub-micron particles, in contrast, show a strong variation of the overall dust density while the relative dust distribution remains nearly unchanged. The evolution of the overall dust density is subject to two effects: the loss of particles due to an imperfect confinement and the reduction of the dust size via etching.

A dust density wave field is observed in a cloud of nanodust particles confined in a radio frequency plasma. Simultaneous measurements of the dust properties, grain size and density, as well as the wave parameters, frequency and wave number, allow for an estimate of the ion density, ion drift velocity, and the dust charge using a hybrid model for the wave dispersion. It appears that the charge on the dust grains in the cloud is drastically reduced to tens of elementary charges compared with isolated dust particles in a plasma. The charge is much higher at the cloud's periphery, i.e., towards the void in the plasma center and also towards the outer edge of the cloud.

The growth of nanometer-sized particles in a reactive argon-acetylene plasma is investigated by means of kinetic single-wavelength Mie ellipsometry from the change of the polarization state of scattered light. This requires advanced measurement techniques as well as complex methods for the analysis of the measured data. Today commercial devices reduce the metrological effort, but the data analysis is still a challenging topic. We present a scheme to gain time-resolved information about the size evolution of monodisperse spherical particles and to determine their optical properties, represented by the complex refractive index N, without limiting assumptions concerning the evolution of the particle size or the need for additional ex situ diagnostics. The method is applied on typical particle growth processes at varying optical depth and compared to ex situ SEM measurements. It is shown that more complex processes, including particle etching, can be analyzed. This demonstrates the applicability of the analysis on a strongly non-linear process.

Nanodust is produced in an rf-driven push-pull parallel-plate reactor using argon with an acetylene admixture at 5–30 Pa. A scheme for the preparation of nanodust clouds with particle radii up to 400 nm for investigations in magnetized plasmas is proposed. The confinement that keeps the nanodust of different radii inside a moderately magnetized discharge (B ≤ 500 mT) is investigated by a comparison of 2d-Langmuir probe measurements in the dust-free plasma without and with a magnetic field and by the analysis of scattered light of nanodust clouds. It is shown that the dust cloud changes its shape when the dust density changes. This results in a reversed α- γ′ transition from a dense dust cloud with a central disk-like void to a dilute dust cloud with a toroidal void. When the dust density is further reduced, filaments are observed in the central part of the cloud, which were absent in the high-density phase. It is concluded that the dense nanodust cloud is able to suppress plasma filamentation in magnetize...