1. Tri-layer SiN-on-Si 8x8 Optical Switches with Thermo-optic and Electro-optic Actuators
- Author
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Sun, Bohao, Yao, Chunhui, Li, Tongyun, Zhang, Ziyao, Bao, Peng, Chen, Minjia, Yuan, Alan Yilun, Tan, Chenxi, Shi, Zhitian, Wonfor, Adrian, Savory, Seb, Bergman, Keren, Penty, Richard, and Cheng, Qixiang
- Subjects
Physics - Optics - Abstract
We present two spatial-multiplexed switch-and-select (S&S) 8x8 optical switches incorporating a tri-layer SiN-on-Si platform, one equipped with thermo-optic (T-O) and the other electro-optic (E-O) switching elements. To the best of our knowledge, the electro-optic switch fabric is the first-of-its-kind device assembled in such a multi-layer platform. The shuffle between the multiplexer and demultiplexer array is established via a tri-layer Si-SiN-SiN structure, creating a three-dimensional crossing-free photonic shuffle network. At the same time, the implementation of the S&S topology can effectively suppress the first-order crosstalk. The measured on-chip losses for the T-O switch range from 2.1 to 11.5 dB, with a 5.2 dB average, while the E-O device exhibits losses between 8.7 to 19.6 dB, with a 15.1 dB average. Both switches demonstrate ultra-low crosstalk, with measured ranges of 38.9 to 50.8 dB and 42.8 to 51.9 dB, for the T-O and E-O devices respectively. The switching times are 17.6 us for the T-O switch and 5.9 ns with the E-O actuated one. These performance metrics highlight the potential of these switches for next-generation data center applications.
- Published
- 2025