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The flight of the Micro-X sounding rocket on July 22, 2018 marked the first operation of Transition-Edge Sensors and their SQUID readouts in space. The instrument combines the microcalorimeter array with an imaging mirror to take high-resolution spectra from extended X-ray sources. The first flight target was the Cassiopeia~A Supernova Remnant. While a rocket pointing malfunction led to no time on-target, data from the flight was used to evaluate the performance of the instrument and demonstrate the flight viability of the payload. The instrument successfully achieved a stable cryogenic environment, executed all flight operations, and observed X-rays from the on-board calibration source. The flight environment did not significantly affect the performance of the detectors compared to ground operation. The flight provided an invaluable test of the impact of external magnetic fields and the instrument configuration on detector performance. This flight provides a milestone in the flight readiness of these detector and readout technologies, both of which have been selected for future X-ray observatories.

The Line Emission Mapper (LEM) is an X-ray Probe for the 2030s that will answer the outstanding questions of the Universe's structure formation. It will also provide transformative new observing capabilities for every area of astrophysics, and to heliophysics and planetary physics as well. LEM's main goal is a comprehensive look at the physics of galaxy formation, including stellar and black-hole feedback and flows of baryonic matter into and out of galaxies. These processes are best studied in X-rays, and emission-line mapping is the pressing need in this area. LEM will use a large microcalorimeter array/IFU, covering a 30x30' field with 10" angular resolution, to map the soft X-ray line emission from objects that constitute galactic ecosystems. These include supernova remnants, star-forming regions, superbubbles, galactic outflows (such as the Fermi/eROSITA bubbles in the Milky Way and their analogs in other galaxies), the Circumgalactic Medium in the Milky Way and other galaxies, and the Intergalactic Medium at the outskirts and beyond the confines of galaxies and clusters. LEM's 1-2 eV spectral resolution in the 0.2-2 keV band will make it possible to disentangle the faintest emission lines in those objects from the bright Milky Way foreground, providing groundbreaking measurements of the physics of these plasmas, from temperatures, densities, chemical composition to gas dynamics. While LEM's main focus is on galaxy formation, it will provide transformative capability for all classes of astrophysical objects, from the Earth's magnetosphere, planets and comets to the interstellar medium and X-ray binaries in nearby galaxies, AGN, and cooling gas in galaxy clusters. In addition to pointed observations, LEM will perform a shallow all-sky survey that will dramatically expand the discovery space., Comment: 18 pages. White paper for a mission concept to be submitted for the 2023 NASA Astrophysics Probes opportunity. v2: All-sky survey figure expanded, references fixed. v3: Added energy resolution measurements for prototype detector array. v4: Author list and reference fixes

With its array of 3840 Transition Edge Sensors (TESs) operated at 90 mK, the X-Ray Integral Field Unit (X-IFU) on board the ESA L2 mission Athena will provide spatially resolved high-resolution spectroscopy (2.5 eV FWHM up to 7 keV) over the 0.2 to 12 keV bandpass. The in-flight performance of the X-IFU will be strongly affected by the calibration of the instrument. Uncertainties in the knowledge of the overall system, from the filter transmission to the energy scale, may introduce systematic errors in the data, which could potentially compromise science objectives - notably those involving line characterisation e.g. turbulence velocity measurements - if not properly accounted for. Defining and validating calibration requirements is therefore of paramount importance. In this paper, we put forward a simulation tool based on the most up-to-date configurations of the various subsystems (e.g. filters, detector absorbers) which allows us to estimate systematic errors related to uncertainties in the instrumental response. Notably, the effect of uncertainties in the energy resolution and of the instrumental quantum efficiency on X-IFU observations is assessed, by taking as a test case the measurements of the iron K complex in the hot gas surrounding clusters of galaxies. In-flight and ground calibration of the energy resolution and the quantum efficiency is also addressed. We demonstrate that provided an accurate calibration of the instrument, such effects should be low in both cases with respect to statistics during observations., Comment: 9 pages, 4 figures, SPIE proceeding Austin 2018

We are developing the frequency domain multiplexing (FDM) read-out of transition-edge sensor (TES) microcalorimeters for the X-ray Integral Field Unit (X-IFU) instrument on board of the future European X-Ray observatory Athena. The X-IFU instrument consists of an array of $\sim$3840 TESs with a high quantum efficiency ($>$90 \%) and spectral resolution $\Delta E$=2.5 eV $@$ 7 keV ($E/\Delta E\sim$2800). FDM is currently the baseline readout system for the X-IFU instrument. Using high quality factor LC filters and room temperature electronics developed at SRON and low-noise two stage SQUID amplifiers provided by VTT, we have recently demonstrated good performance with the FDM readout of Mo/Au TES calorimeters with Au/Bi absorbers. An integrated noise equivalent power resolution of about 2.0 eV at 1.7 MHz has been demonstrated with a pixel from a new TES array from NASA/Goddard (GSFC-A2). We have achieved X-ray energy resolutions $\sim$2.5 eV at AC bias frequency at 1.7 MHz in the single pixel read-out. We have also demonstrated for the first time an X-ray energy resolution around 3.0 eV in a 6 pixel FDM read-out with TES array (GSFC-A1). In this paper we report on the single pixel performance of these microcalorimeters under MHz AC bias, and further results of the performance of these pixels under FDM., Comment: 8 pages, 4 figures, Proceedings of the SPIE Astronomical Instrumentation "Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray"

We have recently shown that normal-metal/superconductor (N/S) bilayer TESs (superconducting Transition-Edge Sensors) exhibit weak-link behavior.1 Here we extend our understanding to include TESs with added noise-mitigating normal-metal structures (N structures). We find TESs with added Au structures also exhibit weak-link behavior as evidenced by exponential temperature dependence of the critical current and Josephson-like oscillations of the critical current with applied magnetic field. We explain our results in terms of an effect converse to the longitudinal proximity effect (LoPE)1, the lateral inverse proximity effect (LaiPE), for which the order parameter in the N/S bilayer is reduced due to the neighboring N structures. Resistance and critical current measurements are presented as a function of temperature and magnetic field taken on square Mo/Au bilayer TESs with lengths ranging from 8 to 130 {\mu}m with and without added N structures. We observe the inverse proximity effect on the bilayer over in-plane distances many tens of microns and find the transition shifts to lower temperatures scale approximately as the inverse square of the in- plane N-structure separation distance, without appreciable broadening of the transition width. We also present evidence for nonequilbrium superconductivity and estimate a quasiparticle lifetime of 1.8 \times 10-10 s for the bilayer. The LoPE model is also used to explain the increased conductivity at temperatures above the bilayer's steep resistive transition., Comment: 10 pages, 8 figures

We have found experimentally that the critical current of a square superconducting transition-edge sensor (TES) depends exponentially upon the side length L and the square root of the temperature T. As a consequence, the effective transition temperature Tc of the TES is current-dependent and at fixed current scales as 1/L^2. We also have found that the critical current can show clear Fraunhofer-like oscillations in an applied magnetic field, similar to those found in Josephson junctions. The observed behavior has a natural theoretical explanation in terms of longitudinal proximity effects if the TES is regarded as a weak link between superconducting leads. We have observed the proximity effect in these devices over extraordinarily long lengths exceeding 100 um., Comment: 4 pages, 2 figures

We describe performance of large-scale arrays of metallic magnetic calorimeters (MMCs) we are developing to meet requirements of the Lynx X-ray Microcalorimeter (LXM) instrument in the astrophysics mission concept Lynx. We have fabricated prototypes with 55,800 x-ray pixels thermally connected to 5,688 MMC sensors. Subarrays demonstrate three types of pixels, which have different energy and spatial resolution goals in LXM. Pixel pitch is 50 or 25 µm. For two subarrays, use of position sensitive detectors, in a "hydra" configuration with 25 x-ray absorbers per sensor, helps achieve a large focal plane by increasing pixel count relative to readout channels. Since each absorber has a different thermal link to its sensor, it generates a different pulse shape and enables discrimination of pixel position. Superconducting wiring from all sensors was brought out to the perimeter of the overall array using multiple buried metal layers planarized by Chemical Mechanical Planarization to achieve high critical current, low inductance, and high fabrication yield. An automated, algorithmic approach was used to layout the complex wiring pattern. For readout with existing small arrays of Superconducting Quantum Interference (SQUID) amplifiers, 112 selected pixels were connected to wire bond pads. In hydras, we successfully identified 25 pulse shapes using rise-time and pulse height. Pulse shapes were similar to simulations. We measured noise and responsivity to substrate temperature and applied x-ray pulses. While we designed sensors to have high inductance to relative to stray inductance of wiring, we had only mismatched (lower input inductance) SQUIDs available in our current apparatus, giving non-optimized resolution. We compared measured and calculated energy resolutions. We have the required sensitivity to reach < 3 eV FWHM resolution for 6 keV x-rays, required for the LXM Main Array, and the ability to discriminate the 25 different absorber pixels down to energies < 300 eV.

Metallic magnetic calorimeter (MMC) technology is a leading contender for detectors for the Lynx X-ray Microcalorimeter, which is an imaging spectrometer consisting of an array of greater than 100,000 pixels. The fabrication of such large arrays presents a challenge when attempting to route the superconducting wiring from the pixels to the multiplexed readout. If the wiring is designed to be planar, then an aggressive, submicron scale wiring pitch has to be employed, which is technically challenging to design and fabricate on account of the requirements of low inductance, low cross-talk, high critical currents and high yield. An alternative way to achieve large scale, high density wiring is through the use of multiple buried metal layers, planarized by Chemical Mechanical Planarization. This approach is well-suited for connecting thousands of pixels on a large focal plane to readout chips, and also for fabricating sensor meander coils with narrow line widths, which helps in increasing the sensor inductance and thus alleviates stray inductance issues associated with the wiring in large size arrays. In this work we describe the fabrication of high sensor inductance MMC arrays implementing Lynx concepts and incorporating multiple layers of buried Nb wiring. The detector array is composed of three sub-arrays with pixels optimized to meet the different science driven performance requirements of Lynx. In two of the sub-arrays we adopt a thermal multiplexing scheme to read out pixels by coupling 25 absorbers to a single sensor through thermal links of varied thermal conductance. We demonstrate the successful fabrication of multi-absorber MMCs with fine pitch pixels in very large size arrays.

The Lynx mission concept, under development ahead of the 2020 Astrophysics Decadal Review, includes the Lynx X-ray Microcalorimeter (LXM) as one of its primary instruments. The LXM uses a microcalorimeter array at the focus of a high-throughput soft x-ray telescope to enable high-resolution nondispersive spectroscopy in the soft x-ray waveband (0.2 to 15 keV) with exquisite angular resolution. Similar to other x-ray microcalorimeters, the LXM uses a set of blocking filters mounted within the dewar that pass the photons of interest (x-rays) while attenuating the out-of-band long-wavelength radiation. Such filters have been successfully used on previous orbital and suborbital instruments; however, the Lynx science objectives, which emphasize observations in the soft x-ray band (<1keV), pose more challenging requirements on the set of LXM blocking filters. We present an introduction to the design of the LXM optical/IR blocking filters and discuss recent advances in filter capability targeted at LXM. In addition, we briefly describe the external filters and the modulated x-ray sources to be used for onboard detector calibration.

Lynx, one of the four strategic mission concepts under study for the 2020 Astrophysics Decadal Survey, provides leaps in capability over previous and planned x-ray missions and provides synergistic observations in the 2030s to a multitude of space- and ground-based observatories across all wavelengths. Lynx provides orders of magnitude improvement in sensitivity, on-axis subarcsecond imaging with arcsecond angular resolution over a large field of view, and high-resolution spectroscopy for point-like and extended sources in the 0.2- to 10-keV range. The Lynx architecture enables a broad range of unique and compelling science to be carried out mainly through a General Observer Program. This program is envisioned to include detecting the very first seed black holes, revealing the high-energy drivers of galaxy formation and evolution, and characterizing the mechanisms that govern stellar evolution and stellar ecosystems. The Lynx optics and science instruments are carefully designed to optimize the science capability and, when combined, form an exciting architecture that utilizes relatively mature technologies for a cost that is compatible with the projected NASA Astrophysics budget.

We are studying the development of space-flight compatible room-temperature electronics for the Lynx x-ray microcalorimeter (LXM) of the Lynx mission. The baseline readout technique for the LXM is microwave SQUID multiplexing. The key modules at room temperature are the RF electronics module and the digital electronics and event processor (DEEP). The RF module functions as frequency converters and mainly consists of local oscillators and I/Q mixers. The DEEP performs demultiplexing and event processing, and mainly consists of field-programmable gate arrays, ADCs, and DACs. We designed the RF electronics and DEEP to be flight ready, and estimated the power, size, and mass of those modules. There are two boxes each for the RF electronics and DEEP for segmentation, and the sizes of the boxes are 13 in: × 13 in: × 9 in: for the RF electronics and 15.5 in: × 11.5 in: × 9.5 in: for the DEEP. The estimated masses are 25.1 kg∕box for the RF electronics box and 24.1 kg∕box for the DEEP box. The maximum operating power for the RF electronics is 141 W or 70.5 W∕box, and for the DEEP box is 615 W or 308 W∕box. The overall power for those modules is 756 W. We describe the detail of the designs as well as the approaches to the estimation of resources, sizes, masses, and powers.

One option for the detector technology to implement the Lynx x-ray microcalorimeter (LXM) focal plane arrays is the metallic magnetic calorimeter (MMC). Two-dimensional imaging arrays of MMCs measure the energy of x-ray photons by using a paramagnetic sensor to detect the temperature rise in a microfabricated x-ray absorber. While small arrays of MMCs have previously been demonstrated that have energy resolution better than the 3 eV requirement for LXM, we describe LXM prototype MMC arrays that have 55,800 x-ray pixels, thermally linked to 5688 sensors in “hydra” configurations, and that have sensor inductance increased to avoid signal loss from the stray inductance in the large-scale arrays when the detectors are read out with microwave superconducting quantum interference device multiplexers, and that use multilevel planarized superconducting wiring to provide low-inductance, low-crosstalk connections to each pixel. We describe the features of recently tested MMC prototype devices and simulations of expected performance in designs opti- mized for the three subarray types in LXM.

We are developing arrays of position-sensitive microcalorimeters for future x-ray astronomy applications. These position-sensitive devices commonly referred to as hydras consist of multiple x-ray absorbers, each with a different thermal coupling to a single-transition-edge sensor microcalorimeter. Their development is motivated by a desire to achieve very large pixel arrays with some modest compromise in performance. We report on the design, optimization, and first results from devices with small pitch pixels (<75 μm) being developed for a high-angular and energy resolution imaging spectrometer for Lynx. The Lynx x-ray space telescope is a flagship mission concept under study for the National Academy of Science 2020 decadal survey. Broadband full-width-half-maximum (FWHM) resolution measurements on a 9-pixel hydra have demonstrated ΔE(FWHM) = 2.23 ± 0.14 eV at Al-Kα, ΔE(FWHM) = 2.44 ± 0.29 eV at Mn-Kα, and ΔE(FWHM) = 3.39 ± 0.23 eV at Cu-Kα. Position discrimination is demonstrated to energies below <1 keV and the device performance is well-described by a finite-element model. Results from a prototype 20-pixel hydra with absorbers on a 50-μm pitch have shown ΔE(FWHM) = 3.38 ± 0.20 eV at Cr-Kα1. We are now optimizing designs specifically for Lynx and extending the number of absorbers up to 25/hydra. Numerical simulation suggests optimized designs could achieve ∼3 eV while being compatible with the bandwidth requirements of the state-of-the art multiplexed readout schemes, thus making a 100,000 pixel microcalorimeter instrument a realistic goal.

The Lynx x-ray microcalorimeter (LXM) is an imaging spectrometer for the Lynx satellite mission, an x-ray telescope being considered by NASA to be a new flagship mission. Lynx will enable unique astrophysical observations into the x-ray universe due to its high angular resolution and large field of view. The LXM consists of an array of over 100,000 pixels and poses a significant technological challenge to achieve the high degree of multiplexing required to read out these sensors. We discuss the details of microwave superconducting quantum interference device (SQUID) multiplexing and describe why it is ideally suited to the needs of the LXM. This case is made by summarizing the current and predicted performance of microwave SQUID multiplexing and describing the steps needed to optimize designs for all the LXM arrays. Finally, we describe our plan to advance the technology readiness level (TRL) of microwave SQUID multiplexing of the LXM microcalorimeters to TRL-5 by 2024.

Lynx is a proposed NASA X-Ray telescope flight mission aimed at achieving state-of-the-art angular and energy resolution with a 100 kilopixel array to probe the hot energetic young universe in unprecedented detail. To achieve these goals, our team plans on leveraging our current work in development of the focal plane for the Athena X-Ray Integral Field Unit (X-IFU) while advancing the state-of-the-art in transition edge sensor (TES) X-ray detector technology. The TES is an optimal technology for achieving both high energy and fine angular resolution at the same time because pixel features can be made extremely small and the absorber which dominates the heat capacity can be tuned to meet resolution requirements. Specifically, the proposed mission concept calls for a hybrid detector of three different arrays fabricated in the same planar process in one focal plane and optimized for different science goals. The main arrays consist of 5x5 hydras, 25 pixels of 4 micron thick Au absorbers each with a different thermal link to one common TES. The outer array has absorbers on a 50-micron pitch for most of the 5 arc-minute field-of-view, and the inner array has 25-micron absorbers for the central 1 arc-minute region. A high resolution array consisting of single pixel 1 micron thick Au absorbers on 50-micron pitch will lie off to the side. Reading out an array of this magnitude will likely require improvements in indium bump bonding to superconducting flexible wiring. Fabrication of absorbers of two different sizes requires electroplating through a photoresist mold by careful tuning of the current density to achieve uniform flat absorbers on a fine pitch scale, followed by ion milling to yield narrow streets separating the pixels while preserving high quantum efficiency. We report on progress made at fabricating the hybrid array with different absorber sizes and thicknesses. Further, we also report on ongoing work to adequately heat sink the pixels with backside wire bonding and copper coating. We also report on work to improve detector pixel yield and top side indium bump bonding to flexible wiring.

Lynx, one of the four mission concepts under consideration for the next Astrophysics DecadalReview, will include a microcalorimeter array consisting of more than 100,000 pixels in a compact arrangement with absorber pitch as small as 25 microns. In order to realize the desired array scale, fine-pitch multi-level superconducting wiring with high yield, compatible with rapid expansion of our hydra absorber designs, is essential. We have demonstrated a method of integrating transition edge sensor (TES) microcalorimeters with suitable multilevel buried wiring, fabricated at MIT Lincoln Laboratory using advanced tools dedicated to superconducting circuit fabrication. The TES Mo/Au bilayer is deposited on a high-quality oxide surface created by chemical-mechanical polishing, allowing tight specifications on the TES superconducting transition and link conductivity to be achieved even though the process order has been inverted. The TESs contact the top-level niobium wiring through vias etched through silicon dioxide down to the topmost wiring layer. The article discusses the overall fabrication process, as wellas the behavior of sensors with different via designs, proximity structures, and lateral sizes. An initial iteration of the integrated fabrication process indicates that microcalorimeters fabricated in this way should meet mission specifications using a Mo/Au bilayer with a reasonable critical temperature below 100 mK.

Lynx is a concept under study for prioritization in the 2020 Astrophysics Decadal Survey. Providing orders of magnitude increase in sensitivity over Chandra, Lynx will examine the first black holes and their galaxies, map the large-scale structure and galactic halos, and shed new light on the environments of young stars and their planetary systems. In order to meet the Lynx science goals, the telescope consists of a high-angular resolution optical assembly complemented by an instrument suite that may include a High Definition X-ray Imager, X-ray Microcalorimeter and an X-ray Grating Spectrometer. The telescope is integrated onto the spacecraft to form a comprehensive observatory concept. Progress on the formulation of the Lynx telescope and observatory configuration is reported in this paper.

We have developed transition-edge sensor (TES) microcalorimeter arrays with high count-rate capability and high energy resolution to carry out x-ray imaging spectroscopy observations of various astronomical sources and the Sun. We have studied the dependence of the energy resolution and throughput (fraction of processed pulses) on the count rate for such microcalorimeters with two different transition temperatures T(sub c). Devices with both transition temperatures were fabricated within a single microcalorimeter array directly on top of a solid substrate where the thermal conductance of the microcalorimeter is dependent upon the thermal boundary resistance between the TES sensor and the dielectric substrate beneath. Because the thermal boundary resistance is highly temperature dependent, the two types of device with different T(sub c)(sup s) had very different thermal decay times, approximately one order of magnitude different. In our earlier report, we achieved energy resolutions of 1.6 and 2.eV at 6 keV from lower and higher T(sub c) devices, respectively, using a standard analysis method based on optimal filtering in the low flux limit. We have now measured the same devices at elevated x-ray fluxes ranging from 50 Hz to 1000 Hz per pixel. In the high flux limit, however, the standard optimal filtering scheme nearly breaks down because of x-ray pile-up. To achieve the highest possible energy resolution for a fixed throughput, we have developed an analysis scheme based on the socalled event grade method. Using the new analysis scheme, we achieved 5.0 eV FWHM with 96 Percent throughput for 6 keV x-rays of 1025 Hz per pixel with the higher T(sub c) (faster) device, and 5.8 eV FWHM with 97 Percent throughput with the lower T(sub c) (slower) device at 722 Hz.

Multi-pixel transition-edge sensors (TESs), commonly referred to as 'hydras', are a type of position sensitive micro-calorimeter that enables very large format arrays to be designed without commensurate increase in the number of readout channels and associated wiring. In the hydra design, a single TES is coupled to discrete absorbers via varied thermal links. The links act as low pass thermal filters that are tuned to give a different characteristic pulse shape for x-ray photons absorbed in each of the hydra sub pixels. In this contribution we report on the experimental results from hydras consisting of up to 20 pixels per TES. We discuss the design trade-offs between energy resolution, position discrimination and number of pixels and investigate future design optimizations specifically targeted at meeting the readout technology considered for Lynx.

The performance of Transition-Edge Sensors (TES) and their SQUID multiplexed read-outs are very sensitive to the ambient magnetic field from Earth and fluctuations that can arise due to fluctuating magnetic fields outside of the focal plane assembly from the Adiabatic Demagnetization Refrigerator (ADR).Thus, the experimental platform we are building to test the FPA of the X-ray Integral Field Unit (X-IFU) of the Athena mission needs to include a series of shields and a coil in order to meet the following requirement of magnetic field density and uniformity.

We performed a small-scale demonstration at GSFC of high-resolution x-ray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space based x-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 50 mK stage of our laboratory ADR. Using a ROACH2 FPGA at room temperature, we simultaneously read out 32 pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to RF SQUIDs. The resonators are spaced 6 MHz apart (at approx. 5.9 GHz) and have quality factors of approximately 15,000. Using flux-ramp modulation frequencies of 160 kHz we have achieved spectral resolutions of 3 eV FWHM on each pixel at 6 keV. We will present the measured system-level noise and maximum slew rates, and briefly describe the implications for future detector and readout design.

We have been developing superconducting transition-edge sensor (TES) microcalorimeters for a variety of potential astrophysics missions, including Athena. The X-ray Integral Field Unit (X-IFU) instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. The traditional approach within our group has been to use square TES bilayers on molybdenum and gold that are between 100 and 140 microns in size, deposited on silicon nitride membranes to provide a weak thermal conductance to a 50 mK heat bath temperature. It has been shown that normal metal stripes on top of the bilayer are needed to keep the unexplained noise at a level consistent with the expected based upon estimates for the non-equilibrium non-linear Johnson noise.In this work we describe a new approach in which we use a square TES bilayer that is 50 microns in size. While the weak link effect is much stronger in this size of TES, we have found that excellent spectral performance can be achieved without the need for any normal metal strips on top of the TES. A spectral performance of 1.58 eV at 6 KeV has been achieved, the best resolution seen in any of our devices with this pixel size. The absence of normal metal stripes has led to more uniform transition shapes, and more reliable excellent spectral performance. The smaller TES size has meant that that the thermal conductance to the heat bath, determined by the perimeter length of the TES and the membrane thickness, is lower than on previous devices, and thus has a lower count rate capability. This is an advantage for low count-rate applications where the slower speed enables easier multiplexing in the read-out, thus potential higher multiplexing factors. In order to recover the higher count rate capabilities, a potential path exits using thicker silicon nitride membranes to increase the thermal conductance to the heat bath.

We have developed large-format, close-packed X-ray microcalorimeter arrays fabricated on solid substrates, designed to achieve high energy resolution with count rates up to a few hundred counts per second per pixel for X-ray photon energies upto 8 keV. Our most recent arrays feature 31-micron absorbers on a 35-micron pitch, reducing the size of pixels by about a factor of two. This change will enable an instrument with significantly higher angular resolution. In order to wire out large format arrays with an increased density of smaller pixels, we have reduced the lateral size of both the microstrip wiring and the Mo/Au transition-edge sensors (TES). We report on the key physical properties of these small TESs and the fine Nb leads attached, including the critical currents and weak-link properties associated with the longitudinal proximity effect.

The X-ray integrated field unit (X-IFU) in European Space Agency's (ESA's) Athena mission will be the first high-resolution X-ray spectrometer in space using a large-format transition-edge sensor microcalorimeter array. Motivated by optimization of detector performance for X-IFU, we have conducted an extensive campaign of parametric characterization on transition-edge sensor (TES) detectors with nominal geometries and physical properties in order to establish sensitivity trends relative to magnetic field, dc bias on detectors, operating temperature, and to improve our understanding of detector behavior relative to its fundamental properties such as thermal conductivity, heat capacity, and transition temperature. These results were used for validation of a simple linear detector model in which a small perturbation can be introduced to one or multiple parameters to estimate the error budget for X-IFU. We will show here results of our parametric characterization of TES detectors and briefly discuss the comparison with the TES model.

We are exploring the properties of electron-beam evaporated molybdenum thin films on silicon nitride coated silicon wafers at substrate temperatures between room temperature and 650 C. The temperature dependence of film stress, transition temperature, and electrical properties are presented. X-ray diffraction measurements are performed to gain information on molybdenum crystallite size and growth. Results show the dominant influence of the crystallite size on the intrinsic properties of our films. Wafer-scale uniformity, wafer yield, and optimal thermal bias regime for TES fabrication are discussed.

We develop superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting the specifications of X-ray imaging spectrometers, including high count rate, high energy resolution, and large field of view. In particular, a focal plane composed of two subarrays: one of fine pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit Instrument on the European Space Agencys ATHENA mission. We have based the subarrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all-gold X-ray absorber on 50 and 75 micron pitch, where the Mo/Au TES sits atop a thick metal heatsinking layer, have shown high resolution and can accommodate high count rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au, and an added bismuth layer in a 250-sq micron absorber. To tune the parameters of each subarray requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single-ion milling step. We demonstrate methods for integrating the heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each subarray, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (T(sub c)) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these 'hybrid' arrays will be presented.

Four astrophysics missions are currently being studied by NASA as candidate large missions to be chosen inthe 2020 astrophysics decadal survey.1 One of these missions is the X-Ray Surveyor (XRS), and possibleconfigurations of this mission are currently under study by a science and technology definition team (STDT). Oneof the key instruments under study is an X-ray microcalorimeter, and the requirements for such an instrument arecurrently under discussion. In this paper we review some different detector options that exist for this instrument,and discuss what array formats might be possible. We have developed one design option that utilizes eithertransition-edge sensor (TES) or magnetically coupled calorimeters (MCC) in pixel array-sizes approaching 100kilo-pixels. To reduce the number of sensors read out to a plausible scale, we have assumed detector geometriesin which a thermal sensor such a TES or MCC can read out a sub-array of 20-25 individual 1 pixels. In thispaper we describe the development status of these detectors, and also discuss the different options that exist forreading out the very large number of pixels.

NASA's Chandra X-ray Observatory continues to provide an unparalleled means for exploring the high-energy universe. With its half-arcsecond angular resolution, Chandra studies have deepened our understanding of galaxy clusters, active galactic nuclei, galaxies, supernova remnants, neutron stars, black holes, and solar system objects. As we look beyond Chandra, it is clear that comparable or even better angular resolution with greatly increased photon throughput is essential to address ever more demanding science questions-such as the formation and growth of black hole seeds at very high redshifts; the emergence of the first galaxy groups; and details of feedback over a large range of scales from galaxies to galaxy clusters. Recently, we initiated a concept study for such a mission, dubbed X-ray Surveyor. The X-ray Surveyor strawman payload is comprised of a high-resolution mirror assembly and an instrument set, which may include an X-ray microcalorimeter, a high-definition imager, and a dispersive grating spectrometer and its readout. The mirror assembly will consist of highly nested, thin, grazing-incidence mirrors, for which a number of technical approaches are currently under development-including adjustable X-ray optics, differential deposition, and new polishing techniques applied to a variety of substrates. This study benefits from previous studies of large missions carried out over the past two decades and, in most areas, points to mission requirements no more stringent than those of Chandra.

Requirements for focal planes for x-ray astrophysics vary widely depending on the needs of the science application such as photon count rate, energy band, resolving power, and angular resolution. Transition edge sensor x-ray calorimeters can encounter limitations when optimized for these specific applications. Balancing specifications leads to choices in, for example, pixel size, thermal sinking arrangement, and absorber thickness and material. For the broadest specifications, instruments can benefit from multiple pixel types in the same array or focal plane. Here we describe a variety of focal plane architectures that anticipate science requirements of x-ray instruments for heliophysics and astrophysics. We describe the fabrication procedures that enable each array and explore limitations for the specifications of such arrays, including arrays with multiple pixel types on the same array.

Recent advances in X-ray microcalorimeters enable a wide range of possible focal plane designs for the X-ray Microcalorimeter Spectrometer (XMS) instrument on the future Advanced X-ray Spectroscopic Imaging Observatory (AXSIO) or X-ray Astrophysics Probe (XAP). Small pixel designs (75 microns) oversample a 5-10" PSF by a factor of 3-6 for a 10 m focal length, enabling observations at both high count rates and high energy resolution. Pixel designs utilizing multiple absorbers attached to single transition-edge sensors can extend the focal plane to cover a significantly larger field of view, albeit at a cost in maximum count rate and energy resolution. Optimizing the science return for a given cost and/or complexity is therefore a non-trivial calculation that includes consideration of issues such as the mission science drivers, likely targets, mirror size, and observing efficiency. We present a range of possible designs taking these factors into account and their impacts on the science return of future large effective-area X-ray spectroscopic missions.