156 results on '"Baklanov, M.R."'
Search Results
2. A detailed ellipsometric porosimetry and positron annihilation spectroscopy study of porous organosilicate-glass films with various ratios of methyl terminal and ethylene bridging groups
3. Temperature evolution of organosilicate glass films with organic bridges
4. UV cure of oxycarbosilane low-k films
5. Improvement of cohesion strength in ULK OSG materials by pore structure adjustment
6. Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films
7. Electron spin resonance analysis of sputtering-induced defects in advanced low-κ insulators (κ = 2.0–2.5)
8. Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
9. Chemisorption of ALD precursors in and on porous low-k films
10. Electron spin resonance study of defects in low- κ oxide insulators ( κ = 2.5–2.0)
11. Active species in porous media: Random walk and capture in traps
12. Integrated diffusion–recombination model for describing the logarithmic time dependence of plasma damage in porous low- k materials
13. Effect of top power on a low- k film during oxygen strip in a TCP etch chamber
14. Corrigendum to “A detailed ellipsometric porosimetry and positron annihilation spectroscopy study of porous organosilicate-glass films with various ratios of methyl terminal and ethylene bridging groups” [Microporous Mesoporous Mater. 306 (2020) 110434]
15. Quantum-critical region of the disorder-driven superconductor–insulator transition
16. Effect of pressure on efficiency of UV curing of CVD-derived low- k material at different wavelengths
17. Oxygen chemiluminescence in He plasma as a method for plasma damage evaluation
18. Diffusion of solvents in thin porous films
19. Atomic Structure and Optical Properties of Plasma Enhanced Chemical Vapor Deposited SiCOH Low-k Dielectric Film-=SUP=-*-=/SUP=-
20. A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates
21. Challenges in the implementation of low-k dielectrics in the back-end of line
22. From quantum corrections to magnetic-field-tuned superconductor–insulator quantum phase transition in TiN films
23. Oxidation and roughening of silicon during annealing in a rapid thermal processing chamber
24. Internal matrix structure of low-κ mesoporous silica and its relation to mechanical properties
25. High-rate deposition of a-Si:H films using a flow plasma-chemical method with electron beam activation
26. Effect of the C-bridge on UV properties of organosilicate films
27. Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions
28. Non-destructive characterisation of porous low-k dielectric films
29. Comparison of techniques to characterise the density, porosity and elastic modulus of porous low- k SiO 2 xerogel films
30. Disorder and vortex matching effects in nanoperforated ultrathin TiN films
31. Magnetic field-induced dissipation-free state in superconducting nanostructures
32. Applications of in-line oxygen monitoring to a rapid thermal processing tool: diagnosing gas flow dynamics and silicidation processes
33. The mechanism of low-k SiOCH film modification by oxygen atoms
34. Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening
35. Low dielectric constant materials for microelectronics
36. Negative magnetoresistance and quantum oscillations in ultrathin perforated PtSi films
37. Toward successful integration of gap-filling ultralow-k dielectrics
38. Laser anneal of oxycarbosilane low-k film
39. Impact of UV wavelength and curing time on the properties of spin-coated low-k films
40. Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
41. Kinetics of Gas - Solid Interactions
42. HF etching mechanisms of advanced low-k films
43. Mesoscopic SNS junctions on the basis of superconducting PtSi films
44. Maki–Thompson corrections in thin superconducting PtSi films nearby Tc
45. Electron spin resonance analysis of sputtering-induced defects in advanced low-κ insulators (κ=2.0–2.5)
46. The Diffusion Mechanism of Polymer Transfer Through Nanopores
47. Time dependent dielectric breakdown study of organo silicate glass materials over a wide range of k-values
48. Electron spin resonance study of defects in low-κ oxide insulators (κ=2.5–2.0)
49. Fundamental study of atomic layer deposition in and on porous low-k films
50. Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics
Catalog
Books, media, physical & digital resources
Discovery Service for Jio Institute Digital Library
For full access to our library's resources, please sign in.