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With the improving energy resolution of transitionedge sensor (TES) based microcalorimeters, performance verification and calibration of these detectors has become increasingly challenging, especially in the energy range below 1 keV where fluorescent atomic X-ray lines have linewidths that are wider than the detector energy resolution and require impractically high statistics to determine the gain and deconvolve the instrumental profile. Better behaved calibration sources such as grating monochromators are too cumbersome for space missions and are difficult to use in the lab. As an alternative, we are exploring the use of pulses of 3 eV optical photons delivered by an optical fiber to generate combs of known energies with known arrival times. Here, we discuss initial results of this technique obtained with 2 eV and 0.7 eV resolution X-ray microcalorimeters. With the 2 eV detector, we have achieved photon number resolution for pulses with mean photon number up to 133 (corresponding to 0.4 keV).

Superconducting transition-edge sensor (TES) microcalorimeters are being developed for a variety of potential astrophysics missions, including Athena. The X-ray integral field unit instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. In this work, we describe a new approach with 50 μm square TESs consisting of a Mo/Au bilayer, deposited on silicon nitride membranes to provide a weak thermal conductance to a ~ 50 mK heat bath. Larger TESs usually have additional normal metal stripes on top of the bilayer to reduce the noise. However, we have found that excellent spectral performance can be achieved without the need for any normal metal stripes on top of the TES. A spectral performance of 1.58 ± 0.12 eV at 5.9 keV has been achieved, the best resolution seen in any of our devices with this pixel size.

For future X-ray astrophysics missions, X-ray microcalorimeters can be optimized with different properties in different regions of the focal plane. This approach has the potential to improve microcalorimeter instrument capabilities with efficient use of instrument resources. For example a point-source array optimized for high angular resolution, high count-rate observations could be accompanied by a main array to expand the field of view for diffuse observations. In this approach, it is desirable to be able to simultaneously optimize different transition-edge sensor (TES) geometries on a single wafer design. The key properties of TESs such as transition temperature and shape are a strong function of size and geometry due to the complex interplay between the proximity effect from the superconducting bias electrodes and the normal metal features used for noise suppression and absorber contact. As a result, devices fabricated with the same deposited layer but with different sizes will have different transition temperatures and different response to X-ray events. In this paper, we present measurements of the transition temperature and properties of devices with different sizes and normal metal features, and discuss how by tuning the geometry we can achieve the desired pixel parameters for a given application. We also describe measurements of transition properties from large-format hybrid arrays containing three different pixel types.

The X-ray integrated field unit (X-IFU) in European Space Agency's (ESA's) Athena mission will be the first high-resolution X-ray spectrometer in space using a large-format transition-edge sensor microcalorimeter array. Motivated by optimization of detector performance for X-IFU, we have conducted an extensive campaign of parametric characterization on transition-edge sensor (TES) detectors with nominal geometries and physical properties in order to establish sensitivity trends relative to magnetic field, dc bias on detectors, operating temperature, and to improve our understanding of detector behavior relative to its fundamental properties such as thermal conductivity, heat capacity, and transition temperature. These results were used for validation of a simple linear detector model in which a small perturbation can be introduced to one or multiple parameters to estimate the error budget for X-IFU. We will show here results of our parametric characterization of TES detectors and briefly discuss the comparison with the TES model.

We are developing superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting specifications of X-ray imaging spectrometers including high count-rate, high energy resolution, and large field-of-view. In particular, a focal plane composed of two sub-arrays: one of fine-pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit (X-IFU) instrument on the European Space Agency’s Athena mission. We have based the sub-arrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all gold X-ray absorber on 50 and 75 micron scales where the Mo/Au TES sits atop a thick metal heatsinking layer have shown high resolution and can accommodate high count-rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au and an added bismuth layer in a 250 micron square absorber. To tune the parameters of each sub-array requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single ion milling step. We demonstrate methods for integrating heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each sub-array, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (Tc) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these “hybrid” arrays will be presented.

We have specialized astronomical applications for X-ray microcalorimeters with superconducting transition edge sensors (TESs) that require exceptionally good TES performance, but which operate in the small-signal regime. We have therefore begun a program to carefully characterize the entire transition surface of TESs with and without the usual zebra stripes to see if there are reproducible local “sweet spots” where the performance is much better than average. These measurements require precise knowledge of the circuit parameters. Here, we show how the Shapiro effect can be used to precisely calibrate the value of the shunt resistor. We are also investigating the effects of stress and external magnetic fields to better understand reproducibility problems.

We are developing kilo-pixel arrays of small-pitch transition-edge sensors for high spectral-resolving, high count-rate applications in astrophysics and solar physics measurements. We have fabricated and tested pixels that are $$65\,\upmu $$ m in size on a silicon substrate with an X-ray flux of $${\sim }100$$ counts per second (cps) per pixel. The X-ray pulses were recorded and analyzed in various ways to obtain high throughput with good energy resolution. We have demonstrated 2.3 eV FWHM resolution with 99.6 % throughput for a 6-keV X-ray flux of 100 cps.

Microcalorimeters onboard future x-ray observatories require an anti-coincidence detector to remove environmental backgrounds. In order to most effectively integrate this anti-coincidence detector with the main microcalorimeter array, both instruments should use similar read-out technology. The detectors used in the Cryogenic Dark Matter Search (CDMS) use a phonon measurement technique that is well suited for an anti-coincidence detector with a microcalorimeter array using SQUID readout. This technique works by using a transition-edge sensor (TES) connected to superconducting collection fins to measure the athermal phonon signal produced when an event occurs in the substrate crystal. Energy from the event propagates through the crystal to the superconducting collection fins, creating quasiparticles, which are then trapped as they enter the TES where they produce a signal. We are currently developing a prototype anti-coincidence detector for future x-ray missions and have recently fabricated test devices with Mo/Au TESs and Al collection fins. We present results from the first tests of these devices which indicate a proof of concept that quasiparticle trapping is occurring in these materials.

We present experimental results and designs of large‐absorber transition‐edge‐sensor (TES) X‐ray microcalorimeters. Much of our effort has focused on developing close‐packed arrays of 250–300 μm‐sized pixels suitable for the X‐ray Microcalorimeter Spectrometer (XMS) on the International X‐ray Observatory. These efforts have produced devices with the requisite energy resolution of ≳2.5 eV (FWHM) at 6 keV. There are several upcoming applications, however, that require arrays composed of significantly larger pixels. In this contribution we present experimental results from 490 μm‐sized pixels that have attained 3.5 eV energy resolution at 6 keV. These devices are precursors to the pixels that are being developed for the XMS extended array. In addition, we briefly describe detector designs for the Micro‐X sounding rocket experiment, which also requires an array of large‐area TES microcalorimeters.

We have developed microshutter array systems at NASA Goddard Space Flight Center for use as multi-object aperture arrays for a Near-Infrared Spectrometer (NIRSpec) instrument. The instrument will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope, after the Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light from objected galaxies in space with high efficiency and high contrast. Arrays are close-packed silicon nitride membranes with a pixel size close to 100x200 μm. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with minimized stress concentration. In order to enhance optical contrast, light shields are made on each shutter to prevent light leak. Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS bulk-micromachining and packaged utilizing a novel single-sided indium flip-chip bonding technology. The MSA flight system consists of a mosaic of 2 x 2 format of four fully addressable 365 x 171 arrays. The system will be placed in the JWST optical path at the focal plane of NIRSpec detectors. MSAs that we fabricated passed a series of qualification tests for flight capabilities. We are in the process of making final flight-qualified MSA systems for the JWST mission.

A complex MEMS device, microshutter array system, is being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instrument will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light with high efficiency and high contrast. Arrays are close-packed silicon nitride membranes with a pixel size close to 100x200 mm. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast. Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS bulk-micromachining technologies and packaged using single-sided indium flip-chip bonding technology. The MSA flight concept consists of a mosaic of 2 x 2 format of four fully addressable 365 x 171 arrays placed in the JWST optical path at the focal plane.

Two-dimensional MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use in the near-infrared region on the James Webb Space Telescope (JWST). The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast. The JWST environment requires cryogenic operation at 35K. Microshutter arrays are fabricated out of silicon-oxide-insulated (SOI) silicon wafers. Arrays are close-packed silicon nitride membranes with a pixel size of 100x200 p. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes a multi- layer metal deposition and patterning of shutter electrodes and magnetic pads, reactive ion etching (NE) of the front side to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch down to the nitride shutter membrane to form W e s and relieve shutters from the silicon substrate. An additional metal deposition and patterning is used to form back electrodes. Shutters are actuated using a magnetic force and latched using an electrostatic force. . . . KEYWORDS: microshutter, MEMS, RIE, DRIE, micro-optics, near inbred, space telescope

Micro Electromechanical System (MEMS) microshutter arrays are being developed at NASA Goddard Space Flight Center for use as a field selector of the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). The microshutter arrays are designed for the spontaneous selection of a large number of objects in the sky and the transmission of light to the NIRSpec detector with high contrast. The JWST environment requires cryogenic operation at 35 K. Microshutter arrays are fabricated out of silicon-on-insulator (SOI) silicon wafers. Arrays are close-packed silicon nitride membranes with a pixel size of 100 x 200 μm. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are processed for blocking light from gaps between shutters and frames. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes multi-layer metal depositions, the patterning of magnetic stripes and shutter electrodes, a reactive ion etching (RIE) to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch to form mechanical supporting grids and release shutters from the silicon substrate. An additional metal deposition is used to form back electrodes. Shutters are actuated by a magnetic force and latched using an electrostatic force. Optical tests, addressing tests, and life tests are conducted to evaluate the performance and the reliability of microshutter arrays.

Two-dimensional microshutter arrays are being developed at NASA Goddard Space Flight Center for the Next Generation Space Telescope (NGST) for use in the near-infrared region. Functioning as object selection devices, the microshutter arrays are designed for the transmission of light with high efficiency and high contrast. The NGST environment requires cryogenic operation at 45K. Arrays are close-packed silicon nitride membranes with a pixel size of 100 X 100 micrometers . Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. The mechanical shutter arrays are fabricated with MEMS technologies. The processing includes a RIE front-etch to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, and a deep RIE (DRIE) back-etch down to the nitride shutter membrane to form frames and to relieve shutters from the silicon substrate. Two approaches for shutter actuation have been developed. Shutters are actuated using either a combined mechanical and electrostatic force or a combined magnetic and electrostatic force. A CMOS circuit embedded in the frame between shutters allows programmable shutter selection for the first approach. A control of row and column electrodes fulfills shutter selection for the second approach.

A 2D array of individually addressable micro-mirrors with 100 micrometers by 100 micrometers pixel size, capable of tilting +/- 100 by electrostatic actuation is being developed and fabricated at the Detector Development Laboratory of NASA, GSFC. The development requires integration of CMOS and MEMS fabrication processes. We have competed extensive analytical studies and performed laboratory test to compare model predictions with actual performance of a 3 by 3 array. We are testing the address and driver circuit for a 32 by 32 array and also developing the process integration of the CMOS and MEMS fabrication of the larger arrays. The mirrors are capable of operating at cryogenic temperature for astronomical applications. Our goal is to extend the development to a 25 6by 256 array for a wide variety of space applications including the multi-object-spectrometer in the next generation space telescope.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

The Stratospheric Aerosol and Gas Experiment (SAGE) III requires a detector that provides spectral coverage from 280 - 1050 nm. In order to achieve higher responsivity at the ultra-violet wavelengths a backside-thinned silicon CCD technology was chosen. For strength, the backside-thinned detector was bonded to a soda glass substrate. The device thinness allowed the long near infrared wavelengths to pass through the silicon, scatter off the soda glass, and cause cross talk into nearby pixels. Reflections from the soda glass caused etalon-like effects and gave the thinned CCD a highly temperature dependent response. These difficulties led the project manager to examine different options for a replacement detector. Photodiode/CCD technology based on the Moderate- Resolution Imaging Spectrometer-Tilt (MODIS-T) and Gas and Aerosol Monitoring Sensorcraft (GAMS) detectors systems was combined and used to design and fabricate a backup detector for the SAGE III program. The device design and characterization are presented. The design focused on elimination of the scattering due to the soda glass and the temperature dependent etalon effect, increasing charge storage capacity. The detector was designed to allow a retrofit with the existing SAGE III spectrometer. The primary disadvantage of the new detector is its loss of responsivity at the shorter wavelengths.

The Micro-X sounding rocket program will fly a 128-pixel array of transition-edge-sensor microcalorimeters to enable high-resolution X-ray imaging spectroscopy of supernova remnants. To match the angular resolution of the optics while maximizing the field-of-view and retaining a high energy resolution (2-4 eV at 1 keV), we have designed the pixels using 590 × 590 μm2 Au/Bi absorbers, which overhang 140 × 140 μm2 Mo/Au sensors. Here we report experimental results from flight-candidate arrays, including measurements of energy resolution, uniformity, and absorber thermalization. We describe the reduction in pixel-to-pixel crosstalk afforded by an angle-evaporated Cu backside heatsinking layer, which provides Cu coverage on the four sidewalls of the silicon wells beneath each pixel. In addition, we present measurements of devices that have an identical pixel architecture but were fabricated with thin (sub-micron) all-Au absorbers.

The composite infrared spctrometer (CIRS) is an important instrument for the upcoming Cassini mission for sensing infrared (IR) radiation from the Saturanian planetary system. We have delivered a linear, ten element, mercury cadmium telluride (HgCdTe) photoconductive detector array for use on focal plane 3 (FP3), which is responsible for detecting radiation from the 9.1 micrometer to 16.6 micrometer wavelength range. Reliable HgCdTe detectors require robust passivation, a low-stress zinc sulfide (ZnS) anti-reflection (AR) coating with good adhesion, and a proper optical cavity design to smooth out the resonance in the detector spectral response. During the development of CIRS flight array, we have demonstrated the potential of using an in-situ interfacial layer, such as SiNx, between ZnS and the anodic oxide. Such an interfacial layer drastically improves the adhesion between the ZnS and oxide, without degrading the minority carrier lifetime. We have also demonstrated the feasibility of applying a SiNx 'rain coat' layer over the ZnS to prevent moisture and other chemicals from attacking the AR coating, thus improving the long term reliability. This also enables device operation in a hazardous environment. The alumina/epoxy/HgCdTe/oxide/ZnS structure is a complicated multi-cavity optical system. We have developed an extensive device simulation, which enables us to make the optimal choice of individual cavity thickness for minimizing the resonance and maximizing the quantum efficiency. We have also used 0.05 micrometer alumina powder loaded epoxy to minimize the reflections at the epoxy/HgCdTe interface, thus minimizing the resonance.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

The composite infrared spectrometer (CIRS) instrument, an important component of the Cassini mission, consists of 3 focal plane arrays for sensing IR radiation of the Saturnian planetary system. Goddard Space Flight Center has fabricated, tested, and delivered high performance, 10- element HgCdTe photoconductive (PC) arrays for use on CIRS FP3, the focal plane responsible for detection of radiation in the 9.1 to 16.7 micrometers spectral band. The delivered flight array has peak responsivity 100 percent above CIRS specification, detectivity 30 percent or more above specification, and a cutoff wavelength of 17.3 micrometers at the operating temperature of 80 K. In order to achieve high performance at low frequency while maintaining limited power dissipation, we adopted a split-geometry detector structure. This design also ensured the buttability of the PC arrays to photovoltaic arrays supplied by CE-Saclay-France for detection of radiation in the 7.1 to 9.1 micrometers range. The detector structure is also noteworthy for its use of 0.05 micrometers Alumina powder-loaded epoxy to minimize reflection at the epoxy/HgCdTe interface, thus spoiling undesired optical resonance. This was done in order to meet the CIRS spectral uniformity requirement, which would have been difficult at these long wavelengths without this feature.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

A pinned photodiode/interline CCD Detector Array is under development for the EOS/MODIS-T project. Outstanding features of the device include large pixels, spectrally optimized fill factors, and blooming protection. The detector has 30 spatial rows and 32 spectral columns. The device layout is split into two halves; each half has its own detector area, storage area, and output structure.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

The simultaneous measurement of the spectrally and spatially variant transmittance of a linear variable order-sorting filter in a manner that closely resembles its conditions of actual use is described. The transmittance of a prototype order-sorting filter was measured in the 400- to 880-nm wavelength region by illuminating it with the output beam of a spectrophotometer while the filter was attached to the front of a 30 x 32 pixel silicon array detector. The filter was designed to be used in the output beam of a grating spectrometer to prevent the dispersal of higher diffracted orders onto an array detector. Areas of the filter that were spatially matched to the corresponding detector pixel column had measured peak transmittances of about 90 percent that were uniform to within +/- 1.5 percent along a given column. Transmittances for incident wavelengths shorter than the desired bandpass, corresponding to the order overlap region, were measured in the 0.003 range. Line spread function measurements made with the array detector indicated no significant beam spreading caused by inserting the filter into the beam.