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Miniaturized vacuum gauges (MVGs) for the measurement range 5.7times10−7 to 1.1times10−2 mbar were fabricated in a self-aligned approach using focused ion beam (FIB) nanoma-chining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force microscopy (AFM) tip, forming a coaxial embodiment. The special design enables us to vary the cathode-anode separation and the turn-on voltage changes accordingly. The experiments show that the MVGs operate at low bias potential and demonstrate very good I-P dependence over a wide pressure range.