1. Highly Sensitive Miniature All-Silica Fiber Tip Fabry–Perot Pressure Sensor
- Author
-
Xingwei Wang, Cong Du, Xu Guo, and Jingcheng Zhou
- Subjects
All-silica fiber ,Materials science ,Fabrication ,business.industry ,Polishing ,02 engineering and technology ,Pressure sensor ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,020210 optoelectronics & photonics ,Etching (microfabrication) ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,Sensitivity (control systems) ,Fiber ,Electrical and Electronic Engineering ,business ,Fabry–Pérot interferometer - Abstract
This letter presents the design, fabrication, and testing of a diaphragm-based, all-silica fiber tip pressure sensor. A piece of 1.2- $\mu \text{m}$ -thick silica diaphragm was thermally bonded to the end face of an etched fiber with an outer diameter (OD) of 125 $\mu \text{m}$ to form a Fabry–Perot (FP) interferometer. The diameter of the etched FP cavity is $105~\mu \text{m}$ , enabling the sensing area to be large, and thus, a static pressure sensitivity of 12.4 nm/kPa (85.3 nm/psi) is accomplished without the need for any post polishing or etching. The sensor also shows a low-temperature cross sensitivity during tests, owing to its all-silica structure. It is suitable for extensive production, and it has a great potential to work in applications, where miniature size and high sensitivity are essential such as medical applications.
- Published
- 2019