J. M. De Teresa, Adrian Bachtold, S. Tepsic, S. Sangiao, A. Tavernarakis, Gernot Gruber, Pierre Verlot, Alexandros Stavrinadis, César Magén, C. Urgell, European Research Council, Generalitat de Catalunya, Ministerio de Economía y Competitividad (España), Agencia Estatal de Investigación (España), Ministerio de Ciencia, Innovación y Universidades (España), European Commission, Fundació Privada Cellex, Sangiao, S. [0000-0002-4123-487X], Teresa, José María de [0000-0001-9566-0738], Bachtold, A. [0000-0002-6145-2479], Sangiao, S., Teresa, José María de, and Bachtold, A.
We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods., This work is supported by the ERC advanced Grant 692876, ERC PoC Grant 862149, the Foundation Cellex, the CERCA Programme, AGAUR, Severo Ochoa (SEV-2015−0522), the Grants FIS2015-69831-P, RTI2018-097953-B-I00, MAT2017- 82970-C2-1-R, and MAT2017-82970-C2-2-R of MINECO, the Fondo Europeo de Desarrollo Regional (FEDER), and the project E13_17R from Aragon Regional Government (Construyendo Europa desde Aragon). P.V. acknowledges support from the ERC starting Grant 758794 “Q-ROOT”.