1. Fabrication of Microhotplates Based on Laser Micromachining of Zirconium Oxide
- Author
-
Andrey Sokolov, Alexey Vasiliev, Alexandr Lipilin, Konstantin Oblov, Sergey Soloviev, Nikolay Samotaev, and Anastasia Ivanova
- Subjects
Microelectromechanical systems ,Fabrication ,Materials science ,Bolometer ,Nanotechnology ,Physics and Astronomy(all) ,Laser ,law.invention ,laser ,MEMS ,law ,visual_art ,visual_art.visual_art_medium ,Zirconium oxide ,microhotplate ,Ceramic ,gas sensor ,Laser micromachining ,Yttria-stabilized zirconia - Abstract
We present a novel approach to the fabrication of MEMS devices, which can be used for gas sensors operating in harsh environment in wireless and autonomous information systems. MEMS platforms based on ZrO 2 /Y 2 O 3 (YSZ) are applied in these devices. The methods of ceramic MEMS devices fabrication with laser micromachining are considered. It is shown that the application of YSZ membranes permits a decrease in MEMS power consumption at 450 0 C down to ∼75 mW at continuous heating and down to ∼ 1 mW at pulse heating mode. The application of the platforms is not restricted by gas sensors: they can be used for fast thermometers, bolometric matrices, flowmeteres and other MEMS devices working under harsh environmental conditions.
- Published
- 2015
- Full Text
- View/download PDF