Search

Your search keyword '"Agemura, Toshihide"' showing total 26 results
Start Over Author "Agemura, Toshihide"
26 results on '"Agemura, Toshihide"'

5. Resolution improvement of low-voltage scanning electron microscope by bright and monochromatic electron gun using negative electron affinity photocathode.

Author

Morishita, Hideo, Ohshima, Takashi, Kuwahara, Makoto, Ose, Yoichi, and Agemura, Toshihide

Subjects
SCANNING electron microscopes, ELECTRON gun, ELECTRON affinity, ELECTRON sources, LOW voltage systems
Abstract

The scanning electron microscope (SEM) is a powerful tool for analyzing the surface of various specimens. SEM observation at low voltage, which is typically lower than the 1 kV range, is very effective for obtaining surface information of specimens. However, at the low voltage range, resolution is restricted by the brightness and energy spread of electron sources. Therefore, to improve the resolution, a bright and monochromatic electron source is indispensable. In this work, we focused on an electron gun with a negative electron affinity photocathode using p-type GaAs and Cs–O adsorbates. The resolution of a prototype SEM was improved by approximately 16% compared with a SEM using a conventional Schottky emission (SE)-type emitter at the acceleration voltage of 1 kV. In addition, results showed that the measured brightness was as high as an SE-type emitter (∼107 A/m2/sr/V) and the estimated energy spread was less than 0.2 eV, which was narrower than that of a cold field emission-type emitter. [ABSTRACT FROM AUTHOR]

Published
2020
Full Text
View/download PDF

21. Development of fountain detectors for spectroscopy of secondary electron in SEM.

Author

Agemura, Toshihide, Iwai, Hideo, and Sekiguchi, Takashi

Subjects
*SECONDARY electron emission, *DETECTORS, *SPECTRUM analysis, *SCANNING electron microscopy, *IMAGE processing
Abstract

To image the variation of surface potential in semiconductors, energy selective secondary electron detector, named fountain detector (FD), was developed. Two types of grids, planar and spherical, were designed and the superiority of latter was demonstrated. The p-n junction of 4H-SiC was observed using spherical FD and the image was much clear than that using conventional detector. [ABSTRACT FROM AUTHOR]

Published
2017
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results