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The flight of the Micro-X sounding rocket on July 22, 2018 marked the first operation of Transition-Edge Sensors and their SQUID readouts in space. The instrument combines the microcalorimeter array with an imaging mirror to take high-resolution spectra from extended X-ray sources. The first flight target was the Cassiopeia~A Supernova Remnant. While a rocket pointing malfunction led to no time on-target, data from the flight was used to evaluate the performance of the instrument and demonstrate the flight viability of the payload. The instrument successfully achieved a stable cryogenic environment, executed all flight operations, and observed X-rays from the on-board calibration source. The flight environment did not significantly affect the performance of the detectors compared to ground operation. The flight provided an invaluable test of the impact of external magnetic fields and the instrument configuration on detector performance. This flight provides a milestone in the flight readiness of these detector and readout technologies, both of which have been selected for future X-ray observatories.

The Line Emission Mapper (LEM) is an X-ray Probe for the 2030s that will answer the outstanding questions of the Universe's structure formation. It will also provide transformative new observing capabilities for every area of astrophysics, and to heliophysics and planetary physics as well. LEM's main goal is a comprehensive look at the physics of galaxy formation, including stellar and black-hole feedback and flows of baryonic matter into and out of galaxies. These processes are best studied in X-rays, and emission-line mapping is the pressing need in this area. LEM will use a large microcalorimeter array/IFU, covering a 30x30' field with 10" angular resolution, to map the soft X-ray line emission from objects that constitute galactic ecosystems. These include supernova remnants, star-forming regions, superbubbles, galactic outflows (such as the Fermi/eROSITA bubbles in the Milky Way and their analogs in other galaxies), the Circumgalactic Medium in the Milky Way and other galaxies, and the Intergalactic Medium at the outskirts and beyond the confines of galaxies and clusters. LEM's 1-2 eV spectral resolution in the 0.2-2 keV band will make it possible to disentangle the faintest emission lines in those objects from the bright Milky Way foreground, providing groundbreaking measurements of the physics of these plasmas, from temperatures, densities, chemical composition to gas dynamics. While LEM's main focus is on galaxy formation, it will provide transformative capability for all classes of astrophysical objects, from the Earth's magnetosphere, planets and comets to the interstellar medium and X-ray binaries in nearby galaxies, AGN, and cooling gas in galaxy clusters. In addition to pointed observations, LEM will perform a shallow all-sky survey that will dramatically expand the discovery space., Comment: 18 pages. White paper for a mission concept to be submitted for the 2023 NASA Astrophysics Probes opportunity. v2: All-sky survey figure expanded, references fixed. v3: Added energy resolution measurements for prototype detector array. v4: Author list and reference fixes

We are developing the frequency domain multiplexing (FDM) read-out of transition-edge sensor (TES) microcalorimeters for the X-ray Integral Field Unit (X-IFU) instrument on board of the future European X-Ray observatory Athena. The X-IFU instrument consists of an array of $\sim$3840 TESs with a high quantum efficiency ($>$90 \%) and spectral resolution $\Delta E$=2.5 eV $@$ 7 keV ($E/\Delta E\sim$2800). FDM is currently the baseline readout system for the X-IFU instrument. Using high quality factor LC filters and room temperature electronics developed at SRON and low-noise two stage SQUID amplifiers provided by VTT, we have recently demonstrated good performance with the FDM readout of Mo/Au TES calorimeters with Au/Bi absorbers. An integrated noise equivalent power resolution of about 2.0 eV at 1.7 MHz has been demonstrated with a pixel from a new TES array from NASA/Goddard (GSFC-A2). We have achieved X-ray energy resolutions $\sim$2.5 eV at AC bias frequency at 1.7 MHz in the single pixel read-out. We have also demonstrated for the first time an X-ray energy resolution around 3.0 eV in a 6 pixel FDM read-out with TES array (GSFC-A1). In this paper we report on the single pixel performance of these microcalorimeters under MHz AC bias, and further results of the performance of these pixels under FDM., Comment: 8 pages, 4 figures, Proceedings of the SPIE Astronomical Instrumentation "Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray"

We are studying the development of space-flight compatible room-temperature electronics for the Lynx x-ray microcalorimeter (LXM) of the Lynx mission. The baseline readout technique for the LXM is microwave SQUID multiplexing. The key modules at room temperature are the RF electronics module and the digital electronics and event processor (DEEP). The RF module functions as frequency converters and mainly consists of local oscillators and I/Q mixers. The DEEP performs demultiplexing and event processing, and mainly consists of field-programmable gate arrays, ADCs, and DACs. We designed the RF electronics and DEEP to be flight ready, and estimated the power, size, and mass of those modules. There are two boxes each for the RF electronics and DEEP for segmentation, and the sizes of the boxes are 13 in: × 13 in: × 9 in: for the RF electronics and 15.5 in: × 11.5 in: × 9.5 in: for the DEEP. The estimated masses are 25.1 kg∕box for the RF electronics box and 24.1 kg∕box for the DEEP box. The maximum operating power for the RF electronics is 141 W or 70.5 W∕box, and for the DEEP box is 615 W or 308 W∕box. The overall power for those modules is 756 W. We describe the detail of the designs as well as the approaches to the estimation of resources, sizes, masses, and powers.

We are developing arrays of position-sensitive microcalorimeters for future x-ray astronomy applications. These position-sensitive devices commonly referred to as hydras consist of multiple x-ray absorbers, each with a different thermal coupling to a single-transition-edge sensor microcalorimeter. Their development is motivated by a desire to achieve very large pixel arrays with some modest compromise in performance. We report on the design, optimization, and first results from devices with small pitch pixels (<75 μm) being developed for a high-angular and energy resolution imaging spectrometer for Lynx. The Lynx x-ray space telescope is a flagship mission concept under study for the National Academy of Science 2020 decadal survey. Broadband full-width-half-maximum (FWHM) resolution measurements on a 9-pixel hydra have demonstrated ΔE(FWHM) = 2.23 ± 0.14 eV at Al-Kα, ΔE(FWHM) = 2.44 ± 0.29 eV at Mn-Kα, and ΔE(FWHM) = 3.39 ± 0.23 eV at Cu-Kα. Position discrimination is demonstrated to energies below <1 keV and the device performance is well-described by a finite-element model. Results from a prototype 20-pixel hydra with absorbers on a 50-μm pitch have shown ΔE(FWHM) = 3.38 ± 0.20 eV at Cr-Kα1. We are now optimizing designs specifically for Lynx and extending the number of absorbers up to 25/hydra. Numerical simulation suggests optimized designs could achieve ∼3 eV while being compatible with the bandwidth requirements of the state-of-the art multiplexed readout schemes, thus making a 100,000 pixel microcalorimeter instrument a realistic goal.

Lynx is a proposed NASA X-Ray telescope flight mission aimed at achieving state-of-the-art angular and energy resolution with a 100 kilopixel array to probe the hot energetic young universe in unprecedented detail. To achieve these goals, our team plans on leveraging our current work in development of the focal plane for the Athena X-Ray Integral Field Unit (X-IFU) while advancing the state-of-the-art in transition edge sensor (TES) X-ray detector technology. The TES is an optimal technology for achieving both high energy and fine angular resolution at the same time because pixel features can be made extremely small and the absorber which dominates the heat capacity can be tuned to meet resolution requirements. Specifically, the proposed mission concept calls for a hybrid detector of three different arrays fabricated in the same planar process in one focal plane and optimized for different science goals. The main arrays consist of 5x5 hydras, 25 pixels of 4 micron thick Au absorbers each with a different thermal link to one common TES. The outer array has absorbers on a 50-micron pitch for most of the 5 arc-minute field-of-view, and the inner array has 25-micron absorbers for the central 1 arc-minute region. A high resolution array consisting of single pixel 1 micron thick Au absorbers on 50-micron pitch will lie off to the side. Reading out an array of this magnitude will likely require improvements in indium bump bonding to superconducting flexible wiring. Fabrication of absorbers of two different sizes requires electroplating through a photoresist mold by careful tuning of the current density to achieve uniform flat absorbers on a fine pitch scale, followed by ion milling to yield narrow streets separating the pixels while preserving high quantum efficiency. We report on progress made at fabricating the hybrid array with different absorber sizes and thicknesses. Further, we also report on ongoing work to adequately heat sink the pixels with backside wire bonding and copper coating. We also report on work to improve detector pixel yield and top side indium bump bonding to flexible wiring.

Lynx, one of the four mission concepts under consideration for the next Astrophysics DecadalReview, will include a microcalorimeter array consisting of more than 100,000 pixels in a compact arrangement with absorber pitch as small as 25 microns. In order to realize the desired array scale, fine-pitch multi-level superconducting wiring with high yield, compatible with rapid expansion of our hydra absorber designs, is essential. We have demonstrated a method of integrating transition edge sensor (TES) microcalorimeters with suitable multilevel buried wiring, fabricated at MIT Lincoln Laboratory using advanced tools dedicated to superconducting circuit fabrication. The TES Mo/Au bilayer is deposited on a high-quality oxide surface created by chemical-mechanical polishing, allowing tight specifications on the TES superconducting transition and link conductivity to be achieved even though the process order has been inverted. The TESs contact the top-level niobium wiring through vias etched through silicon dioxide down to the topmost wiring layer. The article discusses the overall fabrication process, as wellas the behavior of sensors with different via designs, proximity structures, and lateral sizes. An initial iteration of the integrated fabrication process indicates that microcalorimeters fabricated in this way should meet mission specifications using a Mo/Au bilayer with a reasonable critical temperature below 100 mK.

The calorimeter array of the JAXA Astro-H (renamed Hitomi) soft x-ray spectrometer (SXS) was designed to provide unprecedented spectral resolution of spatially extended cosmic x-ray sources and of all cosmic x-ray sources in the Fe-K band around 6 keV. The properties that made the SXS array a powerful x-ray spectrometer also made it sensitive to photons from the entire electromagnetic band as well as particles. If characterized as a bolometer, it would have had a noise equivalent power of <4 × 10(exp −18) W/((Hz)(exp 0.5)). Thus, it was imperative to shield the detector from thermal radiation from the instrument and optical and UV photons from the sky. In addition, it was necessary to shield the coldest stages of the instrument from the thermal radiation emanating from the warmer stages. These needs were addressed by a series of five thin-film radiation-blocking filters, anchored to the nested temperature stages, that blocked long-wavelength radiation while minimizing x-ray attenuation. The aperture assembly was a system of barriers, baffles, filter carriers, and filter mounts that supported the filters and inhibited their potential contamination. The three outer filters also had been equipped with thermometers and heaters for decontamination. We present the requirements, design, implementation, and performance of the SXS aperture assembly and blocking filters.

The calorimeter array of the JAXA Astro-H (renamed Hitomi) soft x-ray spectrometer (SXS) was designed to provide unprecedented spectral resolution of spatially extended cosmic x-ray sources and of all cosmic x-ray sources in the Fe-K band around 6 keV, enabling essential plasma diagnostics. The SXS had a square array of 36 x-ray calorimeters at the focal plane. These calorimeters consisted of ion-implanted silicon thermistors and HgTe thermalizing x-ray absorbers. These devices demonstrated a resolution of better than 4.5 eV at 6 keV when operated at a heat-sink temperature of 50 mK. We will discuss the basic physical parameters of this array, including the array layout, thermal conductance of the link to the heat sink, resistance function, absorber details, and means of attaching the absorber to the thermistor-bearing element. We will also present the thermal characterization of the whole array, including thermal conductance and crosstalk measurements and the results of pulsing the frame temperature via alpha particles, heat pulses, and the environmental background. A silicon ionization detector was located behind the calorimeter array and served to reject events due to cosmic rays. We will briefly describe this anticoincidence detector and its performance.

We have developed transition-edge sensor (TES) microcalorimeter arrays with high count-rate capability and high energy resolution to carry out x-ray imaging spectroscopy observations of various astronomical sources and the Sun. We have studied the dependence of the energy resolution and throughput (fraction of processed pulses) on the count rate for such microcalorimeters with two different transition temperatures T(sub c). Devices with both transition temperatures were fabricated within a single microcalorimeter array directly on top of a solid substrate where the thermal conductance of the microcalorimeter is dependent upon the thermal boundary resistance between the TES sensor and the dielectric substrate beneath. Because the thermal boundary resistance is highly temperature dependent, the two types of device with different T(sub c)(sup s) had very different thermal decay times, approximately one order of magnitude different. In our earlier report, we achieved energy resolutions of 1.6 and 2.eV at 6 keV from lower and higher T(sub c) devices, respectively, using a standard analysis method based on optimal filtering in the low flux limit. We have now measured the same devices at elevated x-ray fluxes ranging from 50 Hz to 1000 Hz per pixel. In the high flux limit, however, the standard optimal filtering scheme nearly breaks down because of x-ray pile-up. To achieve the highest possible energy resolution for a fixed throughput, we have developed an analysis scheme based on the socalled event grade method. Using the new analysis scheme, we achieved 5.0 eV FWHM with 96 Percent throughput for 6 keV x-rays of 1025 Hz per pixel with the higher T(sub c) (faster) device, and 5.8 eV FWHM with 97 Percent throughput with the lower T(sub c) (slower) device at 722 Hz.

Multi-pixel transition-edge sensors (TESs), commonly referred to as 'hydras', are a type of position sensitive micro-calorimeter that enables very large format arrays to be designed without commensurate increase in the number of readout channels and associated wiring. In the hydra design, a single TES is coupled to discrete absorbers via varied thermal links. The links act as low pass thermal filters that are tuned to give a different characteristic pulse shape for x-ray photons absorbed in each of the hydra sub pixels. In this contribution we report on the experimental results from hydras consisting of up to 20 pixels per TES. We discuss the design trade-offs between energy resolution, position discrimination and number of pixels and investigate future design optimizations specifically targeted at meeting the readout technology considered for Lynx.

The performance of Transition-Edge Sensors (TES) and their SQUID multiplexed read-outs are very sensitive to the ambient magnetic field from Earth and fluctuations that can arise due to fluctuating magnetic fields outside of the focal plane assembly from the Adiabatic Demagnetization Refrigerator (ADR).Thus, the experimental platform we are building to test the FPA of the X-ray Integral Field Unit (X-IFU) of the Athena mission needs to include a series of shields and a coil in order to meet the following requirement of magnetic field density and uniformity.

We performed a small-scale demonstration at GSFC of high-resolution x-ray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space based x-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 50 mK stage of our laboratory ADR. Using a ROACH2 FPGA at room temperature, we simultaneously read out 32 pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to RF SQUIDs. The resonators are spaced 6 MHz apart (at approx. 5.9 GHz) and have quality factors of approximately 15,000. Using flux-ramp modulation frequencies of 160 kHz we have achieved spectral resolutions of 3 eV FWHM on each pixel at 6 keV. We will present the measured system-level noise and maximum slew rates, and briefly describe the implications for future detector and readout design.

We have been developing superconducting transition-edge sensor (TES) microcalorimeters for a variety of potential astrophysics missions, including Athena. The X-ray Integral Field Unit (X-IFU) instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. The traditional approach within our group has been to use square TES bilayers on molybdenum and gold that are between 100 and 140 microns in size, deposited on silicon nitride membranes to provide a weak thermal conductance to a 50 mK heat bath temperature. It has been shown that normal metal stripes on top of the bilayer are needed to keep the unexplained noise at a level consistent with the expected based upon estimates for the non-equilibrium non-linear Johnson noise.In this work we describe a new approach in which we use a square TES bilayer that is 50 microns in size. While the weak link effect is much stronger in this size of TES, we have found that excellent spectral performance can be achieved without the need for any normal metal strips on top of the TES. A spectral performance of 1.58 eV at 6 KeV has been achieved, the best resolution seen in any of our devices with this pixel size. The absence of normal metal stripes has led to more uniform transition shapes, and more reliable excellent spectral performance. The smaller TES size has meant that that the thermal conductance to the heat bath, determined by the perimeter length of the TES and the membrane thickness, is lower than on previous devices, and thus has a lower count rate capability. This is an advantage for low count-rate applications where the slower speed enables easier multiplexing in the read-out, thus potential higher multiplexing factors. In order to recover the higher count rate capabilities, a potential path exits using thicker silicon nitride membranes to increase the thermal conductance to the heat bath.

We have developed large-format, close-packed X-ray microcalorimeter arrays fabricated on solid substrates, designed to achieve high energy resolution with count rates up to a few hundred counts per second per pixel for X-ray photon energies upto 8 keV. Our most recent arrays feature 31-micron absorbers on a 35-micron pitch, reducing the size of pixels by about a factor of two. This change will enable an instrument with significantly higher angular resolution. In order to wire out large format arrays with an increased density of smaller pixels, we have reduced the lateral size of both the microstrip wiring and the Mo/Au transition-edge sensors (TES). We report on the key physical properties of these small TESs and the fine Nb leads attached, including the critical currents and weak-link properties associated with the longitudinal proximity effect.

The X-ray integrated field unit (X-IFU) in European Space Agency's (ESA's) Athena mission will be the first high-resolution X-ray spectrometer in space using a large-format transition-edge sensor microcalorimeter array. Motivated by optimization of detector performance for X-IFU, we have conducted an extensive campaign of parametric characterization on transition-edge sensor (TES) detectors with nominal geometries and physical properties in order to establish sensitivity trends relative to magnetic field, dc bias on detectors, operating temperature, and to improve our understanding of detector behavior relative to its fundamental properties such as thermal conductivity, heat capacity, and transition temperature. These results were used for validation of a simple linear detector model in which a small perturbation can be introduced to one or multiple parameters to estimate the error budget for X-IFU. We will show here results of our parametric characterization of TES detectors and briefly discuss the comparison with the TES model.

We are exploring the properties of electron-beam evaporated molybdenum thin films on silicon nitride coated silicon wafers at substrate temperatures between room temperature and 650 C. The temperature dependence of film stress, transition temperature, and electrical properties are presented. X-ray diffraction measurements are performed to gain information on molybdenum crystallite size and growth. Results show the dominant influence of the crystallite size on the intrinsic properties of our films. Wafer-scale uniformity, wafer yield, and optimal thermal bias regime for TES fabrication are discussed.

We develop superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting the specifications of X-ray imaging spectrometers, including high count rate, high energy resolution, and large field of view. In particular, a focal plane composed of two subarrays: one of fine pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit Instrument on the European Space Agencys ATHENA mission. We have based the subarrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all-gold X-ray absorber on 50 and 75 micron pitch, where the Mo/Au TES sits atop a thick metal heatsinking layer, have shown high resolution and can accommodate high count rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au, and an added bismuth layer in a 250-sq micron absorber. To tune the parameters of each subarray requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single-ion milling step. We demonstrate methods for integrating the heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each subarray, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (T(sub c)) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these 'hybrid' arrays will be presented.

The calorimeter array of the JAXA Astro-H (renamed Hitomi) Soft X-ray Spectrometer (SXS) was designed to provide unprecedented spectral resolution of spatially extended cosmic x-ray sources and of all cosmic x-ray sources in the Fe-K band around 6 keV, enabling essential plasma diagnostics. The properties that make the SXS array a powerful x-ray spectrometer also make it sensitive to photons from the entire electromagnetic band, and particles as well. If characterized as a bolometer, it would have a noise equivalent power (NEP) of less than 4x10(exp -18) W/(Hz)0.5(exp 0.5). Thus it was imperative to shield the detector from thermal radiation from the instrument and optical and UV photons from the sky. Additionally, it was necessary to shield the coldest stages of the instrument from the thermal radiation emanating from the warmer stages. Both of these needs are addressed by a series of five thin-film radiation-blocking filters, anchored to the nested temperature stages, that block long-wavelength radiation while minimizing x-ray attenuation. The aperture assembly is a system of barriers, baffles, filter carriers, and filter mounts that supports the filters and inhibits their potential contamination. The three outer filters also have been equipped with thermometers and heaters for decontamination. We present the requirements, design, implementation, and performance of the SXS aperture assembly and blocking filters.

The calorimeter array of the JAXA Astro-H (renamed Hitomi) Soft X-ray Spectrometer (SXS) was designed to provide unprecedented spectral resolution of spatially extended cosmic x-ray sources and of all cosmic x-ray sources in the Fe-K band around 6 keV, enabling essential plasma diagnostics. The SXS has a square array of 36 microcalorimeters at the focal plane. These calorimeters consist of ion-implanted silicon thermistors and HgTe thermalizing x-ray absorbers. These devices have demonstrated a resolution of better than 4.5 eV at 6 keV when operated at a heat-sink temperature of 50 mK. We will discuss the basic physical parameters of this array, including the array layout, thermal conductance of the link to the heat sink, resistance function, absorber details, and means of attaching the absorber to the thermistor-bearing element. We will also present the thermal characterization of the whole array, including thermal conductance and crosstalk measurements and the results of pulsing the frame temperature via alpha particles, heat pulses, and the environmental background. A silicon ionization detector is located behind the calorimeter array and serves to reject events due to cosmic rays. We will briefly describe this anti-coincidence detector and its performance.

Four astrophysics missions are currently being studied by NASA as candidate large missions to be chosen inthe 2020 astrophysics decadal survey.1 One of these missions is the X-Ray Surveyor (XRS), and possibleconfigurations of this mission are currently under study by a science and technology definition team (STDT). Oneof the key instruments under study is an X-ray microcalorimeter, and the requirements for such an instrument arecurrently under discussion. In this paper we review some different detector options that exist for this instrument,and discuss what array formats might be possible. We have developed one design option that utilizes eithertransition-edge sensor (TES) or magnetically coupled calorimeters (MCC) in pixel array-sizes approaching 100kilo-pixels. To reduce the number of sensors read out to a plausible scale, we have assumed detector geometriesin which a thermal sensor such a TES or MCC can read out a sub-array of 20-25 individual 1 pixels. In thispaper we describe the development status of these detectors, and also discuss the different options that exist forreading out the very large number of pixels.

Requirements for focal planes for x-ray astrophysics vary widely depending on the needs of the science application such as photon count rate, energy band, resolving power, and angular resolution. Transition edge sensor x-ray calorimeters can encounter limitations when optimized for these specific applications. Balancing specifications leads to choices in, for example, pixel size, thermal sinking arrangement, and absorber thickness and material. For the broadest specifications, instruments can benefit from multiple pixel types in the same array or focal plane. Here we describe a variety of focal plane architectures that anticipate science requirements of x-ray instruments for heliophysics and astrophysics. We describe the fabrication procedures that enable each array and explore limitations for the specifications of such arrays, including arrays with multiple pixel types on the same array.

Here we present our latest results on a magnetically tuned transition-edge sensor (MTES).

Here we investigate the effects a non-uniform applied magnetic field has on superconducting transition-edge sensors (TESs) critical current. This has implications on TES optimization. It has been shown that TESs resistive transition can be altered by magnetic fields. We have observed critical current rectification effects and explained these effects in terms of a magnetic self-field arising from asymmetric current injection into the sensor. Our TES physical model shows that this magnetic self-field can result in significantly degraded or improved TES performance. In order for this magnetically tuned TES strategy to reach its full potential we are investigating the effect a non-uniform applied magnetic field has on the critical current.