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Control of the microwave signal generated by spin-transfer torque oscillators (STOs) is crucial for their applications in spin wave generation and neuromorphic computing. This study investigates injection locking of a DC-driven vortex STO using surface acoustic waves (SAWs) to enhance the STO's signal and allow for its synchronization with external inputs. We employ a simplified model based on Thiele's formalism and highlight the role of vortex deformations in achieving injection locking. Micromagnetic simulations are conducted to validate our theoretical predictions, revealing how the locking bandwidth depends on SAW amplitude, as well as on the amplitude and direction of an applied external field. Our findings are pivotal for advancing experimental research and developing efficient low-power synchronization methods for large-scale STO networks. [ABSTRACT FROM AUTHOR]

As elastography, an emerging medical imaging strategy, advances, surface acoustic waves have been utilized to examine superficial tissues quantitatively. So far, most studies are experimental, and a numerical method is needed to cost-effectively investigate surface acoustic wave generation and propagation for technical development and optimization purposes. This study aims to develop a reliable numerical method for simulating impulse-induced surface acoustic waves using the k-wave simulation toolbox. According to the physical process of surface acoustic wave based elastography, the proposed simulation method consists of two stages: compressional wave simulation and elastic wave simulation, which aim to generate acoustic radiation force impulse and elastic waves, respectively. The technical procedures were demonstrated by a wave simulation on a water–tissue model. Meanwhile, three acoustic radiation force modeling methods were adopted. The compressional wave simulation showed that the three force modeling methods could produce similar force distribution in space but largely different amplitudes. The elastic wave simulation confirmed the feasibility of numerically generating surface acoustic waves. The reliability of the simulated waves was verified by a quantitative comparison between the numerically acquired sound speeds and their theoretical expectations and by a qualitative comparison between the numerically generated waves and the experimental observations under similar conditions. In summary, this study confirms k-wave as an effective numerical method for simulating surface acoustic waves for elastography purposes. This study provides an immediate simulation platform for investigating Scholte waves, the surface acoustic wave at a liquid–solid interface, and also, a potential numerical framework to investigate other surface acoustic waves. [ABSTRACT FROM AUTHOR]

In this study, we report giant nonreciprocal transmission of shear-horizontal surface acoustic waves (SH-SAWs) in a ferromagnetic bilayer structure with negative–positive magnetostriction configuration. Although the directions of magnetization in the neighboring layers are parallel, SH-SAWs can excite optical-mode spin waves (SWs) via magnetoelastic coupling at relatively low frequencies, which is much stronger than acoustic-mode SWs at high frequencies. The measured magnitude nonreciprocity or isolation of SH-SAWs exceeds 40 dB (or 80 dB/mm) at 2.333 GHz. In addition, maximum nonreciprocal phase accumulation reaches 188° (376°/mm). Our theoretical model and calculations provide an insight into the observed phenomena and demonstrate a pathway for further improving nonreciprocal acoustic devices toward highly compact microwave isolators and circulators. [ABSTRACT FROM AUTHOR]

Surface acoustic wave (SAW) resonators are essential components of mobile communication technology. Advanced performance SAW resonators are needed to support beyond fifth-generation mobile communication technology, which aims to achieve unprecedentedly high data rates and low latency using wide frequency bands in the RF spectrum. This study theoretically investigates the propagation characteristics of a non-leaky Rayleigh-type SAW (RSAW) propagating in a c-axis-tilted ScAlN film/3C-SiC substrate structure. By appropriately selecting the c-axis tilt angle and the film thickness of the ScAlN film, a high electromechanical coupling coefficient (K2) value was obtained in the second-mode RSAW (Sezawa wave). The maximum K2 value for the Sezawa wave was 8.03%, with a phase velocity of 7456 m/s and a power flow angle of 0° under the structural conditions where the K2 value was maximized. These properties offer significant advantages for achieving wide frequency bands, high operating frequencies, and ease of design for SAW resonators. The structural conditions under which good propagation characteristics were obtained in the Sezawa waves were found to coincide with the conditions that maximize the electromechanical coupling coefficient of the quasi-longitudinal wave in the ScAlN film, and a significant increase in the shear vertical component of Sezawa wave particle displacement was observed. Additionally, ScAlN films with a 40% Sc concentration can be fabricated using sputtering and molecular beam epitaxy. Recent advancements have reported the production of high-quality 3C-SiC wafers and large 3C-SiC film/silicon wafers. Therefore, the c-axis-tilted ScAlN film/3C-SiC substrate structure shows great potential as a candidate for next-generation SAW resonators. [ABSTRACT FROM AUTHOR]

Bulk acoustic wave (BAW) filters have been proven to be of high demand in today's low power RF front-ends for mobile communication devices. Within the launch of 5G applications worldwide, especially in the region of new radio (nr-1) up to 6 GHz, defined frequency bands require filters of wide bandwidths, while simultaneously featuring steep edges and high out-of-band rejection. Due to the coexistence with 4G LTE (long term evolution) wireless standards as well as advanced data transfer concepts such as carrier aggregation, the increasing complexity of antenna systems forces the implementation of highly selective acoustic filters. In contrast to the widely used surface acoustic wave (SAW) technology, BAW filters appear with superior performance for frequencies above 1 GHz. This work describes the fabrication of a BAW-solidly mounted resonator (BAW-SMR) with a tailored material system of a-SiOCN:H as a low impedance (low-Z) material integrated within its acoustic Bragg mirror. A direct comparison to the widely used low-Z material of SiO2 with an acoustic impedance of around 13 MRayl is demonstrated by two equal resonator stacks by replacing only the uppermost low-Z thin film of the acoustic reflector. A single-mask design was chosen with platinum as a bottom electrode to ensure the most equal growth conditions for the piezoelectric aluminum nitride (AlN) layers on both reflectors' surfaces featuring either the tailored a-SiOCN:H or standard SiO2. The a-SiOCN:H thin films were deposited by plasma-enhanced chemical vapor deposition and the according acoustic impedance was priorly depicted to 7.1 MRayl, which could be exploited to achieve an increase in the effective coupling coefficient beyond 7% as well as a resonator bandwidth of more than 60 MHz. [ABSTRACT FROM AUTHOR]

Three third-order dielectric constants, 8 electrostrictive constants, 13 third-order piezoelectric constants, and 14 third-order elastic constants for lithium tantalate (LiTaO3) single crystals, which are mainly used in surface acoustic wave (SAW) devices, were determined as part of basic research to realize SAW devices with a low degree of nonlinearity. The third-order dielectric constants were determined by measuring the change in capacitance along selected directions when an alternating electric field was applied to the crystal. The electrostrictive constants were determined by measuring the change in capacitance when static stress was applied. Some of the piezoelectric constants were determined directly from the change in sound velocity due to the application of an alternating electric field, whereas others were obtained from the measured dielectric constants, electrostrictive constants, and the change in sound velocity due to an alternating electric field. In addition, the elastic constants (compliance) were determined using the three aforementioned determined nonlinear constants and the measured small-amplitude ultrasonic velocity change as a function of applied static stress. The measurements performed in the present study are more advanced than those reported for LiNbO3 single crystals in 1987 due to the adoption of the d-form nonlinear piezoelectric equation (instead of the e-form) and a higher degree of precision using dynamic measurement methods. The use of the d-form of the nonlinear piezoelectric equation allows many nonlinear constants to be determined independently from other nonlinear constants, eliminating measurement errors associated with these other constants. The d-form nonlinear constants obtained in the present study were converted to e-form constants to make them applicable to the analysis of nonlinear phenomena in piezoelectric devices. [ABSTRACT FROM AUTHOR]

Multi-principal component transition metal (TM) diborides represent a class of high-entropy ceramics (HECs) that have received considerable interest in recent years owing to their promising properties for extreme environment applications that include thermal/ environmental barriers, hypersonic vehicles, turbine engines, and next-generation nuclear reactors. While the addition of chemical disorder through the random distribution of TM elements on the cation sublattice has offered opportunities to tailor elastic stiffness and hardness, the effects of irradiation-induced structural damage on the physical properties of these complex materials have remained largely unexplored. To this end, changes in the hardness and elastic moduli of a high-entropy TM diboride (Hf0.2Nb0.2Ta0.2Ti0.2Zr0.2)B2 and three of its quaternary subsets following irradiation with 10 MeV gold (Au) ions to fluences of up to 6 × 1015 Au cm−2 are investigated at the micrometer and sub-micrometer length-scales via the dispersion of laser-generated surface acoustic waves (SAW) and nanoindentation, respectively. The nanoindentation measurements show that the TM diborides exhibit an initial increase in hardness following irradiation with energetic Au ions, with a subsequent decrease in hardness following further irradiation. One quaternary composition, (Hf1/3Ta1/3Ti1/3)B2, exhibits a notable exception to the trend and continues to exhibit an increase in hardness with ion irradiation fluence. Although differences in the absolute values of the effective elastic moduli obtained from the measured SAW dispersion and nanoindentation are observed (and attributed to microstructural variations at the measurement length-scale), both techniques yield similar trends in the form of an initial reduction and subsequent saturation in the elastic modulus with increasing ion irradiation fluence. The quaternary TM diboride (Hf1/3Ta1/3Ti1/3)B2 again exhibits a departure from this trend. The high-entropy TM diboride (Hf0.2Nb0.2Ta0.2Ti0.2Zr0.2)B2 exhibits the greatest recovery in hardness and modulus when irradiated to high ion fluences following initial changes at low fluence, indicating superior resistance to radiation-induced damage over its quaternary counterparts. Opportunities for designing HECs with superior hardness and modulus for enhanced radiation resistance (compared to their single constituent counterparts) by tailoring chemical disorder and bond character in the lattice are discussed. [ABSTRACT FROM AUTHOR]

Surface acoustic waves (SAWs) on piezoelectric insulators can generate dynamic periodic potentials inside one-dimensional and two-dimensional materials. These periodic potentials have been utilized or proposed for various applications, including acoustoelectric charge pumping. In this study, we investigate acoustoelectric charge pumping in graphene with very low electrostatic disorder. By employing a graphite top gate on boron-nitride-encapsulated graphene, we adjust the graphene carrier concentration over a broad range, enabling us to examine the acoustoelectric signal in both mixed-carrier and single-carrier regimes. We discuss the benefits of h-BN-encapsulated graphene for charge pumping applications and introduce a model that describes the acoustoelectric signal across all carrier concentrations, including at the charge neutrality point. This quantitative model will support future SAW-enabled explorations of phenomena in low-dimensional materials and guide the design of novel SAW sensors. [ABSTRACT FROM AUTHOR]

The 5th generation (5G) wireless telecommunication standards with newly defined frequency bands up to 6 GHz are currently established around the world. While outperforming surface acoustic wave (SAW) filters above 1 GHz, bulk acoustic wave (BAW) resonators in multiplexers for radio-frequency front-end (RFFE) modules continuously face higher performance requirements. In contrast to free-standing bulk acoustic resonators (FBARs), solidly mounted resonator (SMR) technology uses an acoustic Bragg mirror, which has already been successfully applied for several GHz applications. In this work, we investigate the potential of amorphous hydrogenated silicon-oxycarbonitride (a-SiOCN:H) thin films synthesized with low-temperature plasma-enhanced chemical vapor deposition (PECVD) as a low acoustic impedance (low-Z) material. Compared to the state-of-the-art where in Bragg mirrors up to now SiO2 is used as standard, the acoustic impedance ratio against the high-Z material tungsten (W) is enhanced for a better device performance. To limit the expected increase in viscous loss when the acoustic impedance is reduced, to a minimum, predominantly the mass density was reduced while keeping the mechanical elasticity high. By doing so, acoustic impedance values as low as 7.1 MRayl were achieved, thereby increasing the impedance ratio of high-Z to low-Z materials from 8:1 up to 14:1. [ABSTRACT FROM AUTHOR]

Acoustic droplet ejection (ADE) has been proven to move liquids in droplet form from a container to mid-air. However, the droplet sizes produced using the traditional ADE setups are proportional to their heights if the physical framework is unchanged. This limitation obstructs further employment of ADE technology since having the exact sizes of droplets at a specific location or different sizes at different locations is required for many applications. To overcome this limitation and enable more possible applications of ADE, this study proposed an innovative ADE configuration that could manipulate the size and height of the ADE droplets with only electrical signals. To achieve this, a low-voltage driving period and a pinhole structure were added to create a water mound before ejection. First, simulations were conducted to validate the proposed method and find the parameters of the novel ADE setup. After that, a driving circuit featuring a high-voltage pulser and a field-programmable gate array was built. However, a 3D spherical resin model was printed to focus the acoustic wave on the water surface, and a cover with a pinhole was added to create water mound. To observe the behavior of the droplets, a recording system and detection algorithm were developed to capture and identify the dimension/height of the droplets, respectively. Finally, the proposed ADE configuration successfully manipulated the droplet size at the same ejecting height under three driving voltages (65, 70, and 75 V) and pinhole diameters (3.7, 4, and 4.4 mm). [ABSTRACT FROM AUTHOR]

We report an experimental study of surface acoustic wave (SAW) localization and propagation in random metasurfaces composed of Al scatters using pump–probe spectroscopy. Thanks to this technique, wideband high frequency acoustic modes are generated, and their dynamical propagation directly from inside of the media with a high (micrometric) spatial resolution is enabled. During SAW propagation, part of the acoustic wavefront energy is trapped within free areas between the scatterers, acting as cavities. The spectral content of the localized modes of a few GHz is found to depend on the shape and size of the cavities but also on the landscape seen by the wave during its propagation before arriving inside them. The experimental results are supported by numerical simulations using the finite element method. This study is the phononic part of a more global research on the co-localization of elastic and optical waves on random metasurfaces, with the main objective of enhancing the photon–phonon interaction. Applications could range from the design of acousto-optic modulators to ultrasensitive sensors. [ABSTRACT FROM AUTHOR]

Owing to magnetoelastic coupling, surface acoustic waves (SAWs) may be scattered resonantly by magnetic elements, such as nickel stripes. The scattering may be further enhanced via the Borrmann effect when the elements are organized into an array that matches the acoustic wavelength. We use finite-element modeling to consider single- and double-layer stripes patterned on top of a lithium niobate surface that carries Love surface waves. We do observe enhancement in the coupling for single-layer stripes, but only for Gilbert damping below its realistic value. For double-layered stripes, a weak yet clear and distinct signature of Bragg reflection is identified far away from the acoustic band edge, even for a realistic damping value. Double-layered stripes also offer better magnetic tunability when their magnetic period is different from the periodicity of elastic properties of the structure because of staggered magnetization patterns. The results pave the way for the design of magnetoacoustic metamaterials with an enhanced coupling between propagating SAWs and local magnetic resonances and for the development of reconfigurable SAW-based circuitry. [ABSTRACT FROM AUTHOR]

Phonons confined in mechanical resonators can be coupled to a variety of quantum systems and are expected to be applied to hybrid quantum systems. Diamond surface acoustic wave (SAW) devices are capable of high efficiency in phonon interaction with color centers in diamond. The temperature dependence of the quality factor is crucial for inferring the governing mechanism of coupling efficiency between phonons and color centers in diamond. In this paper, we report on the temperature dependence of the quality factor of an AlN/diamond SAW device from room temperature to 5 K. The temperature dependence of the quality factor and resonant frequency suggests that the mechanism of SAW dissipation in the AlN/diamond SAW resonator at 5 GHz is the phonon–phonon scattering in the Akheiser regime and that further cooling can be expected to improve the quality factor. This result provides a crucial guideline for the future design of AlN/diamond SAW devices. [ABSTRACT FROM AUTHOR]

High quality, uni-polar, epitaxial AlN with minimum oxygen content promises excellent surface acoustic wave and bulk acoustic wave resonator characteristics such as high electromechanical coupling coefficient and power handling capabilities, which is particularly useful for RF filter applications. By systematically varying the growth temperature, the study investigates its impact on the oxygen levels, defect states, and crystallographic texture of the AlN thin films using a combination of atomic force microscopy, X-ray diffraction, time-of-flight secondary ion mass spectrometry, spectroscopic ellipsometry, scanning transmission electron microscopy, as well as room temperature and temperature dependent I–V measurements. The research demonstrates that the films grown at a temperature of 700 ° C exhibit the most favorable results. These films exhibit the lowest oxygen levels, possess epitaxial growth, and display the highest crystalline quality (XRD AlN 0002 ω − FWHM = 1.3 °). Additionally, these films demonstrate a significant reduction in sub-bandgap absorption. By comparing the cathode current measured during deposition, we suggest that the presence of an impurity layer formed during idle time between depositions as a possible source of oxygen in the sputter chamber. In addition, the study presents a possible model to explain the mixed polarity observed in AlN and proposes various ways to achieve uni-polar AlN on silicon substrates. [ABSTRACT FROM AUTHOR]

Surface acoustic wave (SAW) and bulk acoustic wave (BAW) based radio-frequency (RF) filters dominate in handsets markets mainly because they have miniature size so multiple filters can be used but take up very small board area. Besides, due to their inherent advantages, such as low insertion loss, relatively high resonant frequency, and miniature size, their application in the physical and biochemical sensing fields has also gradually expanded. The successful implementation requires specific knowledge of acoustic wave properties, the working mechanisms, material properties, and device design. So, in this review, we survey the SAW and BAW filter technology by discussing the working principles and the comparison between the operation frequency band allocations. In addition, the approaches to enhance the performance including the selection of single crystal/ferroelectric materials for BAW and the structure design optimization for SAW are introduced with discussions for further improvement. Then, flexible SAW and BAW devices are also presented and their new application opportunities in the fields of skin-like electronics and wearable health monitoring devices can be foreseen. Finally, the potential challenges of high frequency, wide bandwidth, miniaturization, and compatibility with the integrated circuits (IC) manufacturing process are overviewed as well. [ABSTRACT FROM AUTHOR]

Telecommunication of the next generation demands filters that can operate in the 10 GHz range with sufficient bandwidths. For surface-acoustic-wave (SAW) devices this prerequisite translates into high sound velocities and high piezoelectric couplings. Wurtzite AlN on diamond, which exploits the strong piezoelectricity of AlN with the very high SAW velocity of diamond, has been considered a promising platform. A significant boost (up to a factor of 4) of the piezoelectric response can be obtained by alloying AlN with Sc. Here, the main challenge lies in the synthesis of highly-oriented thin (Sc,Al)N films on diamond. In this work, we aim at establishing a platform for SAW devices using plasma-assisted molecular beam epitaxy for the deposition of Sc0.2Al0.8N on diamond. We investigate the structural properties related to SAW generation gearing towards applications at high frequencies. To this end, we prepare (Sc,Al)N thin films on polished polycrystalline diamond wafers and demonstrate the efficient generation of SAW modes with frequencies up to 8 GHz. Systematic studies of the dependence of the SAW velocity and electromechanical coupling coefficient on the Sc0.2Al0.8N film thickness is presented for various SAW modes. Our result demonstrates the potential of this material combination for future application that requires large bandwidth in the ultra-high frequency range. [ABSTRACT FROM AUTHOR]

As a pivotal elastic property, elastic modulus plays a crucial role in characterising the mechanical performance of materials. To achieve the convenient and remote measurement of the elastic modulus of materials at elevated temperatures, a method based on diffracted grating laser-induced narrowband surface acoustic waves (SAW) is proposed. The design scheme of the diffraction grating is disclosed, and a CCD camera is deployed to confirm the generated grating pattern and determine the actual grating period. Delving into the viability of an effortless and reliable procedure for calculating elastic modulus is discussed. The elastic modulus determined by the SAW does not depend on the exact Poisson's ratio, which can be calculated from the SAW velocity with a given, less precise value for Poisson's ratio. Experimental results of the three metals are in line with the reference values, and the elastic modulus at elevated temperature is successfully measured remotely, thereby verifying the feasibility of the proposed method. [ABSTRACT FROM AUTHOR]

The Airy phase is the frequency at which group velocity of a surface acoustic wave (SAW) attains a stationary value. In turn, a stationary value of the group velocity causes SAW to propagate with a lesser attenuation than at other frequencies. At present, no conditions for the appearance of stationary values of the group velocity are known for dispersive modes of Lamb waves propagating in stratified plates. Herein, the closed form solutions are derived for double zero group velocity (ZGV) belonging to the same Lamb mode. It is also found that the double ZGV leads to the appearance of the Airy phase located between the twofold ZGV. The analysis relies on the Cauchy formalism and the exponent fundamental matrix method. [ABSTRACT FROM AUTHOR]

A new class of elastic materials with orthorhombic symmetry is introduced. For such materials, group velocity surfaces of quasi-longitudinal waves have ellipsoidal shapes. Relations between elastic constants that guaranty ellipsoidal shapes of the group velocity surfaces are indicated. The model materials are used for approximate determination of effective elastic constants of heterogeneous materials by acoustical methods. Examples of reconstruction of elastic constants from acoustical data are presented, and possible errors of the reconstructions are discussed. [ABSTRACT FROM AUTHOR]

AbstractThis paper proposes a groundbreaking surface wave metamaterial, which leverages common materials such as concrete and soil and operates on the principles of local resonance. The topological phase transition is controlled with the geometry of the resonant element, which is verified through the theoretical Valley Chern number. Moreover, a functionally graded elastic metamaterial is devised to achieve the topological rainbow effect of the low-frequency surface waves. The utilization of piezoelectric sheets validates energy harvesting with broadband low frequency for graded topological metamaterial. This study offers an innovative method for controlling surface elastic waves, paving the way for new avenues in energy harvesting, vibration mitigation, and noise reduction. [ABSTRACT FROM AUTHOR]

Magnetoelectric (ME) antennas hold the potential for significantly advancing miniaturization in radio frequency devices due to their compact size. However, critical hurdles still remain in ME antennas including low radiation efficiency and narrow bandwidth, which prevent them from seeing widespread use. Here, by sweeping the magnetic field to reach a resonant coupling, a significant enhancement in radiation efficiency by 70.95 ± 6.4% in a broad bandwidth ME antenna with 80 MHz is achieved as well as the far‐field radiation patterns are changed compared with that via non‐resonant coupling. The enhancement depends on the relative orientation between the magnetization and surface acoustic wave propagation direction which is dominated by the symmetry of the driving field induced by shear strain. A larger enhancement occurs when the magnetic field along hard axis of Ni due to the matching helicity and larger strain compared with easy axis scenario. This work demonstrates an innovative methodology that significantly enhances the radiation and reception efficiency in ME antennas, which may provide ideas for subsequent applications in communication antennas and magnetic sensors. [ABSTRACT FROM AUTHOR]

Laser ultrasonic testing is an advanced non-destructive testing with high frequency and fast detection speed. However, most laser ultrasonic testing characterises defects by manually extracting the features of signals. To address this, deep learning is introduced to identify defects intelligently. Firstly, theoretical models based on finite elements are built to study the the surface and subsurface defects’ effects on surface acoustic wave (SAW) propagation. Experimental studies are also conducted on 5 samples with surface defects and 15 with subsurface defects. Then, Gaussian white noise is added to both simulation and experimental signals to expand the data set and imitate the complex conditions. The wavelet transform images of the reflected and transmitted signal are combined into a data set for training the convolutional neural network (CNN). The subsurface defects’ data set is similarly augmented. Finally, a total of 40,000 surface defect and 21,000 subsurface defect data are collected and split into training, test, and validation sets (6:2:2 ratio). The CNN accurately classifies surface defect penetration depth (minimum error 5.87%), while subsurface defect widths are determined with transfer learning (minimum error 5.6%). It proves that it is feasible to classify and identify defects by combining the laser ultrasonic method with deep learning. [ABSTRACT FROM AUTHOR]

Limited to the direct modulation on the surface acoustic wave (SAW) by the rotation, the conventional SAW gyroscopes incur weak Coriolis effects and gyroscopic effects. In this paper, we innovatively utilize a phononic metamaterial (PM) operated at whispering-gallery modes (WGMs) as the vehicle for the Coriolis effect rather than SAW itself. The gyroscopic effects of this PM are investigated, and a new SAW gyroscope is subsequently proposed based on the slow SAW in PM. We show, combining theoretical modeling and finite element method simulation, that the rate of rotation can linearly induce the splitting of WGMs and modulate the phase velocity of SAW down to 4600 m/s (initial phase velocity of 5355 m/s); the direction of rotation results in the chiral symmetry of the PM vibration and the asymmetric distribution of the transmissive SAW. Besides, the proposed SAW gyroscope measures the angular velocity by detecting the phase shift resulting from rotation-dependent slow SAW in PM, obtaining a sensitivity of 0.016 deg/Hz when 50-cell PM. Compared with the existing SAW gyroscopes based on phase velocity modulation, the gyroscopic gain factor in this paper is enhanced by 430–1600 times. This work jumps out of the framework of directly modulating SAW in gyroscopes and provides an innovative scheme of the indirect modulations from the rotation-dependent PM on SAW, showing excellent performance and potential for angular velocity measurement in extreme environments. [ABSTRACT FROM AUTHOR]

The non-destructive testing for subsurface damage of processed silicon nitride ceramics is significant to the improvement of processing technology and evaluation of product performance. A novel method for the measurement of subsurface damage based on dispersion of laser-excited surface acoustics wave is proposed in this paper. The subsurface damage distribution is quantified as the damage density and depth of the damage layer. The forward model of surface acoustics wave propagation in damage layer is derived by the stiffness matrix method. Bayesian inversion is applied to estimate model parameters and uncertainties of subsurface damage from the experimental dispersion data. Laser ultrasonic experiments are carried out on four samples with different substrate material parameters and surface qualities to demonstrate the feasibility of the method for detecting varying degrees of subsurface damage. The results prove that with reasonable use of prior information about damage depth predicted by surface roughness, subsurface damage with a depth ∼10 times smaller than the minimum wavelength of surface acoustics wave is accurately characterized. The reliability of the results is further verified by Vickers microhardness tester. [ABSTRACT FROM AUTHOR]

Achieving precise construction of ferroelectric domain structure in lithium niobate (LN) crystals holds significance for expanding the applications of periodically poled lithium niobate (PPLN), especially in nonlinear frequency conversion. However, challenges exist during the application of electric field for poling, especially for small‐period PPLN crystals, where ferroelectric domains in LN crystals tend to unevenly expand laterally, making it hard to precisely control the domain structures. LN, as a piezoelectric crystal, has the capability to generate energy‐carrying surface acoustic waves (SAW). Herein, an method is presented to optimize the periodic poling process by integrating SAW and poling on a LN chip, which remarkably reduces the poling electric field by 10%, attributed to the enhanced local lattice vibrations during SAW propagation. The integrated SAW and poling chip achieves a 9 µm‐period PPLN crystal. Through second harmonic generation, a nonlinear light conversion from 1158 to 579 nm is realized, exhibiting a nonlinear optical efficiency up to 17.4%. This efficiency aligns with the theoretical prediction, validating the high‐quality domain structure. This integrated chip provides a unique opportunity for manipulating ferroelectric domain with high‐precision, benefiting a wide range of applications in nonlinear‐optics, ferroelectrics, and integrated optics. [ABSTRACT FROM AUTHOR]

This paper proposes a novel System-in-Package (SiP) integrated architecture that incorporates Silicon-On-Insulator (SOI) switches and Surface Acoustic Wave (SAW) filters within the chip, aiming to fulfill the demands for miniaturization and multi-functionality for application in emerging wireless technologies. The proposed architecture not only reduces the integration complexity but also considers the architectural design of the integrated module, impedance matching techniques, and signal integrity for carrier aggregation (CA) technology realization. The feasibility of employing SOI switches and SAW filters based on SiP design has been validated through the trial production of a Sub-3GHz radio frequency (RF) front-end diversity receiver module. The resulting RF front-end module demonstrates exceptionally high packaging density and enhanced communication reliability, rendering it suitable for diverse applications in miniaturized RF systems. [ABSTRACT FROM AUTHOR]

An interdigital transducer structure was fabricated from multilayer graphene on the surface of the Y Z -cut of a LiNbO3 ferroelectric crystal. The multilayer graphene was prepared by CVD method and transferred onto the surface of the LiNbO3 substrate. The properties of the multilayer graphene film were studied by Raman spectroscopy. A multilayer graphene (MLG) interdigital transducer (IDT) structure for surface acoustic wave (SAW) excitation with a wavelength of Λ = 60 μm was fabricated on the surface of the LiNbO3 crystal using electron beam lithography (EBL) and plasma chemical etching. The amplitude–frequency response of the SAW delay time line was measured. The process of SAW excitation by graphene IDT was visualized by scanning electron microscopy. It was demonstrated that the increase in the SAW velocity using graphene was related to the minimization of the IDT mass. [ABSTRACT FROM AUTHOR]

Metamaterials enable the modulation of elastic waves or acoustic waves in unprecedented ways and have a wide range of potential applications. This paper achieves the simultaneous manipulation of surface elastic waves (SEWs) and surface acoustic waves (SAWs) using two-dimensional acousto-elastic metamaterials (AEMMs). The proposed AEMMs are composed of periodic hollow cylinders on the surface of a semi-infinite substrate. The band diagrams and the frequency responses of the AEMMs are numerically calculated through the finite element approach. The band diagrams exhibit simultaneous bandgaps for the SEWs and SAWs, which can also be effectively tuned by the modification of AEMM geometry. Furthermore, we construct the AEMM waveguide by the introduction of a line defect and hence demonstrate its ability to guide the SEWs and SAWs simultaneously. We expect that the proposed AEMMs will contribute to the development of multi-functional wave devices, such as filters for dual waves in microelectronics or liquid sensors that detect more than one physical property. [ABSTRACT FROM AUTHOR]

To realize highly sensitive SAW devices, novel Al–Cu thin films were developed using a combinatorial sputtering system. The Al–Cu sample library exhibited a wide range of chemical compositions and electrical resistivities, providing valuable insights for selecting optimal materials for SAW devices. Considering the significant influence of electrode resistivity and density on acoustic wave propagation, an Al–Cu film with 65 at% Al was selected as the IDT electrode material. The selected Al–Cu film demonstrated a resistivity of 6.0 × 10−5 Ω-cm and a density of 4.4 g/cm3, making it suitable for SAW-based microfluidic actuator applications. XRD analysis revealed that the Al–Cu film consisted of a physical mixture of Al and Cu without the formation of Al–Cu alloy phases. The film exhibited a fine-grained microstructure with an average crystallite size of 7.5 nm and surface roughness of approximately 6 nm. The SAW device fabricated with Al–Cu IDT electrodes exhibited excellent acoustic performance, resonating at 143 MHz without frequency shift and achieving an insertion loss of −13.68 dB and a FWHM of 0.41 dB. In contrast, the Au electrode-based SAW device showed significantly degraded acoustic characteristics. Moreover, the SAW-based microfluidic module equipped with optimized Al–Cu IDT electrodes successfully separated 5 μm polystyrene (PS) particles even at high flow rates, outperforming devices with Au IDT electrodes. This enhanced performance can be attributed to the improved resonance characteristics of the SAW device, which resulted in a stronger acoustic radiation force exerted on the PS particles. [ABSTRACT FROM AUTHOR]

Technologies based on digital microfluidics (DMF) have made significant advancements in the automated manipulation of microscale liquids and complex multistep processes. Due to their numerous benefits, such as automation, speed, cost-effectiveness, and minimal sample volume requirements, these systems are particularly well suited for immunoassays. In this review, an overview is provided of diverse DMF manipulation platforms and their applications in immunological analysis. Initially, droplet-driven DMF platforms based on electrowetting on dielectric (EWOD), magnetic manipulation, surface acoustic wave (SAW), and other related technologies are briefly introduced. The preparation of DMF is then described, including material selection, fabrication techniques and droplet generation. Subsequently, a comprehensive account of advancements in the integration of DMF with various immunoassay techniques is offered, encompassing colorimetric, direct chemiluminescence, enzymatic chemiluminescence, electrosensory, and other immunoassays. Ultimately, the potential challenges and future perspectives in this burgeoning field are delved into. [ABSTRACT FROM AUTHOR]

In this work, a surface acoustic wave (SAW) temperature sensor based on a quartz substrate was designed and investigated. Employing the Coupling-of-Modes (COM) model, a detailed analysis was conducted on the effects of the number of interdigital transducers (IDTs), the number of reflectors, and their spacing on the performance of the SAW device. The impact of the transversal mode of quartz SAWs on the device was subsequently examined using the finite element method (FEM). The simulation results indicate that optimizing these structural parameters significantly enhances the sensor's sensitivity and frequency stability. SAW devices with optimal structural parameters were fabricated, and their resonant frequencies were tested across a temperature range of 25–150 °C. Experimental results demonstrate that the SAW temperature sensor maintains high performance stability and data reliability throughout the entire temperature range, achieving a Bode-Q of 7700. Furthermore, the sensor exhibits excellent linearity and repeatability. An analysis of the sensor's response under varying temperature conditions reveals a significant temperature dependency on its Temperature Coefficient of Frequency (TCF). This feature suggests that the sensor possesses potential advantages for applications in industrial process control and environmental monitoring. [ABSTRACT FROM AUTHOR]

Self-powered wireless sensing system is particularly suitable for applications in intelligent manufacturing, smart healthcare etc. as it does not require an external power source. Triboelectric nanogenerator (TENG) is an emerging energy harvester that can be used to power self-powered wireless sensors. The latest achievement in this area is the instantaneous self-powered wireless sensor, where the electric energy generated by the TENG is injected directly into the inductor-capacitor (LC) resonator to generate a decaying oscillating signal with encoded sensing information. However, the frequency is lower (typically < 5 MHz) and the signal transmission distance is short (< 3 m) limited by the near-field magnetic coupling, restricting its widespread applications. In this research, we propose a self-powered long-distance wireless sensing platform which utilizes a surface acoustic wave (SAW) resonator based radio-frequency oscillator to convert TENG energy into a high frequency signal with sensing information encoded. With this system, the sensing signal can be easily transmitted through the antenna for long distance. An optimized system is designed and conditional influences are fully investigated. Results show this self-powered wireless sensor system can perform wireless sensing for force, temperature and vibration at a distance up to 50 m. [ABSTRACT FROM AUTHOR]

Ultraflat metal foils are essential for semiconductor nanoelectronics applications and nanomaterial epitaxial growth. Numerous efforts have been devoted to metal surface engineering studies in the past decades. However, various challenges persist, including size limitations, polishing non-uniformities, and undesired contaminants. Thus, further exploration of advanced metal surface treatment techniques is essential. Here, we report a physical strategy that utilizes surface acoustic wave assisted annealing to flatten metal foils by eliminating the surface steps, eventually transforming commercial rough metal foils into ultraflat substrates. Large-area, high-quality, smooth 2D materials, including graphene and hexagonal boron nitride (hBN), were successfully grown on the resulting flat metal substrates. Further investigation into the oxidation of 2D-material-coated metal foils, both rough and flat, revealed that the hBN-coated flat metal foil exhibits enhanced anti-corrosion properties. Molecular dynamics simulations and density functional theory validate our experimental observations. Ultraflat metal foils are important for the growth of high quality 2D materials, but their fabrication remains challenging. Here, the authors report a surface-acoustic-wave-assisted annealing method to flatten the surface of commercial Cu foils, leading to the growth of 2D graphene and hexagonal boron nitride with enhanced anti-corrosion properties. [ABSTRACT FROM AUTHOR]

In this paper, the fatigue damage degree of low-alloy structural steel is evaluated by using the attenuation characteristics of laser-induced surface acoustic wave (SAW) during propagation. Taking the typical structural steel material Q345 as an example, a cracks model of fatigue damage is established, and the finite element method is used to solve the model. The results showed that the attenuation coefficient of SAW can reflect the depth and density of fatigue cracks. The surface measurement experiments of specimens with stress cycles of 0, 50000, 100000, 150000, and 200,000 showed that with the increase of stress cycles, the attenuation coefficient of SAW increases as a whole, indicating that it is feasible to evaluate the fatigue damage degree based on the attenuation of SAW. A method of applying tensile stress to the material to improve the sensitivity of fatigue damage evaluation is proposed. The tensile stress is used to offset the horizontal amplitude of the SAW, keeping the fatigue cracks in an open state and increasing the attenuation coefficient of SAW. The attenuation coefficient measurement experiment shows that this method is feasible. [ABSTRACT FROM AUTHOR]

This review article presents insights into acoustic interactions with semiconductors, exploring a continuum from electron dynamics to exciton behavior while highlighting recent developments in organic material systems. Various aspects of acoustic interactions, encompassing the manipulation of electrons and their transport mechanisms for applications in the fields of acoustoelectric and acousto-optics, explored by studying surface acoustic wave (SAW) devices integrated with inorganic and organic semiconductors, are presented here. SAWs are guided waves propagating along a piezoelectric material surface, inducing acoustic strain and piezoelectric fields within a semiconductor upon contact. These fields create a dragging force, transferring energy and momentum into the semiconductor, which manipulate and transport charge carriers, thereby generating an acoustoelectric current. Furthermore, SAW can influence exciton dynamics via type-II as well as type-I band-edge modulations, leading to alterations in their spatial distribution, causing transport of electron–hole pairs as distinct charge carrier packets and as bound pairs, respectively, along the SAW path. This paper explores advancements in these phenomena, shedding light on innovative applications and, especially, novel insights into the dynamic interplay between acoustics and organic semiconductor physics. The review concludes by outlining challenges and prospects in the field of SAW and semiconductor interactions, providing a roadmap for future research endeavors. [ABSTRACT FROM AUTHOR]

Surface acoustic wave (SAW) tweezers are a promising multifunctional micromanipulation method that controls microscale targets via patterned acoustic fields. Owing to their device structure and bonding process, most SAW tweezers have limitations in terms of controlling the position and motion of the acoustic traps, as they generate an acoustic field with a fixed region and adjust the manipulation effects via signal modulation. To address this challenge, we propose movable SAW tweezers with a multilayer structure, achieving dynamic control of their wave field and acoustic trap positions; we demonstrate their precise manipulation functions, such as translation, in-plane rotation, out-of-plane rotation, and cluster formation, on a wide spectrum of samples, including particles, bubbles, droplets, cells, and microorganisms. Our method not only improves the degree of freedom and working range of SAW tweezers but also allows for precise and selective manipulation of microtargets via microtools and localized wavefields. Owing to their flexibility, versatility, and biocompatibility, the movable SAW tweezers can be a practical platform for achieving arbitrary manipulation of microscale targets and have the potential to play significant roles in biomedical microrobotics. [ABSTRACT FROM AUTHOR]

Cytopathology, crucial in disease diagnosis, commonly uses microscopic slides to scrutinize cellular abnormalities. However, processing high volumes of samples often results in numerous negative diagnoses, consuming significant time and resources in healthcare. To address this challenge, a surface acoustic wave‐enhanced multi‐view acoustofluidic rotation cytometry (MARC) technique is developed for pre‐cytopathological screening. MARC enhances cellular morphology analysis through comprehensive and multi‐angle observations and amplifies subtle cell differences, particularly in the nuclear‐to‐cytoplasmic ratio, across various cell types and between cancerous and normal tissue cells. By prioritizing MARC‐screened positive cases, this approach can potentially streamline traditional cytopathology, reducing the workload and resources spent on negative diagnoses. This significant advancement enhances overall diagnostic efficiency, offering a transformative vision for cytopathological screening. [ABSTRACT FROM AUTHOR]

The document is a contents list for the journal "Lab on a Chip," which focuses on devices and applications at the micro- and nanoscale. It includes a range of articles on various topics, such as microfluidic technologies, CRISPR diagnostics, drug delivery, and 3D printing. The journal aims to connect the world with the chemical sciences and is published by The Royal Society of Chemistry. The document also mentions approved training courses offered by the society. [Extracted from the article]

We propose an innovative design for interdigital transducers (IDTs), enabling phase modulation of surface acoustic waves (SAWs) with a dislocated electrode structure. By designing the size and arrangement of these dislocated IDTs, a novel type of Airy SAWs can be generated, exhibiting self-accelerating, self-bending, and self-healing characteristics. The acceleration of the generated Airy SAW is 0.081 cm−1. Furthermore, particles and bubbles can be precisely manipulated using the generated Airy SAW. The proposed dislocated IDTs could be used for generation of many other types of SAWs, hence holding great promise for applications including SAW shaping, particle manipulation/sorting, and acoustic sensing/detection. [ABSTRACT FROM AUTHOR]

Passive wireless surface acoustic wave (SAW) sensors are very useful for on-site monitoring of the working status of machines in complex environments, such as high-temperature rotating objects. For rotating parts, it is difficult to realize real-time and continuous monitoring because of the unstable sensing signal caused by the continuous change of the relative position of the rotating part to the sensor and shielding of the signal. In our SAW sensing system, we propose a loop antenna integrated with the rotating part to obtain a stable sensing signal owing to its omnidirectional radiation pattern. Methodologies for determining the antenna dimension, system operating frequency, and procedures for designing a SAW sensor tag are discussed in this paper. By fully utilizing the influence of metal rotor on antenna performance, the antenna needs no impedance matching elements while it provides sufficient gain, which equips the antenna with nearly zero temperature drift at a wide temperature-sensing range. Experimental verification results show that this sensing system can greatly improve the stability of the sensing signal significantly and can achieve a temperature sensing accuracy of ~1 °C at different rotational speeds, demonstrated by the feasibility of the loop antenna for monitoring the working status of rotating metal parts. [ABSTRACT FROM AUTHOR]

Cardiovascular disease (CVD) represents the leading cause of death worldwide. For individuals at elevated risk for cardiovascular disease, early detection and monitoring of lipid status is imperative. The majority of lipid measurements conducted in hospital settings employ optical detection, which necessitates the use of relatively large-sized detection machines. It is, therefore, necessary to develop point-of-care testing (POCT) for lipoprotein in order to monitor CVD. To enhance the management and surveillance of CVD, this study sought to develop a POCT approach for apolipoprotein B (ApoB) utilizing a shear horizontal surface acoustic wave (SH-SAW) platform to assess the risk of heart disease. The platform employs a reflective SH-SAW sensor to reduce the sensor size and enhance the phase-shifted signals. In this study, the platform was utilized to monitor the impact of a weekly almond and oat milk or statins intervention on alterations in CVD risk. The SH-SAW ApoB test exhibited a linear range of 0 to 212 mg/dL, and a coefficient correlation (R) of 0.9912. Following a four-week intervention period, both the almond and oat milk intervention (−23.3%, p < 0.05) and statin treatment (−53.1%, p < 0.01) were observed to significantly reduce ApoB levels. These findings suggest that the SH-SAW POCT device may prove a valuable tool for monitoring CVD risk, particularly during routine daily or weekly follow-up visits. [ABSTRACT FROM AUTHOR]

In this work, the wave propagation of Rayleigh type through a periodic elastic element covered with a T-plate is analyzed. Viscous-spring artificial boundaries are used to satisfy boundary conditions of a periodic structure. By using the Carrera Unified Formulation (CUF), the various kinematics of the three-dimensional structure are consistently expressed and the propagation of waves within the model is obtained. Lagrange expansion is employed to generate the mathematical model of the structure. The numerical evaluation and the comparison with the results obtained by the analytical method and COMSOL involving different structures reveal that the results of this study are reliable and show that the model developed provides accurate results for the analysis of the periodic elastic structure of T-plates. [ABSTRACT FROM AUTHOR]

In this work, the influence of evaporative flux over the atomization driven by surface acoustic waves (SAWs) of a Newtonian water drop is studied. The drop is placed on a heated substrate at constant temperature, higher than the saturation temperature at a given vapor pressure. In this manner, an interfacial temperature distribution arises along the drop free surface in terms evaporative mass flux and vapor recoil, which repercussion over aerosol size is studied by determining the asymptotic evolution equation governing the acoustically driven free surface. At such scenario, the connection between surface tension and temperature is also considered; thus, thermocapillary flow is incorporated into our drop model, described in terms of fundamental parameters, like the evaporation number, Marangoni number, and acoustic capillary number. Numerical solution of the evolution equation led us to obtain a simplified representation of the drop interfacial deformation mechanism, capable of predicting atomization and portraying the influence of evaporation over atomization. Subsequent analysis shows that the incorporation of evaporation at SAW atomization traduces in normal stresses counteracting the acoustic and thermocapillary effect, leading to the development of smaller drop aspect ratios with respect to the no-evaporative case. Being aware that the aerosol size is deeply related to the aspect ratio, we propose an analytical expression to estimate aerosol diameter under evaporative conditions. The results show that aspect ratio reduction leads to a decrement on aerosol size, up to two orders of magnitude, with respect to the no-evaporative case. Our study is a first approach providing insight about the importance of evaporation on aerosol regulation at SAW atomization. [ABSTRACT FROM AUTHOR]

This paper comprehensively reviews the fundamental principles, innovative designs, and multidisciplinary applications of micromixers. First, it introduces the fundamental principles of fluid mixing in micromixers, including passive and active mixing mechanisms, and the flow characteristics of fluids at the microscale. Subsequently, it focuses on the innovative design of passive micromixers, covering a variety of designs, such as obstacle structures, curved serpentine structures, groove structures, separation and recombination structures, topology optimization structures, and baffle structures, and analyzes the effects of different structures on mixing efficiency and pressure drop. In addition, it also studies the innovative design of active micromixers, including magnetic field assistance, electric field assistance, surface acoustic wave assistance, and thermal effect assistance, and analyzes the effects of different driving modes on mixing efficiency. Finally, it outlines the multidisciplinary applications of micromixers in the fields of biomedicine, chemical analysis, environmental monitoring and control, and new energy. This review aims to provide a comprehensive reference for the research and application of micromixers and promote their application in more fields. [ABSTRACT FROM AUTHOR]

The acoustoelectric (AE) effect induced by the absorption of ultraviolet (UV) light at 365 nm in piezoelectric ZnO films was theoretically and experimentally studied. c-ZnO films 4.0 µm thick were grown by the RF reactive magnetron sputtering technique onto fused silica substrates at 200 °C. A surface acoustic wave (SAW) delay line was fabricated with two split-finger Al interdigital transducers (IDTs) photolithographically implemented onto the ZnO-free surface to excite and reveal the propagation of the fundamental Rayleigh wave and its third harmonic at about 39 and 104 MHz. A small area of a few square millimeters on the surface of the ZnO layer, in between the two IDTs, was illuminated by UV light at different light power values (from about 10 mW up to 1.2 W) through the back surface of the SiO2 substrate, which is optically transparent. The UV absorption caused a change of the ZnO electrical conductivity, which in turn affected the velocity and insertion loss (IL) of the two waves. It was experimentally observed that the phase velocity of the fundamental and third harmonic waves decreased with an increase in the UV power, while the IL vs. UV power behavior differed at large UV power values: the Rayleigh wave underwent a single peak in attenuation, while its third harmonic underwent a further peak. A two-dimensional finite element study was performed to simulate the waves IL and phase velocity vs. the ZnO electrical conductivity, under the assumption that the ZnO layer conductivity undergoes an in-depth inhomogeneous change according to an exponential decay law, with a penetration depth of 325 nm. The theoretical results predicted single- and double-peak IL behavior for the fundamental and harmonic wave due to volume conductivity changes, as opposed to the AE effect induced by surface conductivity changes for which a single-peak IL behavior is expected. The phenomena predicted by the theoretical models were confirmed by the experimental results. [ABSTRACT FROM AUTHOR]

Surface acoustic wave devices are ubiquitously used for signal processing and filtering, as well as mechanical, chemical, and biological sensing and show promise as quantum transducers. While surface acoustic waves (SAWs) are primarily excited and driven using electromechanical coupling and interdigital transducers, there is a strong desire for novel methods that enable the coherent excitation and detection of SAWs all-optically interfacing with photonic integrated circuits. In this work, we numerically model and experimentally demonstrate SAW excitation in integrated photonic waveguides made from GeAsSe glass via backward stimulated Brillouin scattering (SBS). We measure a Brillouin gain coefficient of 203 W−1 m−1 for the surface acoustic resonance at 3.81 GHz, with a linewidth narrowed to 20 MHz. Experimental access to this new regime of SBS not only opens up opportunities for novel on-chip sensing applications by harnessing the waveguide surface but also paves the way for strong Brillouin interactions in materials lacking sufficient acoustic guidance in the waveguide core, as well as the excitation of SAWs in non-piezoelectric materials. [ABSTRACT FROM AUTHOR]

Stimulated Brillouin scattering offers a broad range of applications, including lasers, sensors, and microwave photonics, most of which require strong Brillouin gain within a narrow bandwidth. Here, we experimentally report the first measurement of stimulated Brillouin scattering in silica optical nanofibers from both hybrid and surface acoustic waves. Using a pump–probe technique in the radio frequency domain, we measured a Brillouin gain as high as 15 m−1 W−1 and linewidth to 16 MHz for the L03 hybrid acoustic mode near 9 GHz using a 990-nm diameter nanofiber. This gain is 65 times larger than the highest gain obtained in standard single-mode fibers. In addition, we report a Brillouin gain of up to 5 m−1 W−1 from surface acoustic waves around 5 GHz. We further demonstrate a nanofiber-based Brillouin laser with a threshold of 350 mW. Our results create opportunities for advanced Brillouin-based applications utilizing optical nanofibers. [ABSTRACT FROM AUTHOR]

A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle of Lamb wave sensors relies on the excitation and propagation of this guided wave within piezoelectric material. Lamb wave sensors exhibit significant advantages in various sensing applications due to their unique wave characteristics and design flexibility. Compared to traditional surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors, Lamb wave sensors can not only achieve higher frequencies and quality factors in smaller dimensions but also exhibit superior integration and multifunctionality. In this paper, we briefly introduce Lamb wave sensors, summarizing methods for enhancing their sensitivity through optimizing electrode configurations and adjusting piezoelectric thin plate structures. Furthermore, this paper systematically explores the development of Lamb wave sensors in various sensing applications and provides new insights into their future development. [ABSTRACT FROM AUTHOR]

Al-Cu thin films were fabricated by RF magnetron sputtering from aluminum (Al) and copper (Cu) metal targets to improve the acoustic performance of SAW devices on LiNbO3 substrates. To optimize the electrode material for SAW devices, Al-Cu films with various compositions were fabricated and their electrical, mechanical, and acoustic properties were comprehensively evaluated. The Al-Cu films exhibited a gradual decrease in resistivity with increasing Al content. The double-electrode SAW devices composed of Al-Cu films demonstrated a resonant frequency of 70 MHz and an average insertion loss of −16.1 dB, which was significantly lower than that of devices made with traditional Au or Al electrodes. Additionally, the SAW devices showed an increase in the FWHM values of the resonant frequency and a decrease in the insertion loss as the Al content in the IDT electrode decreased. These findings indicate that improving the performance of SAW devices can be achieved by reducing the density of the IDT electrodes, rather than focusing solely on their electrical characteristics. [ABSTRACT FROM AUTHOR]