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3. Nano-diffractive elements in BSI pixel CMOS image sensors: optical design and process integration co-optimization with pixel scaling

Author

García-Blanco, Sonia M., Cheben, Pavel, Barlas, M., Crocherie, A., Bardonnet, F., Abadie, Q., Sungauer, E., Vignetti, M., Mamdy, B., Nicholson, I., D'Aillon, P. G., Bianchi, A. R., Mugny, G., Golanski, D., Domengie, F., Besson, P., Prevost, E., Parmigiani, L., Arnaud, J., Wehbe-Alause, H., Tournier, A., Noblanc, O., and Rochereau, K.

Published
2022
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