1. Characterization of TiAlSiON Coatings Deposited by Plasma Enhanced Magnetron Sputtering: XRD, XPS, and DFT Studies
- Author
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Seif O. Cholakh, V.M. Zainullina, M. A. Korotin, A.S. Kamenetskih, Andrey I. Kukharenko, Ernst Z. Kurmaev, A. V. Chukin, N. A. Skorikov, and N. V. Gavrilov
- Subjects
HARDNESS ,Materials science ,AISI-430 STAINLESS STEELS ,Analytical chemistry ,ELECTRONIC STRUCTURE ,FOS: Physical sciences ,MAXIMUM HARDNESS ,engineering.material ,ELEMENTAL CONCENTRATIONS ,X-RAY PHOTOELECTRON SPECTRA ,X RAY PHOTOELECTRON SPECTRA ,ALUMINUM COATINGS ,STAINLESS STEEL ,PLASMA ENHANCED MAGNETRON SPUTTERING ,MAGNETRON SPUTTERING ,TIALON COATINGS ,chemistry.chemical_compound ,X-ray photoelectron spectroscopy ,Coating ,Phase (matter) ,Materials Chemistry ,X RAY PHOTOELECTRON SPECTROSCOPY ,DENSITY FUNCTIONAL THEORY ,Thin film ,VALENCE BAND SPECTRA ,Condensed Matter - Materials Science ,Materials Science (cond-mat.mtrl-sci) ,PHOTOELECTRON SPECTROSCOPY ,Surfaces and Interfaces ,General Chemistry ,Partial pressure ,Sputter deposition ,ALUMINUM ,Condensed Matter Physics ,Microstructure ,Surfaces, Coatings and Films ,HARD COATINGS ,PARTIAL PRESSURE OF OXYGEN ,Silicon nitride ,chemistry ,TITANIUM ,engineering ,X RAY DIFFRACTION ,GASEOUS MIXTURE - Abstract
The results of characterization of TiAlSiON hard coatings deposited on ferric-chromium AISI 430 stainless steel by plasma enhanced magnetron sputtering are presented. The coating with maximum hardness (of 45 GPa) was obtained at the following optimal values of elemental concentrations: Si ~5 at.%, Al ~15 at.%, and Ti ~27 at.%. The elastic modulus of the coating was 590 GPa. The reading of gaseous mixture (Ar-N2) pressure was 1*10-3 Torr and the reading of partial pressure of oxygen (O2) was 1*10-5 Torr. The X-ray diffraction (XRD) measurements showed the presence of Ti(Al)N. High-energy resolved XPS spectra of core levels revealed the formation of Ti-N, Ti-O-N, Si-N and Al-O-N bonds. Comparison of XPS valence band spectra with specially performed density functional theory calculations for two ordered and few disordered TiN1-xOx (0 =< x
- Published
- 2014