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The paper is devoted to the study of the processes of mixed-mode deposition of aluminum oxide films in oxygen and argon mixture. Mixed-mode is a new pulsed thin film deposition technology that combines magnetron sputtering and arc evaporation. The transition of the magnetron discharge to the arc occurs when the discharge current reaches the threshold value, and the arc burning time is controlled by pulse length. The paper describes the experimental equipment and the principles of controlling the parameters of a combined pulse discharge. The results of measuring the ion current density on a substrate and the deposition rate of aluminum oxide films in mixed-modes at different powers of magnetron and arc discharges are presented. Stable initiation of an arc discharge in a pulsed mode with a “poisoned” cathode surface occurs at a cathode current density of 0.4–0.6 A/cm2. With the same average discharge power in mixed-mode, a higher average ion current density on a substrate, higher coating deposition rate and more intensity of plasma radiation are provided, compared with medium-frequency magnetron sputtering.

The states of thermal equilibrium of a thin superconducting film carrying an alternating current are considered. The temperature field of the film is modelled within a ranges of frequency and temperature where density of normal current is comparable with that of superconducting electrons. The equation for heat conduction in a superconducting state, deduced with allowance for energy dissipation by normal electrons within the framework of a double-fluid model, features a nonlinear function of heat sources. The analysis of homogeneous states of equilibrium and their dependence on control parameters is carried out. Its results, presented in the form of isotherms of the equilibrium states in a phase-plane, reveal dependence of singular points on control parameters. This allows retrieving of the structure of phase-space dissection and states of equilibrium for various values of control parameters. The stability of these states, considered within the boundary value problem with periodic boundary conditions, is proved. The range of a bistability of the film is defined and the numerical modelling of waves of switching between stationary states is accomplished.

We developed a scanning Hartmann sensor and an interferometer detector for precision measurements of thermal effects in samples in vacuum are developed. The simultaneous use of these methods allowed us to distinguish contributions of different thermal effects. Besides we discussed active thermal correction of thermally induced wawefront distortions by means of ancillary heating using CO2 laser irradiation.