1. Fabrication of a 3GHz oscillator based on Nano-Carbon-Diamond-film-based guided wave resonators
- Author
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Omar Elmazria, Philippe Bergonzo, Gilles Martin, Badreddine Assouar, Rodolphe Boudot, Roland Salut, Sylvain Ballandras, Céline Gesset, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Capteurs Diamant (LCD-LIST), Département Métrologie Instrumentation & Information (DM2I), Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay, Institut Jean Lamour (IJL), Institut de Chimie du CNRS (INC)-Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS), This work is supported by the French Direction Générale de l’Armement (DGA) under Grant #636974 0680238016., Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA)), and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA))
- Subjects
Materials science ,Fabrication ,Electron Beam Lithography on ZnO/Diamond substrate ,Oscillator demonstration at 3 GHz ,02 engineering and technology ,engineering.material ,7. Clean energy ,01 natural sciences ,High frequency resonators ,[SPI.MAT]Engineering Sciences [physics]/Materials ,Resonator ,Optics ,double port resonators found compatible with the oscillator application ,E-beam lithography ,Single and double port resonators ,0103 physical sciences ,Phase noise ,Oscillator ,3–6 GHz frequency range ,Electrical and Electronic Engineering ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,010302 applied physics ,RF resonator ,Guided wave testing ,business.industry ,Surface acoustic wave ,Resonance ,Diamond ,frequency source applications ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Nanocrystalline diamond ,engineering ,0210 nano-technology ,business ,Surface Acoustic Wave ,Electron-beam lithography - Abstract
International audience; We have investigated the possibility to use carbon-diamond layers exhibiting nano-sized grains for the fabrication of SAW resonators. One of the main purpose was to check the influence of the grain size on the resonator's spectral signature and to evaluate the fabrication of high frequency sources along this approach. We have investigated various material combinations on Nano-Carbon-Diamond (NCD) layers grown along different techniques (nano-seeding, BEN, followed by MPCVD). The best configuration was based on ZnO/NCD material combination provided the piezoelectric layer was deposited on the so-called nucleation surface of the NCD. Numerous resonators have been fabricated on such substrates, allowing to characterize and exploit the resonance near 3 GHz. An oscillator then was built using such a configuration: its stability has been measured near 10-7 and its phase noise was found near −100 dBc.Hz-1 at 10 kHz.
- Published
- 2013