9 results on '"齐月静 Qi Yuejing"'
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2. 光刻调焦调平测量技术的研究进展
3. 增强型相位光栅衍射效率研究
4. 光束偏振对自参考干涉信号对比度的影响
5. Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System
6. Analysis of Effect of Ambient Temperature Variation on Measurement Accuracy of Shack-Hartmann Wavefront Sensor
7. Analysis of Effect of Numerical Aperture of Illumination Objective Lens on Quality of Wavefront Diffracted by Tiny Pinhole
8. Optimized Analysis of Random Point Array Illumination Source for Nanometer Accuracy Wavefront Error Testing
9. Research on Focusing Properties of Sub-Wavelength Metal Single-Slit Containing Mental Strip
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