1. 半导体用大尺寸单晶金刚石衬底制备及 加工研究现状.
- Author
-
刘俊杰, 关春龙, 易 剑, 宋 惠, 江 南, and 西村一仁
- Subjects
HEAT resistant materials ,DIAMOND crystals ,SINGLE crystals ,BREAKDOWN voltage ,CHEMICAL vapor deposition - Abstract
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- Published
- 2023