The Acrylate resin layer has lower dielectric constant(e≈3.5),better optical transparency,and can be spin-coated as a flat surface film easily.By using resin as passivation layer in the array process,the vertical gap is increased between the Common ITO and bus line and plannar the devices.This reduces unwanted capacitive coupling and enables the pixel electrode to be extended over the gate and data lines,thus increasing aperture area,specifi-cally decreases power.In this work,there were some problems between the resin passivation layer and pixel ITO,such as Mo attack,missing ITO and so on.After optimizing the process of ITO Etching,photosensitive resin and non-photosensitive resin perfectly match with ITO etchant and Resin Coating,the resin passivation layer is sucessfully applied to the TFT-LCD.