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This paper presents the design and fabrication of a novel piezoelectric actuator for a gas micro pump with check valve having the advantages of miniature size, light weight and low power consumption. The micro pump is designed to have eight major components, namely a stainless steel upper cover layer, a piezoelectric actuator, a stainless steel diaphragm, a PDMS chamber layer, two stainless steel channel layers with two valve seats, a PDMS check valve layer with two cantilever-type check valves and an acrylic substrate. A prototype of the gas micro pump, with a size of 52 mm × 50 mm × 5.0 mm, is fabricated by precise manufacturing. This device is designed to pump gases with the capability of performing the self-priming and bubble-tolerant work mode by maximizing the stroke volume of the membrane as well as the compression ratio via minimization of the dead volume of the micro pump chamber and channel. By experiment apparatus setup, we can get the real-time values of the flow rate of micro pump and the displacement of the piezoelectric actuator, simultaneously. The gas micro pump obtained higher output performance under the sinusoidal waveform of 250 Vpp. The micro pump achieved the maximum pumping rates of 1185 ml/min and back pressure of 7.14 kPa at the corresponding frequency of 120 and 50 Hz., {"references":["H Kim, W H Steinecker, G R Lambertus, A A Astle, K Najafi, E T Zellers,\nL Bernal, P Washabaugh, K D Wise, \"Integrated high-pressure 4-stage\nmicro pump for high speed micro chromatography,\" Proc. 10th Int. Conf.\nMiniaturized Systems for Chemistry and Life Science (uTAS '06),\nTokyo, Japan, pp. 1037–1039, 2006.","P Rodgers, V Eveloy, M Pecht, \"Extending the limits of aircooling in\nmicroelectronic equipment,\" Proc. 6th Int. Conf. Thermal, Mechanical\nand Multiphysics Simulation and Experiment in Micro-electronics and\nMicro-systems, EuroSimE, Berlin, Germany, pp. 695–701, 2005.","Y Wang, G Yuan, Y K Yoon, M G Allen, S A Bidstrup, \"Large eddy\nsimulation (LES) for synthetic jet thermal management,\" Int. J. Heat\nMass Transfer, Vol. 49, pp. 2173–2179, 2006.","L Arana, S Schaevitz, A Franz, M A Schmidt, K F Jensen, \"A\nmicrofabricated suspended-tube chemical reactor for thermally efficient\nfuel processing,\" J. Microelectromech. Syst. Vol. 12, pp. 600–612, 2003.","N T Nguyen, X Huang and T K Chuan, \"MEMS-micro pumps: a review,\"\nASME J. Fluids Eng. Vol. 124, pp. 384-392, 2002.","D J Laser and J G Santiago, \"A review of micro pumps,\" J. Micromech.\nMicroeng. Vol. 14, pp. R35–R64, 2004.","P Woias, \"Micro pumps-past, progress and future prospects,\" Sensors\nActuators B Vol. 105, pp. 28–38, 2005.","H Kim, K Najafi, L P Bernal, \"Gas micro pumps, \" in: Y. Gianchandani,\nO. Tabata, H. Zappe (Eds.), Comprehensive Microsystems, vol. 2,\nElsevier Ltd., The Netherlands, pp. 273-299, 2008.","L Chen, S Lee, J Choo and E K Lee, \"Continuous dynamic flow micro\npumps for microfluid manipulation,\" J. Micromech. Microeng. Vol. 18,\npp. 1–22, 2008.\n[10] F Amirouche, Y Zhou and T Johnson, \"Current micro pump technologies\nand their biomedical applications,\" Microsyst. Technol. Vol. 15 pp.\n647-666, 2009.\n[11] H Andersson, W van der Wijngaart, P Nilsson, P Enoksson and G\nStemme, \"A valve-less diffuser micro pump for microfluidic analytical\nsystems,\" Sensors Actuators B Vol. 72, pp. 259–265, 2001.\n[12] B Fan, G Song and F Hussain, \"Simulation of a piezoelectrically actuated\nvalveless micro pump,\" Smart Mater. Struct. Vol. 14, pp. 400–405, 2005.\n[13] J Kang, J V Mantese and G W Auner, \"A self-priming, high performance,\ncheck valve diaphragm micro pump made from SOI wafers,\" J.\nMicromech. Microeng. Vol. 18, pp. 1-8, 2009.\n[14] R. Rapp, W K Schomburg, D. Maas, J. Schulz and W. Stark, \"LIGA\nmicro pump for gases and liquids,\" Sens. Actuators A Vol. 40, pp. 57–61,\n1994.\n[15] S Boehm, W Olthuis and P Bergveld, \"A plastic micro pump constructed\nwith conventional techniques and materials,\" Sensors Actuators A Vol.\n77, pp. 223–228, 1999.\n[16] S. Santra, P. Holloway, D. Batich, \"Fabrication and testing of a\nmagnetically actuated micro pump,\" Sens. Actuators B Vol. 87, pp. 358–\n364, 2002.\n[17] T Q Truong and N T Nguyen, \"A polymeric piezoelectric micro pump\nbased on lamination technology,\" J. Micromech. Microeng. Vol. 14,\npp.632–638, 2004.\n[18] J H Kim, K T Lau, R Shepherd, Y Wu, G Wallace and D Diamond,\n\"Performance characteristics of a polypyrrole modified\npolydimethylsiloxane (PDMS) membrane based microfluidic pump,\"\nSensors and Actuators A Vol. 148, pp. 239–244, 2008."]}

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