351. Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates
- Author
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Romesh C. Batra, Davide Spinello, Maurizio Porfiri, Electrical and Computer Engineering, and Biomedical Engineering and Mechanics
- Subjects
Technology ,Field (physics) ,MODAL-ANALYSIS ,Mechanical engineering ,PRESSURE ,lcsh:Chemical technology ,Biochemistry ,Instability ,Displacement (vector) ,ACTUATED NARROW MICROBEAMS ,Analytical Chemistry ,symbols.namesake ,microsensor ,Electrochemistry ,lcsh:TP1-1185 ,Electrical and Electronic Engineering ,FIELD ,Galerkin method ,Instrumentation ,Instruments & Instrumentation ,TEMPERATURE ,pull-in insta- bility ,ELECTROSTATIC MEMS ,pull-in instability ,Full Paper ,Chemistry ,Chemistry, Analytical ,microplate ,Mechanics ,van der Waals force ,Atomic and Molecular Physics, and Optics ,Vibration ,Nonlinear system ,Algebraic equation ,ENCAPSULATED POLYSILICON RESONATORS ,symbols ,microelectromechanical systems ,Microelectromechanical systems ,REDUCED-ORDER MODEL ,CIRCULAR PLATES ,BEHAVIOR - Abstract
We study the influence of von Kármán nonlinearity, van der Waals force, and thermal stresses on pull-in instability and small vibrations of electrostatically actuated microplates. We use the Galerkin method to develop a tractable reduced-order model for electrostatically actuated clamped rectangular microplates in the presence of van der Waals forces and thermal stresses. More specifically, we reduce the governing two-dimensional nonlinear transient boundary-value problem to a single nonlinear ordinary differential equation. For the static problem, the pull-in voltage and the pull-in displacement are determined by solving a pair of nonlinear algebraic equations. The fundamental vibration frequency corresponding to a deflected configuration of the microplate is determined by solving a linear algebraic equation. The proposed reduced-order model allows for accurately estimating the combined effects of van der Waals force and thermal stresses on the pull-in voltage and the pull-in deflection profile with an extremely limited computational effort.
- Published
- 2008
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