301. Formation of Er-germanosilicide films on strained Si1− xGe x with different Ge contents.
- Author
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Choi, Seongheum, Choi, Juyun, and Kim, Hyoungsub
- Subjects
- *
GERMANIUM films , *AGGLOMERATION (Materials) , *SILICIDES , *THIN films , *ANNEALING of metals - Abstract
Er-germanosilicide [Er(Si1− zGe z)2− y] films were formed on strained Si1− xGe x layers with different Ge contents ( x = 0.14 and 0.28), and their dependency of formation kinetics on the Ge concentrations was investigated while minimizing the oxygen-incorporation effect using a TaN capping layer. When a ~30 nm-thick Er film was used, uniform Er(Si1− zGe z)2− y films were obtained at an annealing temperature of around 600 °C without their agglomeration and also the strain relaxation of the remaining Si1− xGe x layer. The increase in the Ge concentration of the reacting Si1− xGe x layer enhanced the formation of the crystalline Er(Si1− zGe z)2− y film. Furthermore, some enrichment of the Ge content within the Er(Si1− zGe z)2− y film occurred in comparison with that in the initial and remaining Si1− xGe x layers. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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