301. Deep-Reactive Ion-Etched compliant Starting Zone Electrostatic Zipping Actuators.
- Author
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Jian Li, Brenner, Michael P., Christen, Thomas, Sami Kotilainen, Markku, Lang, Jeffrey H., and Slocum, Alexander H.
- Subjects
ACTUATORS ,AUTOMATIC control systems ,ELECTROSTATIC accelerators ,PRINTS ,ETCHING - Abstract
This paper presents the modeling, design, fabrication and testing of monolithic electrostatic curved-electrode zipping actuators fabricated by deep reactive ion etching (DRIE). In contrast to traditional curved-electrode zipping actuators, the design of the actuators presented here utilizes a compliant starting cantilever to significantly reduce the initial pull-in voltage by closing the gap (kerf) generated by DRIE. Thus, the actuators achieve high actuation force at a relatively low voltage. For example, two actuators each with dimensions of 4.5 mm * 100 µm * 300 µm are used to drive a bistable MEMS relay. Together, the two actuators provide up to 10 mN of force over their 80 µm stroke at 140 V. Measurements of the force-displacement relation of these actuators confirm theoretical expectations based both on numerical and analytical methods. Finite element analysis is employed to predict the behavior of the complete bistable relay system. [ABSTRACT FROM AUTHOR]
- Published
- 2005
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