251. Micromachined split-block schottky-diode mixer for 600 GHz
- Author
-
Oleg Cojocari, Frank Gumbmann, S. Biber, Jan Schur, Lorenz-Peter Schmidt, B. Mottet, and H.L. Hartnagel
- Subjects
Materials science ,Silicon ,business.industry ,chemistry.chemical_element ,Schottky diode ,law.invention ,Microstrip antenna ,Surface micromachining ,Horn antenna ,Planar ,chemistry ,Etching (microfabrication) ,law ,Optoelectronics ,business ,Waveguide - Abstract
This paper presents simulation results for a 600 GHz micromachined waveguide mixer with integrated horn antenna, a hybrid-integrated planar Schottky diode and IF filter structures on a quartz substrate. In addition to the simulated electrical performance we show approaches for the manufacturing of the split-block mixer by both micro-mechanical milling and silicon etching technology.
- Published
- 2006