251. Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet.
- Author
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Zhanshan Wang, Hongchang Wang, Jingtao Zhu, Zhong Zhang, Yao Xu, Shumin Zhang, Wenjuan Wu, Fengli Wang, Bei Wang, Liqin Liu, Lingyan Chen, Michette, Alan G., Pfauntsch, Slawka J., Keith Powell, A., Schäfers, Franz, Gaupp, Andreas, and MacDonald, Mike
- Subjects
TRANSMISSION electron microscopy ,ULTRAVIOLET radiation ,MAGNETRONS ,SILICON nitride ,WAVELENGTHS - Abstract
Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5 nm, and the corresponding s-component transmission (T
s ) decreased from 6% to 2% with increasing wavelength. [ABSTRACT FROM AUTHOR]- Published
- 2007
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