251. In-situ characterization of rapid crystallization of amorphous CoFeB electrodes in CoFeB/MgO/CoFeB junctions during thermal annealing
- Author
-
L. R. Shah, Guo-Xing Miao, Weigang Wang, Abdul K. Rumaiz, Edmund R. Nowak, Jagadeesh S. Moodera, Chaoying Ni, Jean Jordan-Sweet, Paul Parsons, John Q. Xiao, Ryan Stearrett, and Xin Fan
- Subjects
Materials science ,Physics and Astronomy (miscellaneous) ,Annealing (metallurgy) ,Activation energy ,Epitaxy ,Amorphous solid ,law.invention ,Crystallography ,Chemical engineering ,Transmission electron microscopy ,law ,X-ray crystallography ,Thin film ,Crystallization - Abstract
We report the crystallization study of CoFeB/MgO/CoFeB magnetic tunnel junctions using in-situ, time-resolved synchrotron-based x-ray diffraction and transmission electron microscopy. It was found that the crystallization of amorphous CoFeB electrodes occurs on a time scale of seconds during the postgrowth high temperature annealing. The crystallization can be well fit by the Johnson–Mehl–Avrami model and the effective activation energy of the process was determined to be 150 kJ/mol. The solid-state epitaxy mode of CoFeB was found to involve separate crystallization at different locations followed by subsequent merging of small grains, instead of layer-by-layer growth of CoFeB film along the MgO template.
- Published
- 2009