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242 results on '"mems sensor"'

201. MEMS Based Ethanol Sensor Using ZnO Nanoblocks, Nanocombs and Nanoflakes as Sensing Layer

Author

H. J. Pandya, Sudhir Chandra, and A. L. Vyas

Subjects
Thermal evaporation, lcsh:Technology (General), lcsh:T1-995, MEMS sensor, ZnO nanostructures, Ethanol sensor, Zinc films
Abstract

An ethanol sensor incorporating nanostructures of zinc oxide film on integrated MEMS platform is reported. A salient feature of the sensor is its lower operating temperature, which has been achieved due to the use of nanostructured ZnO material as sensing layer. In addition, a catalyst free synthesis technique has been used to grow the ZnO nanostructures. A suitably designed nickel microheater has been integrated with the sensor. The sensor was tested for various volatile organic compounds (VOCs). The response time of the sensors was studied. The sensors were sensitive to ethanol vapors at operating temperature of 100 °C. The sensor prepared using combination of ZnO nanoflakes with nanowires as sensing film showed higher sensitivity and fast response time compared to the sensors prepared using ZnO nanoblocks and nanocombs. The dynamic response of the sensors made using ZnO nanoblocks, nanocombs and combination of nanoflakes and nanowires were studied and compared.

Published
2011

202. Pentagram-Shaped Ag@Pt Core-Shell Nanostructures as High-Performance Catalysts for Formaldehyde Detection.

Author

Xu D, Xu P, Wang X, Chen Y, Yu H, Zheng D, and Li X

Abstract

High-performance HCHO sensors are of great importance in various application fields such as indoor air quality assessments. Herein, bimetallic Ag-Pt nanoparticles are synthesized as high-performance catalysts for ZnO-based gas sensors. Spherical aberration (Cs)-corrected transmission electron microscopy images with atomic resolution clearly indicate that the prepared nanoparticles exhibit a novel Ag@Pt core-shell nanostructure with a pentagram shape. For high-performance HCHO sensor construction, integrated micro-electrodes are first fabricated with the microelectromechanical system (MEMS) technology. Then, the hydrothermal route is used to self-assemble well-aligned ZnO nanowire arrays onto the sensing microregion. After that, the pentagram-shaped Ag@Pt nanoparticles are loaded onto the surface of ZnO nanowires with the inkjet printing technique to form MEMS sensors with Ag@Pt@ZnO as the sensing material. The thoroughly sensing experiments indicate that the Ag@Pt nanoparticles exhibit satisfied catalytic activation to HCHO molecules. The experimental observed detection limit of our sensor to HCHO reaches the parts per billion level. To elucidate the HCHO-sensing mechanism, the online mass spectrum (online MS) is utilized to analyze the components of exhaust gas stream of HCHO flowing through the Ag@Pt@ZnO material. The online MS indicates that with the Ag@Pt catalyst, HCHO molecules are partially oxidized to HCOOH molecules at low temperatures and are completely oxidized to CO 2 molecules at high temperatures.

Published
2020
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204. Tactile sensor using a microcantilever embedded in fluoroelastomer with resistance to cleaning and antiseptic solutions.

Author

Takahashi, Takumi, Sato, Shuhei, Abe, Takashi, and Sohgawa, Masayuki

Subjects
*TACTILE sensors, *FLUOROPOLYMERS, *ELASTOMERS, *AQUEOUS solutions, *SHEARING force, *ORGANIC solvents, *DETECTORS
Abstract

• Development of cantilever-type MEMS tactile sensors with fluoroelastomer. • Measurement in liquid by previous sensor with PDMS is difficult. • Fluoroelastomer has resistance to water, organic solvent, and chemical solutions. • Successful force detection in various solutions by fabricated sensor. In previous works, we have developed cantilever-type MEMS tactile sensors with the PDMS elastomer that are sensitive to force and light and demonstrated that it can detect complex tactile senses including normal and shear forces, proximity, and temperature. However, it is difficult for this sensor to detect correct response in liquid such as water or ethanol because of luck of resistances to these solutions. In this work, we have newly employed the fluoroelastomer as the elastomer material instead of the PDMS. It is demonstrated that fabricated tactile sensor using fluoropolymer can detect force and light successfully in water, ethanol, and NaClO aqueous solution exactly as detection in air. Therefore, this sensor becomes available for uses in various environment or with cleaning and disinfection processes. [ABSTRACT FROM AUTHOR]

Published
2020
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205. Development Trends and Perspectives of Future Sensors and MEMS/NEMS.

Author

Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Sulaiman, Othman Bin, Dong, Bowei, and Lee, Chengkuo

Subjects
NANOELECTROMECHANICAL systems, DETECTORS, MICROELECTROMECHANICAL systems, ULTRASONIC transducers, ENERGY harvesting, VIRTUAL reality equipment
Abstract

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios. [ABSTRACT FROM AUTHOR]

Published
2020
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206. Improvements to a Thermally Actuated MEMS Viscosity Sensor

Author

Choudhary, Shreyas

Subjects
Fluid viscosity, Measures viscosity, MEMS sensor, MEMS viscosity, Real time response, VISCOSITY SENSOR
Abstract

Being able to measure and monitor the viscosity of a fluid accurately and in real-time can provide insights and prevent field failures of lubricated mechanical elements. A micro electro mechanical system (MEMS) viscosity sensor that measures the properties of liquids through thermal vibrations of a silicon membrane has been previously developed. The device measures viscosity through three different characteristics: the frequency, amplitude and the quality factor of the vibrating membrane. The membrane is actuated via a short pulse of heat delivered by the heater resistor provided by an external voltage. The pulse width is controlled by a waveform generator and a power MOSFET. The movement of the membrane is measured with an in-situ piezoresistor Wheatstone bridge, which is powered by an external voltage source, and amplified with and instrumentational amplifier before the resulting vibrating signal is analyzed in LabView. The end goal of this work is to characterize the sensitivity and real-time response of a thermally actuated MEMS viscosity sensor. In addition, a process modification to include a deep reactive ion etch instead of a KOH etch, has been developed. As viscosity is dependent on temperature, when the membrane is actuated by heat, the effects of locally changing the fluid temperature will affect the sensitivity of the sensor. Optimized test bias condition results were, Wheatstone bridge bias voltage when increased over 7 V, the natural frequency of vibration of the sensor is modified. Pulse width and heater bias value can be adjusted for optimum sensor response. With these established bias conditions, the real-time response of the system was investigated. Epoxy was used to cover the sensor perimeter, protect the 25 - micron aluminum wire bond connections to a copper PCB and to glue the sensor onto the PCB. Test result show a spike in frequency and amplitude when different oils were added. As shown with additional tests, the spike is mainly caused by slight temperature variations that are introduced with new oil and how they affect the sensor packaging. Spikes were reduced by lowering the bridge bias voltage from 7 V to 3 V, which minimized the sensor heating. Furthermore, addition of oil in very small quantities, in the µL range, reduced the changes in temperature. Figure 1 shows frequency and amplitude response with varying viscosities without agitation. During testing, when oil is added, the amplitude shows an immediate overdamped response which takes about 1-2 minutes to stabilize, whereas frequency is characterized by an underdamped response with response time 5-7 minutes. Frequency response time was slower as it is very dependent on intrinsic stresses of both sensor and packaging, whereas amplitude of oscillations seems to be more independent to these properties changing and shows faster response.

Published
2019

207. Piezoelectrically excited MEMS sensor with integrated planar coil for the detection of ferrous particles in liquids.

Author

Patocka, Florian, Schlögl, Matthias, Schneidhofer, Christoph, Dörr, Nicole, Schneider, Michael, and Schmid, Ulrich

Subjects
*DEIONIZATION of water, *FERRIC oxide, *DETECTORS, *PARTICLES, *LIQUIDS, *SURFACE plasmon resonance, *MAGNETITE
Abstract

• A novel MEMS sensor for the detection of ferrous particles in liquids is presented. • The sensor consists of a microcantilever and a planar coil to accumulate the particles. • The accumulation of particles leads to a linear shift of the cantilever resonance frequency. • The sensor was capable of detecting 250 nm iron oxide particles in deionized water. • A special class of roof tile-shaped modes offers a mass responsivity of 82.5 pg/Hz. We present a novel MEMS sensor which allows the detection of ferrous particles in liquid environments. The device is based on a resonantly excited silicon microcantilever with an integrated planar coil on its surface, which attracts and accumulates ferrous particles on the sensor via magnetophoresis. The additional mass leads to a shift in resonance frequency of the microcantilever, which in turn can be used to deduce the accumulated particle mass. A reference microcantilever of the same design, which does not actively accumulate particles, is operated in close vicinity to cancel out any parasitic environmental influences, such as fluid temperature fluctuations on the viscosity. The sensor performance is determined by measuring the sensor response to 250 nm iron oxide (Fe 3 O 4) particles, dispersed in deionized water. After a measurement duration of 100 min., a differential resonance frequency shift of 5916 Hz is found, which corresponds to a total accumulated mass of approximately 0.49 μg and a mass responsivity of 82.85 pg/Hz. Based on this result, the detection limit for the sensor in the current design is derived to about 4 ng. Besides its compact and robust architecture, these results promise the successful operation in a broad range of industrial applications, such as predictive maintenance in lubricated machinery. [ABSTRACT FROM AUTHOR]

Published
2019
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208. In-flight alignment method of navigation system based on microelectromechanical systems sensor measurement.

Author

Liu, Jianwei and Zhao, Tao

Subjects
*MICROELECTROMECHANICAL systems, *INERTIAL navigation systems, *DETECTORS, *SATELLITE positioning, *NAVIGATION, *INFORMATION measurement
Abstract

Inertial navigation systems based on microelectromechanical systems (MEMS) sensors offer advantages that include small size, light weight, low power consumption, strong environmental adaptability, and low cost. These advantages make these sensors particularly suitable for application to precision-guided munitions, which commonly have poor launching environments, strict volume and power consumption requirements, and high cost sensitivity. In this article, the key technologies required for missile-borne integrated navigation systems and the solutions for the problems with each of these technologies are analyzed. An attitude angle estimation method for satellite-assisted MEMS measurement information is proposed that solves the in-flight alignment problem. A high-precision combination of satellite positioning and microinertial navigation is realized through design of a new integrated algorithm framework. The experimental results show that the proposed methods can effectively solve the current problems in guided ammunition navigation. [ABSTRACT FROM AUTHOR]

Published
2019
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209. Position determination using inertial system ADIS 16305

Author

Špikić, Dorijan and Vasić, Darko

Subjects
gyroscope, TEHNIČKE ZNANOSTI. Računarstvo, TEHNIČKE ZNANOSTI. Elektrotehnika, inercijski sustav, akcelerometar, integration, određivanje položaja, žiroskop, integracija, MEMS senzor, accelerometer, TECHNICAL SCIENCES. Electrical Engineering, TECHNICAL SCIENCES. Computing, inertial measurement system, ADIS 16305, MEMS sensor, position determination
Abstract

Sustav ADIS 16305 sastoji se od troosnog akcelerometra i jednoosnog žiroskopa što mu daje 4 stupnja slobode. Prijeđeni put se računa integracijom izmjerene akceleracije i kutne brzine tijela. Kut rotacije tijela računa se integriranjem kutne brzine oko osi rotacije. Integracijom podataka akumulira se pogreška u određivanju položaja. Algoritam detekcijom stanja mirovanja postavlja izračunatu brzinu u stvarnu brzinu koja je jednaka nuli, čime se brišu akumulirane greške. Zbog nedostatka mogućnosti mjerenja kutne brzine oko preostale dvije osi, mjerenja je moguće izvesti samo u dvodimenzionalnom prostoru. Za određivanje položaja u 3 dimenzije potreban je inercijski sustav s troosnim žiroskopom zbog mogućnosti određivanja orijentacije osi akcelerometra i kompenzacije mjerene akceleracije Zemljine sile teže. Za preciznije određivanje položaja inercijski sustav treba koristiti u kombinaciji s nekom drugom metodom određivanja položaja. ADIS 16305 is inertial measurement unit with 4 degrees of freedom with 3 axis accelerometer and 1 axis gyroscope. Position is determined by double integration of measured accelerometer data. Rotation angle is calculated by integrating angular velocity which is measured with gyroscope. Integration of data accumulates errors over time. Algorithm is based on detection of resting state. When resting state is detected calculated velocity is reset to zero which removes accumulated errors. Gyroscope measures angular velocity around one axis so we can't detect angle around X and Y axis. Because of that, measurements can be made only in two dimensional space. Position determination in three dimensional space requires three axial gyroscope so we can determine orientation of accelerometer axis and compensate acceleration of Earth's gravity. If we want to get more accurate results then we should use inertial measurement system in combination with other position determination methods.

Published
2015

211. Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications

Author

Ivana Jokić, Žarko Lazić, Miloš Frantlović, Srđan Stanković, Marko Obradov, Branko M. Vukelić, and Dana Vasiljević-Radović

Subjects
Microelectromechanical systems, Materials science, sensor correction, Pressure sensor, Temperature measurement, Signal, Piezoresistive effect, law.invention, Pressure measurement, Reliability (semiconductor), law, Electronic engineering, General Earth and Planetary Sciences, MEMS sensor, Sensitivity (control systems), temperature measurement, General Environmental Science
Abstract

Temperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ? 0.3?C can be achieved.

Published
2015

212. Ambient temperature carbon nanotube ammonia sensor on CMOS platform

Author

Julian W. Gardner, Sumita Santra, Prasanta Kumar Guha, Arun Kumar Sinha, Samit K. Ray, Syed Zeeshan Ali, and Florin Udrea

Subjects
TP, Resistive touchscreen, Materials science, TK, ammonia sensor, room temperature sensor, Nanotechnology, General Medicine, Substrate (electronics), Carbon nanotube, Ascorbic acid, law.invention, Ammonia, chemistry.chemical_compound, Single Wall Carbon nanotube, Chemical engineering, Distilled water, CMOS, chemistry, law, Aqua regia, SOI CMOS, MEMS sensor, Engineering(all)
Abstract

We report here the development of a resistive single wall carbon nanotubes (SWCNTs) sensor, based on a CMOS substrate that responds at ambient temperature to ppm levels of ammonia. The power efficient CMOS micro-hotplate is a thin membrane structure and comprises metal heater with an interdigitated electrode. The SWCNTs film was prepared first by treatment with aqua regia solution, followed by washing with distilled water, and then treated with ascorbic acid at 95°C. The film was deposited by simply dipping the chip into the solution. The SWCNTs showed good response to ammonia in a humid nitrogen atmosphere.

Published
2014

213. Threshold sensor for high-doses of radiation

Author

Augustyniak, Izabela, Knapkiewicz, Pawel, Dziuban, Jan, Olszacki, Michal, Tchkalov, A., Pons, Patrick, Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, National Center for Nuclear Research (NCBJ), National Technical University of Ukraine 'Kyiv Polytechnic Institute' [Kiev], Équipe MIcro et Nanosystèmes pour les Communications sans fil (LAAS-MINC), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
radiation sensor, modeling of silicon membrane, MEMS sensor, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Abstract

International audience; MEMS threshold sensor for high-doses of radiation (above 10 kGy) has been design and development. In the sensor, small portion of high density polyethylene (HDPE) is trapped inside silicon-glass MEMS hermetically sealed structure. When the sensor is exposed to ionizing radiation, HDPE degrades and releases atomic hydrogen. The resulting pressure of hydrogen destroys thin silicon membrane of the sensor. The proper parameters of the silicon membrane of the sensor have been selected by simulations in ANSYS software

Published
2014

215. Temperature measurement performance of silicon piezoresistive MEMS pressure sensors for industrial applications

Author

Frantlović, Miloš, Jokić, Ivana, Lazić, Žarko, Vukelić, Branko, Obradov, Marko, Vasiljević-Radović, Dana, Stanković, Srđan, Frantlović, Miloš, Jokić, Ivana, Lazić, Žarko, Vukelić, Branko, Obradov, Marko, Vasiljević-Radović, Dana, and Stanković, Srđan

Abstract

Temperature and pressure are the most common parameters to be measured and monitored not only in industrial processes but in many other fields from vehicles and healthcare to household appliances. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, offering high sensitivity, solid-state reliability and small dimensions at a low cost achieved by mass production. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance, necessitating the use of correction methods in a majority of cases. However, the same effect can be utilized for temperature measurement, thus enabling new sensor applications. In this paper we perform characterization of MEMS piezoresistive pressure sensors for temperature measurement, propose a sensor correction method, and demonstrate that the measurement error as low as ± 0.3 °C can be achieved.

Published
2015

216. Development Trends and Perspectives of Future Sensors and MEMS/NEMS.

Author

Zhu J, Liu X, Shi Q, He T, Sun Z, Guo X, Liu W, Sulaiman OB, Dong B, and Lee C

Abstract

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios., Competing Interests: The authors declare no conflict of interest.

Published
2019
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217. Analytical Model and Experimental Evaluation of the Micro-Scale Thermal Property Sensor for Single-Sided Measurement.

Author

Katayama, Takashi, Uesugi, Kaoru, and Morishima, Keisuke

Subjects
THERMAL properties, MICROELECTROMECHANICAL systems
Abstract

We report a new analytical model of the MEMS-based thermal property sensor for samples which are difficult to handle and susceptible to damage by thermal stimulus, such as living cells. Many sensor designs had been reported for thermal property measurements, but only a few of them have considered the analytical model of the single-sided measurement in which a measurement sample is placed on the sensor substrate. Even in the few designs that have considered the analytical model, their applicable limits are restricted to more than 1 mm length in practical situations. Our new model considers both the sample and the sensor substrate thermal properties and is applicable to a sensor length less than 1 µm. In order to minimize the influence of the heat stimulus to the sample, the model formulates the required heat dissipating time for different sensor geometries. We propose fast and precise detection circuit architecture to realize our model, and we discuss the sensor performance for a number of different designs. [ABSTRACT FROM AUTHOR]

Published
2018
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218. A MODULE FOR MOTION DETECTION USING AN ACCELEROMETER AND GYROSCOPES

Author

Smisl, Boštjan and Zazula, Damjan

Subjects
žiroskop, udc:004.45:004.9(043.2), mikrokrmilnik, gyroscope, accelerometer, microcontroller, motion detection, MEMS sensor, embedded systems, pospeškometer, MEMS-senzor, zaznavanje gibanja, vgrajeni sistemi
Abstract

V diplomski nalogi predstavimo nekaj senzorjev za zaznavanje gibanja. Na začetku opišemo osnovne principe delovanja pospeškometrov in žiroskopov s primeri delovanja in znanimi tipi izdelav. Nato zasnujemo in izdelamo vezje za zaznavanje gibanja s pospeškometrom opisane so komponente in definiran njihov pomen v vezju. Zatem sledi opis programskega okolja, v katerem smo programirali vgrajeni mikrokrmilnik v vezju. V zadnjem poglavju se osredotočimo na razlago, kako smo vezje kot celoto preizkušali in kako smo preizkušali posamezne komponente. In this diploma work we introduce some types of sensors for motion detection. At the beginning, we describe basic principles of the gyroscope and accelerometer construction and operation. Then we design and develop electronic circuits based on an accelerometer that detects movement. All basic components' characteristics are explained from their implementation viewpoint. Afterwards, we describe the programming interface that we used to program the microcontroller. In the last chapter, we focus on the circuit system testing, as well as the testing of single components.

Published
2009

219. Fabrication of an Implantable Micro-pressure Sensor to Measure Deviation Within the Cochlea

Author

Perez, Leonardo, Puers, Robert, Volckaerts, Bart, Perez, Leonardo, Puers, Robert, and Volckaerts, Bart

Abstract

The Cochlear Implant is broadly worn by people with deep hearing damage. This device makes up an electrode array to electrically stimulate the auditory nerves. When the electrode is implanted into the inner ear by surgery, the scala tympani is ill-treated due to the strong pressure applied on the internal ear structures. To minimize this intra-cochlear trauma, it is proposed to fabricate a micro pressure-sensor and built it in the electrode array, in such a way that the pressure applied by the electrode is measured. This work selected the MEMS SU-8 Fabry-Perot interferometer-based pressure sensor. This paper describes the sensor fabrication process carried out, and explains how to integrate this sensor with the electrode array., El implante coclear es ampliamente utilizado por personas con año auditivo profundo. Este dispositivo se compone de un conjunto de electrodos que estimulan eléctricamente los nervios auditivos. Cuando el electrodo es insertado quirúrgicamente en el oído interno, la escala timpani es maltratada debido a las considerables presiones aplicadas a las estructuras internas del oído. Esto ocasiona trauma, lo cual es indeseado. y es principalmente causado por el contacto del electrodo con las paredes de la cóclea. Para minimizar este trauma, se propone fabricar un MEMS sensor de presión para que sea integrado al conjunto de electrodos; permitiendo medir la presión aplicada al oído. Este trabajo ha seleccionado el SU8 MEMS sensor de presión basado en el efecto de interferencia óptica. Este artículo describe el proceso de fabricación del sensor y como se puede integrar al array de electrodos.

Published
2013

220. Experimental evidence of non-Amontons behaviour at a multicontact interface

Author

Julien Scheibert, Patrice Rey, Joel Frelat, Alexis Prevost, Georges Debrégeas, Laboratoire de Physique Statistique de l'ENS (LPS), Université Paris Diderot - Paris 7 (UPD7)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de modélisation en mécanique (LMM), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS-PSL), and Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Field (physics), Interface (computing), General Physics and Astronomy, FOS: Physical sciences, 02 engineering and technology, Physics - Classical Physics, Condensed Matter - Soft Condensed Matter, [SPI.MECA.SOLID]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Solid mechanics [physics.class-ph], Elastomer, Normal load, Dry contact, Multicontact interface, 0203 mechanical engineering, [PHYS.MECA.SOLID]Physics [physics]/Mechanics [physics]/Solid mechanics [physics.class-ph], MEMS sensor, Boundary value problem, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Amontons' friction law, Classical Physics (physics.class-ph), Mechanics, 021001 nanoscience & nanotechnology, Finite element method, PACS 46.55.+d, 81.40.Pq, 85.85.+j, Contact mechanics, 020303 mechanical engineering & transports, Soft Condensed Matter (cond-mat.soft), Finite Elements Method, 0210 nano-technology, [PHYS.COND.CM-SCM]Physics [physics]/Condensed Matter [cond-mat]/Soft Condensed Matter [cond-mat.soft]
Abstract

International audience; We report on normal stress field measurements at the multicontact interface between a rough elastomeric film and a smooth glass sphere under normal load, using an original MEMS-based stress sensing device. These measurements are compared to Finite Elements Method calculations with boundary conditions obeying locally Amontons' rigid-plastic-like friction law with a uniform friction coefficient. In dry contact conditions, significant deviations are observed which decrease with increasing load. In lubricated conditions, the measured profile recovers almost perfectly the predicted profile. These results are interpreted as a consequence of the finite compliance of the multicontact interface, a mechanism which is not taken into account in Amontons' law.

Published
2008
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221. A low-power high dynamic-range sigma-delta modulator for a capacitive microphone sensor

Author

Andrea Baschirotto, Syed Arsalan Jawed, Massimo Gottardi, Jawed, S, Gottardi, M, and Baschirotto, A

Subjects
microphone, Engineering, Microphone, Capacitive sensing, Delta-sigma modulation, law.invention, third-order SigmaDelta modulator, microsensor, law, Low-power electronics, Electronic engineering, MEMS sensor, low-power high dynamic-range sigma-delta modulator, low-power electronic, sigma-delta modulation, High dynamic range, operational amplifier, business.industry, Dynamic range, opamp time-multiplexed topology, capacitive sensor, Electrical engineering, silicon, voltage 1.8 V, circuit noise, capacitive microphone sensor, silicon microphone front-end, Integrator, power 90 muW, third-order noise transfer-function, transfer functions, Operational amplifier, business
Abstract

An opamp time-multiplexed topology of a third- order SigmaDelta modulator is presented in this paper. This topology implements a third-order noise transfer-function using only two opamps by sharing one opamp between second and the third integrators of the modulator. The simulated results are comparable to a low-power modulator with three separate opamps. The proposed SigmaDelta modulator is designed for a silicon microphone front-end. In the audio-band (20-20 kHz), it features a dynamic range above 80 dB, consuming 90 muWatts with a supply voltage of 1.8 V.

Published
2007
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222. Contact mechanics at mesoscopic length scales

Author

Scheibert, Julien, Laboratoire de Physique Statistique de l'ENS (LPS), Université Paris Diderot - Paris 7 (UPD7)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS), Université Pierre et Marie Curie - Paris VI, Didier Chatenay, Scheibert, Julien, Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS), École normale supérieure - Paris (ENS-PSL), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS-PSL), and Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Interface multi-contacts, glass friction, Frottement élastomère, Photolithographie douce, Elastomer, Imagerie de contact, Tactile perception, [SPI.MECA]Engineering Sciences [physics]/Mechanics [physics.med-ph], [SPI.MECA] Engineering Sciences [physics]/Mechanics [physics.med-ph], Soft photolithography, Contact imaging, verre, MEMS sensor, Multi-contact interface, Capteur MEMS, [PHYS.PHYS.PHYS-DATA-AN] Physics [physics]/Physics [physics]/Data Analysis, Statistics and Probability [physics.data-an], Perception tactile, [PHYS.PHYS.PHYS-DATA-AN]Physics [physics]/Physics [physics]/Data Analysis, Statistics and Probability [physics.data-an]
Abstract

Two experimental methods have been developed to measure, for an elastomer / glass multi-contact interface, the mechanical fields inside the volume (MEMS force micro-sensor embedded under the elastic film) and at the interface (transmitted light contact imaging), at length scales intermediate between the apparent contact one and the micro-contacts one.The MEMS measurement has allowed us to obtain the stress fields under normal load and in steady sliding regime, with a very good agreement with simple mechanical models. For periodically rough substrates the relation between the stress spectrum and the surface topography has been interpreted in terms of spectral filtering, relevant to understanding tactile perception.The optical measurement has allowed us, by analysing the spatial distribution of the intensity, to obtain the interfacial pressure field. Its dependence with the rough layer properties has been confronted to the Greenwood-Tripp model. By tracking the asperities, the displacement field has been measured with a sub-micronic resolution and has shown the coexistence of slipping and sticking zones predicted by Cattaneo and Mindlin., Deux méthodes expérimentales ont été développées pour mesurer, pour une interface multi-contacts élastomère / verre, les champs mécaniques en volume (micro-capteur de force MEMS noyé sous le film élastique) et à l'interface (imagerie de contact par transmission), résolus spatialement à une échelle intermédiaire entre celle du contact apparent et celle des micro-contacts.La mesure MEMS a permis d'obtenir les champs de contrainte sous charge normale et en glissement stationnaire, en très bon accord avec des modèles mécaniques simples. Pour des substrats de rugosité périodique le lien entre spectre des contraintes et topographie de surface a pu être interprété en termes de filtrage spectral, pertinent pour comprendre la perception tactile.La mesure optique a permis, en analysant la répartition spatiale de l'intensité, d'obtenir le champ de pression de surface. Sa dépendance avec les propriétés de la couche rugueuse a été confrontée au modèle de Greenwood-Tripp. Par suivi des aspérités, le champ de déplacement a été mesuré avec une résolution sub-micronique et a mis en évidence la coexistence de zones glissantes et adhérentes prédite par Cattaneo et Mindlin.

Published
2007

223. MEMS Sensor for in Situ TEM Atomic Force Microscopy

Author

Nafari, Alexandra, Karlen, David, Rusu, Cristina, Svensson, Krister, Olin, Håkan, Enoksson, Peter, Nafari, Alexandra, Karlen, David, Rusu, Cristina, Svensson, Krister, Olin, Håkan, and Enoksson, Peter

Abstract

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.

Published
2008
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224. A low-power high dynamic-range Sigma-Delta modulator for a capacitive microphone sensor

Author

Jawed, S, Gottardi, M, Baschirotto, A, BASCHIROTTO, ANDREA, Jawed, S, Gottardi, M, Baschirotto, A, and BASCHIROTTO, ANDREA

Abstract

An opamp time-multiplexed topology of a third- order SigmaDelta modulator is presented in this paper. This topology implements a third-order noise transfer-function using only two opamps by sharing one opamp between second and the third integrators of the modulator. The simulated results are comparable to a low-power modulator with three separate opamps. The proposed SigmaDelta modulator is designed for a silicon microphone front-end. In the audio-band (20-20 kHz), it features a dynamic range above 80 dB, consuming 90 muWatts with a supply voltage of 1.8 V.

Published
2007

225. Development of vibration measuring equipment using high accurate inclimeter sensor

Author

Nishikawa, Hayato, Takatani, Tomiya, Tsuri, Takeyoshi, and Miyajima, Masakatsu

Subjects
Inclinometer, Wooden house, Mems sensor, Natural frequency
Abstract

We develop vibration measuring equipment using high accurate inclimeter sensor that was not used in the past studies related to MEMS sensor. Since high accurate inclimeter sensor has higher resolution and lower self-noises than general MEMS sensors, it is able to measure slighter vibration than the MEMS sensors. In order to examine performance of the equipment developed in this study, vibration characteristics of wooden house is investigated by measurement by using the equipment and servo type accelerometer. Natural frequencies of Fourier spectra of acceleration waves measured by this equipment are mostly corresponded to that measured by the servo type accelerometer. Moreover, natural frequencies of transfer function evaluated by servo type accelerometer are close to those of Fourier spectra., 本研究では，これまでのMEMSセンサに関する研究で用いられていない高精度傾斜センサによる振動測定装置を試作した．高精度傾斜センサは一般的なMEMSセンサと比べて分解能が高く，自己ノイズも小さいため，従来よりも小さな振動を測定することができる． 試作した振動測定装置の性能を調べるためにサーボ型加速度計とともに，木造建物の常時微動を測定し，加速度フーリエスペクトルから建物の振動特性を評価した．これらの装置の計測波形から求めたフーリエスペクトルの固有振動数は概ね一致した．また，サーボ型加速度計で評価した伝達関数の固有振動数はフーリエスペクトルの固有振動数と近い値となった．

Published
2015

226. Flexible Microsensors based on polysilicon thin film for Monitoring Traumatic Brain Injury (TBI)

Author

Wu, Zhizhen

Subjects
Electrical Engineering, Intracranial pressure, Intracranial temperature, flexible sensor, polysilicon thin film, sensor array, MEMS sensor
Abstract

Pressure and temperature are parameters essential for brain monitoring. Currently, the intracranial pressure (ICP) and intracranial temperature (ICT) are measured by the separate sensors/catheters in clinic. Although integrated ICP and ICT sensors with low cost and minimal damage to brain is highly favored, the integration of the sensors involves complicate assembly and packaging process, and also increases the diameter of micro-catheters. Researches have been done to develop integrated pressure and temperature sensors on the same platform, especially on flexible substrate, to minimize the damage to brain caused by the device implantation. However, the developed sensors are either merely prove-of-concept or difficult to be manufactured due to the complicate and costly process. This work proposes and explores novel approaches to develop the integrated flexible ICP and ICT sensors with low cost and simple process. High quality polysilicon thin film was directly grown on flexible substrate as the sensing material for both ICP and ICT sensors with simple, fast, and low cost aluminum induced crystallization (AIC) process. A continuous P-type polysilicon film with the crystals’ average size of 49 nm was developed and shown. Based on the polysilicon thin film, a flexible thermistor array was designed, developed and characterized. It achieved good in vitro performance with a sensitivity of -0.0031/°C, response time of 1.5 s, resolution of 0.1 °C, thermal hysteresis less than 0.1°C, and long term stability with drift less than 0.3 °C for 3 days in water. In vivo tests of the polysilicon thermistor showed a low noise level of 0.025±0.03 °C and the expected transient temperature increase associated with cortical spreading depolarization. In addition, polysilicon based flexible pressure sensor was developed for ICP measurement. The gauge factor of polysilicon thin film was characterized with a value of 10.316. The dimensions of the flexible piezoresistive pressure sensor were designed with COMSOL multiphysics simulation to achieve high sensitivity and linearity. The developed flexible pressure sensor showed a sensitivity of 6 × 10-4 / mmHg, resolution of 1 mmHg, and hysteresis of less than 1 mmHg for the pressure range of 10 to 20 mmHg, which totally met the requirements of ICP monitoring. Finally, a 1 × 4 integrated flexible pressure and temperature sensor array was developed and characterized for monitoring the temperature and possible pressure vectors in brain. The real-time measurements of pressure and temperature were performed in an immolated brain model for monitoring any pressure vectors or gradients. The preliminary experiment results showed that the developed sensor array had high enough sensitivity to detect the pressure differences or gradients in brain if any. In conclusion, this work has proposed and developed innovative polysilicon-based flexible temperature and pressure sensors for ICP and ICT monitoring. The development of polysilicon thin film on flexible polyimide with simple, low cost and high yield has been shown. The polysilicon-based temperature and pressure sensors have meet requirements the ICP and ICT monitoring with high sensitivity, high resolution, fast response, and low hysteresis, and can be very beneficial to brain monitoring.

Published
2017

227. Fabrication of an Implantable Micro-pressure Sensor to Measure Deviation Within the Cochlea

Author

Leonardo Perez, Robert Puers, and Bart Volckaerts

Subjects
Economics and Econometrics, Materials science, medicine.medical_treatment, Acoustics, material SU8, Auditory nerves, lcsh:Technology, sensores MEMS, Cochlear implant, otorhinolaryngologic diseases, MEMS sensor, SU8 material, Intra-cochlear trauma, Materials Chemistry, Media Technology, medicine, Electrode array, implante coclear, trauma Intra - coclear, Inner ear, Microelectromechanical systems, lcsh:T, Forestry, Mems sensors, Pressure sensor, medicine.anatomical_structure, lcsh:TA1-2040, Electrode, sense organs, lcsh:Engineering (General). Civil engineering (General), Biomedical engineering
Abstract

The Cochlear Implant is broadly worn by people with deep hearing damage. This device makes up an electrode array to electrically stimulate the auditory nerves. When the electrode is implanted into the inner ear by surgery, the scala tympani is ill-treated due to the strong pressure applied on the internal ear structures. To minimize this intra-cochlear trauma, it is proposed to fabricate a micro pressure-sensor and built it in the electrode array, in such a way that the pressure applied by the electrode is measured. This work selected the MEMS SU-8 Fabry-Perot interferometer-based pressure sensor. This paper describes the sensor fabrication process carried out, and explains how to integrate this sensor with the electrode array. El implante coclear es ampliamente utilizado por personas con año auditivo profundo. Este dispositivo se compone de un conjunto de electrodos que estimulan eléctricamente los nervios auditivos. Cuando el electrodo es insertado quirúrgicamente en el oído interno, la escala timpani es maltratada debido a las considerables presiones aplicadas a las estructuras internas del oído. Esto ocasiona trauma, lo cual es indeseado. y es principalmente causado por el contacto del electrodo con las paredes de la cóclea. Para minimizar este trauma, se propone fabricar un MEMS sensor de presión para que sea integrado al conjunto de electrodos; permitiendo medir la presión aplicada al oído. Este trabajo ha seleccionado el SU8 MEMS sensor de presión basado en el efecto de interferencia óptica. Este artículo describe el proceso de fabricación del sensor y como se puede integrar al array de electrodos.

Published
2013
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228. Wireless Sensor Platform for Pulse Oximetry

Author

Aithal, Anusha

Subjects
MEMS sensor, Pulse oximetry, Wireless platform
Abstract

Pulse rate and oxygen saturation are two important clinical measurements that indicate the state of a person’s essential body functions. Oxygen saturation is the measurement of oxygenated hemoglobin in arterial blood i.e. it indicates the level of oxygen in the blood. Pulse oximeters, consisting of LEDs and photodetectors, offer a simple and low cost means of monitoring both pulse rate and blood oxygen saturation non-invasively. The primary objective of this project was to develop a wireless platform for MEMS devices. For this project, a pulse oximeter was also developed as a demonstration vehicle for this wireless platform. A microcontroller and a Bluetooth module was used to transmit the data from the sensor to the smartphone and an Android program was developed as a part of the project to connect with the Bluetooth module and receive, plot and save the data. Once the sensor and Android application were developed, the pulse rate and oxygen saturation measurements were compared to measurements taken by a commercial pulse oximeter to determine the accuracy of the device. The sensor was able to accurately measure with an average error percentage of ±2.86% and ±1.08% for pulse rate and oxygen saturation respectively.

Published
2015

229. MEMS magnetometr s mikrokontrolérem

Author

Bradáč, Zdeněk, Šír, Michal, Haring, Filip, Bradáč, Zdeněk, Šír, Michal, and Haring, Filip

Abstract

Táto práca sa zaoberá návrhom a realizáciou meracieho systému, ktorý je určený na meranie veľkosti magnetických polí. Namerané veličiny sa následne zobrazujú na grafickom LCD displeji a odosielajú do PC. Práca rieši softwarovú a hardwarovú realizáciu meracieho systému., This project deals with design and implementation of measurement system, which is used for magnetic fields measurement. Measured values are displayed on graphic LCD and sent to PC. The project solves software and hardware implementation of measurement system.

230. Použití mikročipových MEMS senzorů v praxi

Author

Zuth, Daniel, Vojáček, Zdeněk, Rumian, Dominik, Zuth, Daniel, Vojáček, Zdeněk, and Rumian, Dominik

Abstract

Tato bakalářská práce se zaměřuje na MEMS senzory a jejich využití v praxi. První část práce se věnuje historii, současnému využití, principu fungování a porovnání jednotlivých druhů MEMS senzorů. Druhá část se věnuje popisu mikrokontroléru, jeho stavbě a možnostech využití. Ve třetí části jsou popsány externí sériové sběrnice, které slouží k propojení mikrokontroléru s přídavným hardwarem jako například digitální senzor. V poslední části této práce je popsán vybraný mikrokontrolér, senzory a ukázka jejich fungování., This bachelor thesis is focused on MEMS sensors and their use in practice. The first part focuses on history, utilization at present, the principle of operation and comparison of the individual types of MEMS sensors. The second part focuses on description of microcontroller, its structure and possibilities of its use. In the third part there are described external serial buses, which serve as connection of microcontroller and other hardware e.g. digital sensor. In the last part of this thesis there is described chosen microcontroller, sensors and demonstration of their functionality.

231. MEMS magnetometr s mikrokontrolérem

Author

Bradáč, Zdeněk, Šír, Michal, Haring, Filip, Bradáč, Zdeněk, Šír, Michal, and Haring, Filip

Abstract

Táto práca sa zaoberá návrhom a realizáciou meracieho systému, ktorý je určený na meranie veľkosti magnetických polí. Namerané veličiny sa následne zobrazujú na grafickom LCD displeji a odosielajú do PC. Práca rieši softwarovú a hardwarovú realizáciu meracieho systému., This project deals with design and implementation of measurement system, which is used for magnetic fields measurement. Measured values are displayed on graphic LCD and sent to PC. The project solves software and hardware implementation of measurement system.

232. Použití mikročipových MEMS senzorů v praxi

Author

Zuth, Daniel, Vojáček, Zdeněk, Rumian, Dominik, Zuth, Daniel, Vojáček, Zdeněk, and Rumian, Dominik

Abstract

Tato bakalářská práce se zaměřuje na MEMS senzory a jejich využití v praxi. První část práce se věnuje historii, současnému využití, principu fungování a porovnání jednotlivých druhů MEMS senzorů. Druhá část se věnuje popisu mikrokontroléru, jeho stavbě a možnostech využití. Ve třetí části jsou popsány externí sériové sběrnice, které slouží k propojení mikrokontroléru s přídavným hardwarem jako například digitální senzor. V poslední části této práce je popsán vybraný mikrokontrolér, senzory a ukázka jejich fungování., This bachelor thesis is focused on MEMS sensors and their use in practice. The first part focuses on history, utilization at present, the principle of operation and comparison of the individual types of MEMS sensors. The second part focuses on description of microcontroller, its structure and possibilities of its use. In the third part there are described external serial buses, which serve as connection of microcontroller and other hardware e.g. digital sensor. In the last part of this thesis there is described chosen microcontroller, sensors and demonstration of their functionality.

233. MEMS magnetometr s mikrokontrolérem

Author

Bradáč, Zdeněk, Šír, Michal, Bradáč, Zdeněk, and Šír, Michal

Abstract

Táto práca sa zaoberá návrhom a realizáciou meracieho systému, ktorý je určený na meranie veľkosti magnetických polí. Namerané veličiny sa následne zobrazujú na grafickom LCD displeji a odosielajú do PC. Práca rieši softwarovú a hardwarovú realizáciu meracieho systému., This project deals with design and implementation of measurement system, which is used for magnetic fields measurement. Measured values are displayed on graphic LCD and sent to PC. The project solves software and hardware implementation of measurement system.

234. Použití mikročipových MEMS senzorů v praxi

Author

Zuth, Daniel, Vojáček, Zdeněk, Zuth, Daniel, and Vojáček, Zdeněk

Abstract

Tato bakalářská práce se zaměřuje na MEMS senzory a jejich využití v praxi. První část práce se věnuje historii, současnému využití, principu fungování a porovnání jednotlivých druhů MEMS senzorů. Druhá část se věnuje popisu mikrokontroléru, jeho stavbě a možnostech využití. Ve třetí části jsou popsány externí sériové sběrnice, které slouží k propojení mikrokontroléru s přídavným hardwarem jako například digitální senzor. V poslední části této práce je popsán vybraný mikrokontrolér, senzory a ukázka jejich fungování., This bachelor thesis is focused on MEMS sensors and their use in practice. The first part focuses on history, utilization at present, the principle of operation and comparison of the individual types of MEMS sensors. The second part focuses on description of microcontroller, its structure and possibilities of its use. In the third part there are described external serial buses, which serve as connection of microcontroller and other hardware e.g. digital sensor. In the last part of this thesis there is described chosen microcontroller, sensors and demonstration of their functionality.

235. Použití mikročipových MEMS senzorů v praxi

Author

Zuth, Daniel, Vojáček, Zdeněk, Zuth, Daniel, and Vojáček, Zdeněk

Abstract

Tato bakalářská práce se zaměřuje na MEMS senzory a jejich využití v praxi. První část práce se věnuje historii, současnému využití, principu fungování a porovnání jednotlivých druhů MEMS senzorů. Druhá část se věnuje popisu mikrokontroléru, jeho stavbě a možnostech využití. Ve třetí části jsou popsány externí sériové sběrnice, které slouží k propojení mikrokontroléru s přídavným hardwarem jako například digitální senzor. V poslední části této práce je popsán vybraný mikrokontrolér, senzory a ukázka jejich fungování., This bachelor thesis is focused on MEMS sensors and their use in practice. The first part focuses on history, utilization at present, the principle of operation and comparison of the individual types of MEMS sensors. The second part focuses on description of microcontroller, its structure and possibilities of its use. In the third part there are described external serial buses, which serve as connection of microcontroller and other hardware e.g. digital sensor. In the last part of this thesis there is described chosen microcontroller, sensors and demonstration of their functionality.

236. MEMS magnetometr s mikrokontrolérem

Author

Bradáč, Zdeněk, Šír, Michal, Bradáč, Zdeněk, and Šír, Michal

Abstract

Táto práca sa zaoberá návrhom a realizáciou meracieho systému, ktorý je určený na meranie veľkosti magnetických polí. Namerané veličiny sa následne zobrazujú na grafickom LCD displeji a odosielajú do PC. Práca rieši softwarovú a hardwarovú realizáciu meracieho systému., This project deals with design and implementation of measurement system, which is used for magnetic fields measurement. Measured values are displayed on graphic LCD and sent to PC. The project solves software and hardware implementation of measurement system.

237. MEMS magnetometr s mikrokontrolérem

Author

Bradáč, Zdeněk, Šír, Michal, Bradáč, Zdeněk, and Šír, Michal

Abstract

Táto práca sa zaoberá návrhom a realizáciou meracieho systému, ktorý je určený na meranie veľkosti magnetických polí. Namerané veličiny sa následne zobrazujú na grafickom LCD displeji a odosielajú do PC. Práca rieši softwarovú a hardwarovú realizáciu meracieho systému., This project deals with design and implementation of measurement system, which is used for magnetic fields measurement. Measured values are displayed on graphic LCD and sent to PC. The project solves software and hardware implementation of measurement system.

238. MEMS magnetometr s mikrokontrolérem

Author

Bradáč, Zdeněk, Šír, Michal, Bradáč, Zdeněk, and Šír, Michal

Abstract

Táto práca sa zaoberá návrhom a realizáciou meracieho systému, ktorý je určený na meranie veľkosti magnetických polí. Namerané veličiny sa následne zobrazujú na grafickom LCD displeji a odosielajú do PC. Práca rieši softwarovú a hardwarovú realizáciu meracieho systému., This project deals with design and implementation of measurement system, which is used for magnetic fields measurement. Measured values are displayed on graphic LCD and sent to PC. The project solves software and hardware implementation of measurement system.

239. Použití mikročipových MEMS senzorů v praxi

Author

Zuth, Daniel, Vojáček, Zdeněk, Zuth, Daniel, and Vojáček, Zdeněk

Abstract

Tato bakalářská práce se zaměřuje na MEMS senzory a jejich využití v praxi. První část práce se věnuje historii, současnému využití, principu fungování a porovnání jednotlivých druhů MEMS senzorů. Druhá část se věnuje popisu mikrokontroléru, jeho stavbě a možnostech využití. Ve třetí části jsou popsány externí sériové sběrnice, které slouží k propojení mikrokontroléru s přídavným hardwarem jako například digitální senzor. V poslední části této práce je popsán vybraný mikrokontrolér, senzory a ukázka jejich fungování., This bachelor thesis is focused on MEMS sensors and their use in practice. The first part focuses on history, utilization at present, the principle of operation and comparison of the individual types of MEMS sensors. The second part focuses on description of microcontroller, its structure and possibilities of its use. In the third part there are described external serial buses, which serve as connection of microcontroller and other hardware e.g. digital sensor. In the last part of this thesis there is described chosen microcontroller, sensors and demonstration of their functionality.

240. SMALL, ROTOR POWERED, UNMANNED AERIAL VEHICLE DIRECTION OF ARRIVAL DETERMINATION USING BIO-INSPIRED MICROELECTROMECHANICAL SENSORS

Author

Durante Pereira Alves, Fabio D., Karunasiri, Gamani, Physics, Hatch, David J., Durante Pereira Alves, Fabio D., Karunasiri, Gamani, Physics, and Hatch, David J.

Abstract

Includes Supplementary Material, Previous research developed a bio-inspired microelectromechanical system (MEMS) acoustic sensor, based on the hearing organ of the parasitic fly Ormia ochracea. It was previously demonstrated that the direction of a small, rotor powered, unmanned aerial vehicle (UAV) can be estimated using this acoustic sensor. Building on this previous work, the objective of this study was to develop a method to unambiguously determine the direction of arrival of the sound of small UAVs using an array of collocated MEMS sensors. This task was performed under the premise that the directional response of the sensors in the array could be modified to exhibit an asymmetric dipole pattern or a cardioid pattern. The proposed DOA estimation method, using comparison across normalized calibration curves, was analyzed across several different conditions. Promising results were obtained, where the best accuracy was found for the array with a cardioid directional pattern. Error was as low as one degree across a 360° azimuth range for signal-to-noise ratios of 20 dB and higher for a small hexacopter UAV. The developed method can be applied to determine the direction of arrival of potentially any acoustic source detectable by the MEMS sensors., Lieutenant Commander, United States Navy, Approved for public release; distribution is unlimited.

241. MEMS magnetometr s mikrokontrolérem

Author

Bradáč, Zdeněk, Šír, Michal, Haring, Filip, Bradáč, Zdeněk, Šír, Michal, and Haring, Filip

Abstract

Táto práca sa zaoberá návrhom a realizáciou meracieho systému, ktorý je určený na meranie veľkosti magnetických polí. Namerané veličiny sa následne zobrazujú na grafickom LCD displeji a odosielajú do PC. Práca rieši softwarovú a hardwarovú realizáciu meracieho systému., This project deals with design and implementation of measurement system, which is used for magnetic fields measurement. Measured values are displayed on graphic LCD and sent to PC. The project solves software and hardware implementation of measurement system.

242. Použití mikročipových MEMS senzorů v praxi

Author

Zuth, Daniel, Vojáček, Zdeněk, Rumian, Dominik, Zuth, Daniel, Vojáček, Zdeněk, and Rumian, Dominik

Abstract

Tato bakalářská práce se zaměřuje na MEMS senzory a jejich využití v praxi. První část práce se věnuje historii, současnému využití, principu fungování a porovnání jednotlivých druhů MEMS senzorů. Druhá část se věnuje popisu mikrokontroléru, jeho stavbě a možnostech využití. Ve třetí části jsou popsány externí sériové sběrnice, které slouží k propojení mikrokontroléru s přídavným hardwarem jako například digitální senzor. V poslední části této práce je popsán vybraný mikrokontrolér, senzory a ukázka jejich fungování., This bachelor thesis is focused on MEMS sensors and their use in practice. The first part focuses on history, utilization at present, the principle of operation and comparison of the individual types of MEMS sensors. The second part focuses on description of microcontroller, its structure and possibilities of its use. In the third part there are described external serial buses, which serve as connection of microcontroller and other hardware e.g. digital sensor. In the last part of this thesis there is described chosen microcontroller, sensors and demonstration of their functionality.

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