201. Radio-frequency planar integrated inductor with Permalloy-Si[O.sub.2] granular films
- Author
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Zhao, Jiahao, Zhu, Jing, Chen, Zhongmin, and Liu, Zewen
- Subjects
Inductors -- Research ,Dielectric films -- Research ,Thin films -- Research ,Circuit components -- Magnetic properties ,Circuit components -- Comparative analysis ,Semiconductor device ,Business ,Electronics ,Electronics and electrical industries - Abstract
We have designed and fabricated a radio-frequency (RF) planar integrated inductor using Permalloy-Si[O.sub.2] granular film as the magnetic core. By controlling the composition and microstructure, we produced a granular film with excellent soft magnetic properties and high electrical resistivity. The inductance L of the inductor with granular Permalloy-Si[O.sub.2] magnetic film increased 6% to 15%, compared to that of an air-core inductor, and the quality factor Q value was high, approaching 10 in the frequency range of 2-3 GHz. The controllable anisotropy of the granular film generated in deposition process gives the magnetic inductor a very high self-resonance frequency peak--over 6 GHz. Index Terms--Magnetic thin film devices, soft magnetic materials, thin film inductors.
- Published
- 2005