151. Enhanced frequency stability in a non-linear MEMS oscillator employing phase feedback
- Author
-
Xudong Zou, Sijun Du, Ashwin A. Seshia, Boqian Sun, Fengtian Han, Chun Zhao, and Guillermo Sobreviela-Falces
- Subjects
Materials science ,Oscillator phase noise ,010401 analytical chemistry ,Frequency drift ,02 engineering and technology ,Variable-frequency oscillator ,021001 nanoscience & nanotechnology ,01 natural sciences ,Computer Science::Other ,0104 chemical sciences ,Phase-locked loop ,Voltage-controlled oscillator ,Phase-shift oscillator ,Control theory ,Phase noise ,0210 nano-technology ,Linear phase - Abstract
Microelectromechanical system (MEMS) oscillators are conventionally designed so that the resonator is operated within the linear regime. This paper investigates an optimal low noise point for a nonlinear MEMS oscillator where phase noise to frequency noise conversion is minimized. A closed loop oscillator consisting of a digitally controlled phase shifter is implemented and measurements of frequency stability are conducted under varying phase feedback conditions. The measured results show that for a specific value of feedback phase, the oscillation frequency is independent of phase fluctuations. Enhanced frequency stability is achieved when the MEMS resonator is biased at the optimal phase feedback condition in the non-linear regime.
- Published
- 2017