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Your search keyword '"Suyama, Shiro"' showing total 178 results
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178 results on '"Suyama, Shiro"'

168. Low-Temperature Formation of Gate-Si02 Films for Poly-Si TFTs by 02-Ar Sputtering.

Author

Suyama, Shiro, Okamoto, Akio, Shirai, Seiiti, and Serikawa, Tadashi

Subjects
*OXYGEN, *ARGON, *SPUTTERING (Physics), *LOW temperatures, *COLLISIONS (Nuclear physics)
Abstract

High-quality gate-oxide films for poly-Si TFTs are obtained successfully by oxygen-argon sputter deposition at low temperature (200°C). Si02 films deposited in an oxygen-argon mixture on poly-Si have higher resistivities and breakdown fields than those deposited only in argon and thermal oxides grown on poly-Si, resulting in the same film characteristics as thermal oxides grown on single-Si. Moreover, poly-Si TFF mobilities are improved considerably by mixing oxygen, resulting in very high mobility of 383 cm²/V s. This high mobility is caused by reduction in Si02/Si interface states and in barrier heights at the poly-Si grain boundaries in addition to the improvement of poly-Si films. These characteristic improvements result from migration enhancement of sputtering particles on film surface and the reduction of plasma damage by oxygen mixture. These results confirm the usefulness of gateoxide films sputter-deposited in an oxygen-argon mixture for low-temperature fabrication of high-quality poly-Si TFTs. [ABSTRACT FROM AUTHOR]

Published
1993
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177. A new volumetric 3D display using multi-varifocal lens and high-speed 2D display

Author

Sonoda, Takanori, Yamamoto, Hirotsugu, and Suyama, Shiro

Abstract

We have developed a new volumetric 3-D display using the multi-varifocal lens and high-speed 2-D display. Floating clear 3-D image in space can be successfully obtained. Our volumetric 3-D image is composed of many 2-D layered images by using multi-varifocal lens. Many 2-D images can be layered by changing their depth position using the discrete focal length change of multi-varifocal lens. The high-speed multi-varifocal lens is composed of several sets of a birefringent lens and a polarization switching device. The total lens power is the sum of the lens powers of these sets. The number of lens sets, N, can yield 2Nvariations of total focal lengths. In order to re-position many 2-D images within afterimage time, high-speed 2-D display is newly constructed by compact projector array using LED light sources. These projector images are projected to the same position of one screen. By switching these projectors quickly, 2-D images on the screen can be displayed at high-speed. This high-speed 2-D display can successfully provide bright and clear 2-D layered images by using point light sources of LED.

Published
2011
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178. Reduction of converging distance change in an aquatic display formed with aerial imaging by retro-reflection in conjugated optical structure.

Author

Kudo D, Yasugi M, Ninomiya N, Suyama S, and Yamamoto H

Abstract

This paper proposes an optical system for aquatic display that shows an image in water. The aquatic image is formed by utilizing aerial imaging by retro-reflection, which converges light by a retro-reflector and a beam splitter. Refraction on intersection between air and another material causes spherical aberration, which changes light-converging distance. In order to reduce the converging distance change, the light-source component is filled with water so that the optical system becomes conjugate including the medium. We analyzed converging of light in water by simulations. Furthermore, we have confirmed effectiveness of conjugated optical structure experimentally by use of a prototype.

Published
2023
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