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Objective This study reports the results of treating floor-of-mouth cancer with five different treatment modalities with long-term follow-up. Study Design Retrospective study of 280 patients with floor-of-mouth cancer treated in the Department of Otolaryngology—Head and Neck Surgery at Washington University Medical School (St. Louis, MO) from 1960 to 1994. Methods Patients with biopsy-proven squamous cell carcinoma of the floor of mouth who were previously untreated were treated with curative intent by one of five modalities and were all eligible for 5-year follow-up. The treatment modalities included local resection alone, composite resection alone (with neck dissection), radiation therapy alone, local resection with radiation therapy, and composite resection with radiation therapy. Multiple diagnostic, treatment, and follow-up parameters were studied using standard statistical analysis to determine statistical significance. Results The overall 5-year disease-specific survival (DSS) was 56% with death due to tumor in 44% of patients. The 5-year cumulative disease-specific survival (CDSS) was 0.61 (Kaplan-Meier probability) with a mean of 8.3 years and a median of 9.7 years. The DSS by treatment modality included local resection (76%), composite resection (63%), radiation therapy (43%), local resection with radiation therapy (61%), and composite resection with radiation therapy (55%). Overall, there was no significant difference in DSS by treatment modality. Recurrence at the primary site (41%) was the most common site of treatment failure. Nineteen percent of patients had recurrence in the neck. Eighty-eight percent of initial recurrences occurred within 60 months after the onset of treatment. Metastasis to a distant site occurred in 30% of patients. Twenty percent of these patients had second primary cancers, and 53% of these patients died of their second primary cancers. Conclusions Significantly improved 5-year DSS was seen in the patients with clear margins, early clinical tumor stage, and negative nodes. Significantly decreased 5-year survival was seen in the patients with involved margins, advanced clinical tumor stage, positive nodes, and tumor recurrence. Patients with no clinically positive nodes (cN0) can be observed safely for regional nodal disease and subsequent positive nodes can be treated as they occur with no adverse affect on survival. Because of high recurrence rates at the primary site and neck, and an increased rate of both distant metastasis and the development of second primary cancers, patients should be monitored closely for a minimum of at least 5 years.

Blastomycosis is a relatively uncommon fungal disease that most commonly affects the lungs. Other organs may be involved, usually secondary to dissemination of the organism. Laryngeal blastomycosis may occur in isolation from active pulmonary disease. The signs, symptoms, clinical features, and pathological findings of laryngeal blastomycosis mimic those of squamous cell carcinoma. Misdiagnosis may result in inappropriate treatment with potential morbidity. Proper understanding of the clinical presentation and familiarity with the histopathologic features of this disease are therefore imperative. In this paper, we report 2 cases of laryngeal blastomycosis, 1 of which was misdiagnosed as squamous cell carcinoma, clinically and microscopically, with consequent radiotherapy and laryngectomy. In the other case, a clinical diagnosis of glottic squamous cell carcinoma was rendered. However, blastomycosis was identified in a biopsy specimen. We also review cases of isolated laryngeal blastomycosis that have been reported in the English-language literature during the last 80 years. a number of those cases were misdiagnosed clinically and microscopically as squamous cell carcinoma.

We have been able to fabricate a two‐dimensional electron gas containing an atomically precise, lateral Kronig–Penney potential of 102 A periodicity. The structure was formed by modulation‐doped molecular beam epitaxy overgrowth on the cleaved edge of a 71 A GaAs/31 A AlGaAs compositional superlattice. Low‐temperature magnetotransport reveals clear quantum Hall characteristics. From the onset of the Shubnikov–de Haas oscillations at 0.25 T we deduce a lower limit of the mobility of μ≳40 000 cm2/V s at an electron density of 3.0×1011 cm−2 and infer that the carriers are crossing more than 200 GaAs/AlGaAs interfaces without losing phase coherence.

We demonstrate that two beams of two‐dimensional ballistic electrons in a GaAs‐AlGaAs heterostructure can penetrate each other with negligible mutual interaction analogous to the penetration of two optical beams. This allows electrical signal channels to intersect in the same plane with negligible crosstalk between the channels.

The objectives of this study were to compare the efficacy and safety of orally administered ondansetron 8 mg b.i.d., 24 mg q.d., and 32 mg q.d. in the prevention of nausea and vomiting associated with high-dose cisplatin-based chemotherapy (cisplatinor = 50 mg/m2). This was a randomized, parallel-group, double-blind study conducted in North America. It was planned that all patients would receive one of the following orally administered ondansetron treatments 30 min before starting cisplatin dosing (administered overor = 3 h): 8 mg b.i.d. with 8 h between doses (124 patients), 24 mg q.d. (116 patients), and 32 mg q.d. (117 patients). Use of prophylactic corticosteroids was not permitted. During the 24-h study period, the highest complete response rate (no emesis, rescue antiemetic therapy, or withdrawal) occurred in patients who received ondansetron 24 mg q.d.: 76/115 or 66%, as against 68/124 (55%) after ondansetron 8 mg b.i.d. and 64/117 (55%) after ondansetron 32 mg q.d. Complete control of nausea (no nausea, no rescue, no withdrawal) occurred in more patients in the ondansetron 24 mg q.d. group (64/114, 56%) than in the ondansetron 8 mg b.i.d. group (43/121, 36%) or in the ondansetron 32 mg group (55/117, 50%). These results demonstrate that following highly emetogenic cisplatin-based chemotherapy (or =2 50 mg/m2), oral ondansetron 24 mg q.d. is more effective than 8 mg b.i.d. for overall control of nausea, and at least as effective if not more effective in the control of acute vomiting than 8 mg b.i.d. or 32 mg q.d. Ondansetron 24 mg q.d. was well tolerated, and no new or unexpected adverse events were identified.

We have dramatically increased the sensitivity of a technique for the rapid inspection of EUV multilayer-coated mask blanks. In this technique an EUV sensitive resist is applied directly to a mask blank which is then flood exposed with EUV light and partially developed. Reflectivity defects in the mask blank result in mounds in a partially developed positive resist that appear as high contrast objects in a standard Nomarski microscope. The use of a higher contrast resist is shown experimentally to result in the creation of dramatically taller mounds. A simple model for the exposure and development of the resist has been developed and the predictions of the model compare well with the experimental results.

We have observed ballistic electron transport beyond 100 microm in the 2D electron system of an ultra-high mobility GaAs(AlGa)As heterostructure employing a magnetic electron focusing technique through wide point contacts. The amplitude of the characteristic magneto-oscillations is found to depend exponentially on electron propagation distance with a decay length λ a = 15 microm. λ a differs by about a factor of 2 from the mobility mean free path of 28 microm. This may indicate the determination of a different angular average of scattering events in focusing experiments as compared to standard mobility measurements.

We introduce an electrostatic lens for ballistic electrons in two‐dimensional (2D) systems and demonstrate its focusing action in very high mobility GaAs‐(AlGa)As heterostructures. This is the first refractive element for the control of 2D electrons. It exemplifies the close analogy between ballistic propagation in 2D electron systems and traditional geometrical optics.

We introduce three basic components for the manipulation of quasi‐classical ballistic electrons in very high mobility two‐dimensional electron systems and evaluate their effectiveness using the transverse electron focusing technique. We present an electron absorber or electron randomizer, demonstrate electron focusing in an area of tunable electron density, and present a simplified version of an injector/collector for ballistic carriers in two dimensions.

Purpose: To identify prognostic parameters and evaluate the therapeutic outcomes for patients with carcinoma of the tonsillar fossa treated with three treatment modalities. Methods and Materials: The results of therapy are reported in 384 patients with histologically proven epidermoid carcinoma of the tonsillar fossa; 154 were treated with irradiation alone (55–70 Gy), 144 with preoperative radiation therapy (20–40 Gy), and 86 with postoperative irradiation (50–60 Gy). The operation in all but four patients in the last two groups consisted of an en bloc radical tonsillectomy with ipsilateral lymph node dissection. Results: Treatment modality and total irradiation doses had no impact on survival. Actuarial 10-year disease-free survival rates were 65% for patients with T1 tumors, 60% for T2, 60% for T3, and 30% for T4 disease. Patients with no cervical lymphadenopathy or with a small metastatic lymph node (N1) had better disease-free survival (60% and 70%, respectively) at 5 years than those with large or fixed lymph nodes (30%). Primary tumor recurrence (local, marginal) rates in the T1, T2, and T3 groups were 20–25% in patients treated with irradiation and surgery and 31% for those treated with irradiation alone (difference not statistically significant). In patients with T4 disease treated with surgery and postoperative irradiation, the local failure rate was 32% compared with 86% with low-dose preoperative irradiation and 47% with irradiation alone ( p = 0.03). The overall recurrence rates in the neck were 10% for N0 patients, 25% for N1 and N2, and 35–40% for patients with N3 cervical lymph nodes, without significant differences among the various treatment groups. The incidence of contralateral neck recurrences was 8% with the various treatment modalities. On multivariate analysis the only significant factors for local tumor control and disease-free survival were T and N stage ( p = 0.04–0.001). Fatal complications were noted in 7 of 144 (5%) patients treated with preoperative irradiation and surgery, 2 of 86 (2%) of those receiving postoperative irradiation, and 2 of 154 (1.3%) patients treated with radiation therapy alone. Other moderate or severe nonfatal sequelae were noted in 30% of the patients treated with preoperative irradiation and surgery, in 53% treated with postoperative irradiation, and in 19% receiving radiation therapy alone. Conclusion: Primary tumor and neck node stage are the only significant prognostic factors influencing locoregional tumor control and disease-free survival. Treatment modality had no significant impact on outcome. Radiation therapy remains the treatment of choice for patients with stage T1–T2 carcinoma of the tonsillar fossa. In patients with T3–T4 tumors and good general condition, combination surgery and postoperative irradiation offers better tumor control than single-modality and preoperative irradiation procedures, but with greater morbidity.

Cholesterol feeding results in impaired endothelium dependent vasorelaxation. The role of nitric oxide in this process is unclear. The aim of this study was to evaluate the role of nitric oxide in cholesterol-induced vasomotor dysfunction by examining the effect of overexpression of eNOS in the hypercholesterolemic rabbit aorta on vascular reactivity. Vascular rings from the thoracic aorta of hypercholesterolemic rabbits were exposed ex vivo either to an adenoviral vector encoding endothelial nitric oxide synthase (AdeNOS) or Escherichia coli β Galactosidase (Ad β Gal). Transgene expression was examined by histochemistry for β galactosidase, immunohistochemistry for eNOS and cyclic GMP measurements and vasomotor studies were performed. Transgene expression was found to localize to the endothelium and adventitia. cGMP levels were significantly greater in AdeNOS compared to Ad β Gal transduced rings. Acetylcholine mediated relaxation was significantly impaired in cholesterol fed rabbits and was markedly improved by overexpression of eNOS. These results suggest that reduced NO bioavailability observed in cholesterol-induced vascular dysfunction can be partially overcome by eNOS gene transfer.

We have developed a new technique for at-wavelength inspection of EUV mask blanks. In this technique a thin layer of EUV photoresist is applied directly to a mask blank which is then flood exposed with EUV light and partially developed. We have demonstrated using atomic force microscopy (AFM) that a change in reflectance of only 12% can cause an approximately 50 Angstrom mound in ZEP photoresist. We propose that such mounds could be detected by existing optical inspection tools, and have demonstrated the detection of similar features in ZEP (created using electron beam lithography) by an automated darkfield optical scanning instrument. The greatest advantage of the technique is speed, since both steps (EUV flood exposure and optical inspection) can be done rapidly. Difficulties, such as contamination and resist roughness, are discussed along with possible solutions.

Abstract —Macrophage colony stimulating factor (MCSF) is believed to play a key role in one of the earliest events in atherosclerosis, ie, monocyte to macrophage differentiation in the arterial intima. The aim of this study was to examine the biological effects of vascular wall expression of MCSF. A recombinant adenovirus vector encoding human MCSF (AdMCSF) was generated by standard techniques of homologous recombination in 293 cells. The rabbit carotid artery was transduced with AdMCSF. As negative controls, carotid arteries were transduced with either an adenoviral vector encoding β-galactosidase, an adenoviral vector encoding apolipoprotein E, or diluent alone. Intima-media thickness ratio was calculated 5 and 21 days after transduction. The cell type present in intimal infiltrates was analyzed by immunohistochemistry. MCSF expression was demonstrated in the vessel wall of AdMCSF-transduced vessels by reverse transcription–polymerase chain reaction and immunofluorescence. In contrast to control vessels, adenovirus-mediated MCSF expression was associated with an intimal cellular infiltrate consisting of smooth muscle cells and small numbers of macrophages. Whereas the intima-media thickness ratio was greater in AdMCSF-transduced vessels at 5 days, this difference was no longer statistically significant at 21 days. These results suggest that MCSF may play a role in recruitment of monocytes and macrophages to the vessel wall and may contribute to smooth muscle cell proliferation and migration.

In cells productively infected with adenovirus type 5, transcription is not terminated between the E1a gene and the adjacent downstream E1b gene. Insertion of the mouse beta(maj)-globin transcription termination sequence (GGT) into the E1a coding region dramatically reduces early, but not late, E1b expression (E. Falck-Pedersen, J. Logan, T. Shenk, and J. E. Darnell, Jr., Cell 40:897-905, 1985). In the study described herein, we showed that base substitution mutations in the globin DNA that specifically relieved transcription termination also restored early E1b promoter activity in cis, establishing that maximal early E1b expression requires readthrough transcription originating from the adjacent upstream gene. To identify potential targets of readthrough activation, a series of recombinant viruses with double mutations was constructed. Each double-mutant virus strain had the transcription termination sequences in the first exon of E1a and a deletion within the transcription control region of E1b. Early E1b expression from the double-mutant strains was more defective than that from strains containing either mutation alone, indicating that the deleted regions (positions -362 to -35) are not the target for readthrough activation. Two findings suggested that a cis-dominant property of early viral templates is important for readthrough activation. First, the early E1b defect caused by the GGT insertion was not complemented in trans by factors present in late-infected cells. Second, restoration of E1b transcription at late times occurred concurrently with viral DNA replication. Readthrough activation may help convert virion DNA into a transcriptionally competent template prior to DNA replication and late transcription.

Leukotriene C4 (LTC4) synthase catalyzes the conjugation of LTA4 with reduced GSH to form LTC4, the parent of the receptor active cysteinyl leukotrienes implicated in the pathobiology of bronchial asthma. Previous cloning of the cDNA for human LTC4 synthase demonstrated significant homology of its amino acid sequence to that of 5-lipoxygenase activating protein (FLAP) but none to that of the GSH S-transferase super-family. Genomic cloning from a P1 library now reveals that the gene for LTC4 synthase contains five exons (ranging from 71 to 257 nucleotides in length) and four introns, which in total span 2.52 kilobase pairs in length. The intron/exon junctions of LTC4 synthase align identically with those of FLAP; however, the small size of the LTC4 synthase gene contrasts with the31-kilobase pair size reported for FLAP. Confirmation of the LTC4 synthase gene size to ensure that no deletions had occurred during the cloning was obtained by two overlapping polymerase chain reactions from genomic DNA, which provided products of the predicted sizes. Primer extension analysis with poly(A)+ RNA from culture-derived human eosinophilic granulocytes or the KG-1 myelogenous cell line revealed multiple transcriptional start sites with prominent signals at 66, 69, and 96 base pairs 5' of the ATG translation start site. The 5'-flanking region revealed a GC-rich promoter sequence consistent with an SP-1 site and consensus sequences for AP-1 and AP-2 enhancer elements, 24, 807, and 877 bp, respectively, 5' from the first transcription initiation site. Southern blot analysis of a genomic DNA (with full-length cDNA as well as 5' and 3' oligonucleotide probes) confirmed the size of the gene and indicated a single copy gene in normal human genomic DNA. Fluorescent in situ hybridization mapped LTC4 synthase to chromosomal location 5q35, which is in close proximity to the cluster of genes for cytokines and receptors involved in the regulation of cells central to allergic inflammation and implicated in bronchial asthma.

Fresnel zone plates are diffractive optical elements which are currently being used for high resolution x-ray microscopy. Several groups fabricate zone plates for use in specific microscopes [1] and we present here a summary on the fabrication of zone plates for use in the Scanning Transmission X-ray Microscope at the National Synchrotron Light Source. X-ray microscopy has demonstrated imaging with resolution five times superior to that which can routinely be achieved by visible light microscopy. In addition, x-rays with wavelengths between the carbon (4.2 nm) and oxygen (2.3 nm) K absorption edges are absorbed nearly an order of magnitude more strongly by organics than by water. This creates a natural absorption contrast mechanism and allows the viewing of many biological specimens wet and intact (without sectioning) and at atmospheric pressure [2]. By taking advantage of the spectroscopic properties of x-rays, x-ray microscopy can be used to map chemical elements and their binding states. Fluorescent chemical labels and gold labels can also be imaged at high resolution. Furthermore, several labs including ours are developing the capability to view radiation-tough frozen hydrated specimens in x-ray microscopes.

Publisher Summary This chapter discusses the construction and isolation of recombinant adenoviruses with gene replacements. Human adenovirus has become a vector of choice not only for introducing foreign genes into cell culture or animals for transient expression studies but also for the rapidly developing field of human gene therapy. The advantages of the system is that the virus is easy to manipulate and store, grows to high titers, has a broad host range, and is capable of mediating high levels of expression of the transduced gene. For gene therapy applications, additional advantages include its apparent safety and the low probability of stable integration. The most common vectors are derived from adenovirus type 5, the preferred strain for genetic analysis and manipulation. Two regions have been targeted for foreign gene replacement. The E3 region is nonessential for growth of the virus in cell culture. Therefore, E3 may be deleted and replaced with a foreign gene without compromising the infectivity of the virus, at least in vitro . Region E1 (including E1a and E1b ) is essential for virus replication. There are two standard strategies for producing adenoviruses with E1 gene replacements. In one strategy, both DNA molecules are propagated as Escherichia coli plasmids. The second strategy uses one DNA molecule that is plasmid derived and one that is derived from a viral genome. The chapter discusses the elements in a linear order for the standard arrangement for a plasmid-derived substrate for recombinant adenovirus isolation. The most important variable in recombinant virus isolation is the condition of the 293 cells, which are used to propagate adenoviruses that lack E1a and E1b genes.

The immediate-early 2 (IE2) 86-kDa polypeptide, a major immediate-early gene product of human cytomegalovirus, regulates transcription both positively and negatively. We report two new properties of the IE2 86-kDa polypeptide in infected cells. Immunoprecipitation of infected cell proteins from human embryonic lung cells by antipeptide or monoclonal antibodies specific for IE2 epitopes revealed three closely migrating polypeptide species. The slowest, p86, behaved as expected for the mature 86-kDa IE2 polypeptide. The middle species, p80, was immunoprecipitated from denatured as well as native samples and labeled to steady state rapidly. Pulse-chase analysis demonstrated directly that p80 was a metabolic precursor to p86. The fastest-migrating species, p75, was not detected by probing blots of the immunoprecipitated proteins with IE2-specific antisera; p75 was not precipitated from denatured protein samples; and the products of partial proteolysis of p75 were distinct from those of p86. These properties established p75 as an unrelated coprecipitated polypeptide complexed with p86. The p75 proteins coprecipitated from cells infected with two different strains of human cytomegalovirus, AD169 and Towne, had different mobilities. p75 was detected as early as 6 h and as late as 72 h after infection, but it was not synthesized in cells released from a cycloheximide block. Thus, it is likely that p75 is an early viral protein.

EG&G/EM has developed an oscilloscope with a −3 dB bandwidth greater than 10 GHz. Its rolloff characteristics are such that single‐transient data greater than 20 GHz may be captured. A demountable CCD camera records the oscilloscope trace and is provided with PC‐compatible capture and data processing software. The capabilities of the oscilloscope, camera, and its processing software are described and examples of the system’s performance is shown. This work supported by the U.S. Department of Energy, Nevada Operations Office, under Contract No. DE‐AC08‐93NV11265.

We report that transcription of the adenovirus type 5 E1b gene is activated substantially in cis by sequences located between positions -362 and -49 with respect to the RNA start site. DNA fragments consisting of the -362 to -49 sequences, or subsets thereof, were inserted into a reporter plasmid containing a minimal E1b promoter (positions -48 to +14) joined to the Escherichia coli cat gene. In the presence of cotransfected E1a and E1b genes in trans, CAT enzyme synthesis in transfected KB cells was stimulated about 20-fold by sequences from -362 to -49 (XY) in cis and to a lesser extent by sequences from either -362 to -128 (X) or -127 to -49 (Y). Adenoviruses were isolated lacking the X, Y, or XY sequences and KB cells were infected with one of the mutants, as well as wild-type virus to provide E1a and E1b in trans. Deletion of both X and Y resulted in a 20-fold reduction in early E1b RNA and a 12-fold reduction in late RNA. Deletion of X or Y alone produced up to 5-fold reductions in early or late E1b RNA accumulation. In vitro DNA-protein interactions in the Y sequence were revealed by modification of the procedure used for previous detection of X region footprints. These data indicate that X and Y sequences, which include E1a protein coding and 3' untranslated DNA, also participate in DNA-protein interactions necessary for high levels of E1b promoter activity. The presence of such overlapping genetic elements raises the interesting possibility that functional E1a and E1b mRNAs must be synthesized from separate templates.

SOI CMOS compatible Si waveguide photodetectors are made responsive from 1100 to 1750 nm by Si+ implantation and annealing. Photodiodes have a bandwidth of35 GHz, an internal quantum efficiency of 0.5 to 10 AW-1, and leakage currents of 0.5 nA to 0.5 microA. Phototransistors have an optical response of 50 AW-1 with a bandwidth of 0.2 GHz. These properties are related to carrier mobilities in the implanted Si waveguide. These detectors exhibit low optical absorption requiring lengths from0.3 mm to 3 mm to absorb 50% of the incoming light. However, the high bandwidth, high quantum efficiency, low leakage current, and potentially high fabrication yields, make these devices very competitive when compared to other detector technologies.

The results of therapy are reported in 296 patients with histologically proven epidermoid carcinoma of the tonsillar fossa; 127 were treated with irradiation alone (5,500 to 7,000 cGy), 133 with preoperative radiotherapy (2,000 to 3,000 cGy) or were initially planned for preoperative irradiation but treated with radiotherapy alone, and 36 with postoperative irradiation (5,000 to 6,000 cGy). The operation in all but 4 patients consisted of an en bloc radical tonsillectomy with ipsilateral lymph node dissection. Actuarial 5-year no evidence of disease (NED) was as follows: survival rates for patients with T1 tumors, 76%; T2, 54%; T3, 45%; and T4, 20%. Patients with no cervical lymphadenopathy or with a small metastatic lymph node (N1) had better relapse-free survival (60% to 70% at 5 years) than those with large or fixed lymph nodes (30% to 40%). Primary tumor recurrence rate in the T1-T2 groups was about 20% in patients treated with irradiation and surgery and 30% for those treated with irradiation alone (difference not statistically significant), 30% in patients with stage T3 lesions in all treatment groups, and 33% in patients with T4 disease treated with surgery and postoperative irradiation compared to 52% with irradiation alone (p = 0.03). The overall recurrence rate in the neck was about 20% for the N0 patients, 25% for N1, and 30% for those with N2 and N3 cervical lymph nodes in the 4 treatment groups. The incidence of contralateral neck recurrences was about 8% with the various treatment modalities.(ABSTRACT TRUNCATED AT 250 WORDS)

We have succeeded in fabricating a two-dimensional electron gas (2DEG) on the cleaved (110) edge of a GaAs wafer by molecular beam epitaxy (MBE). A (100) wafer previously prepared by MBE growth is reinstalled in the MBE chamber so that an in situ cleave exposes a fresh (110) GaAs edge for further MBE overgrowth. A sequence of Si-doped AlGaAs layers completes the modulation-doped structure at the cleaved edge. Mobilities as high as 6.1×10^5 cm^2/V s are measured in the 2DEG at the cleaved interface.

Feature Issue on Nanoscale Integrated Photonics for Optical Networks The goal of the research program that we describe is to break the emerging performance wall in microprocessor development arising from limited bandwidth and density of on-chip interconnects and chip-to-chip (processor-to-memory) electrical interfaces. Complementary metal-oxide semiconductor compatible photonic devices provide an infrastructure for deployment of a range of integrated photonic networks, which will replace state-of-the-art electrical interconnects, providing significant gains at the system level. Scaling of wavelength-division-multiplexing (WDM) architectures using high-index-contrast (HIC) waveguides offers one path to realizing the energy efficiency and density requirements of high data rate links. HIC microring-resonator filters are well suited to support add-drop nodes in dense WDM photonic networks with high aggregate data rates because they support high Q's and, due to their traveling-wave character, naturally support physically separated input and drop ports. A novel reconfigurable, 'hitless' switch is presented that does not perturb the express channels either before, during, or after reconfiguration. In addition, multigigahertz operation of low-power, Mach-Zehnder silicon modulators as well as germanium-on-silicon photodiodes are presented.

CMOS compatible infrared waveguide Si photodiodes are made responsive from 1100 to 1750 nm by Si(+) implantation and annealing. This article compares diodes fabricated using two annealing temperatures, 300 and 475 degrees C. 0.25-mm-long diodes annealed to 300 degrees C have a response to 1539 nm radiation of 0.1 A W-(-1) at a reverse bias of 5 V and 1.2 A W(-1) at 20 V. 3-mm-long diodes processed to 475 degrees C exhibited two states, L1 and L2, with photo responses of 0.3 +/-0.1 A W(-1) at 5 V and 0.7 +/-0.2 A W(-1) at 20 V for the L1 state and 0.5 +/-0.2 A W(-1) at 5 V and 4 to 20 A W(-1)-1 at 20 V for the L2 state. The diodes can be switched between L1 and L2. The bandwidths vary from 10 to 20 GHz. These diodes will generate electrical power from the incident radiation with efficiencies from 4 to 10 %.

Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes readout by a three-stage CCD through a single ~1-MHz output amplifier. This yields an effective clock rate for the whole array of ~1 kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits enables simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device is tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.

Optical lithography at 193nm with resolution enhancements and immersion is widely expected to meet the needs of the 45nm node. Beyond this, at 32nm and below, the solution is not as clear. In this article we present simulation results and experimental demonstrations of an all-optical approach capable of high-throughput 32nm lithography (hybrid optical maskless lithography). In this method high-resolution dense gratings are defined in a first exposure using maskless interference lithography. A second “trim” exposure, using conventional projection lithography, customizes these gratings into useful patterns. Our simulations indicate that 32nm node patterning can be achieved using trim tools and masks of significantly lower resolution. We also present experimental feasibility results using 157nm “dry” interference in combination with projection 248nm or e-beam trim exposures. The technological requirements and extendibility of such a method beyond the 32nm node are also examined.