151. Thermal stability of the [(Si)m/(Ge)n]psuperlattice interface
- Author
-
T. E. Jackman, David J. Lockwood, J.-M. Baribeau, Tolek Tyliszczak, Adam P. Hitchcock, and Philipp Aebi
- Subjects
Materials science ,Silicon ,Annealing (metallurgy) ,Superlattice ,Analytical chemistry ,chemistry.chemical_element ,Germanium ,Bond length ,symbols.namesake ,chemistry ,symbols ,Thermal stability ,Raman spectroscopy ,Raman scattering - Abstract
The structure of [(Si) m /(Ge) n ] p superlattice interfaces and the onset of relaxation and interdiffusion initiated by annealing have been investigated with the use of extended x-ray-absorption fine structure and Raman scattering. For the as-grown material, the Ge-Ge bond length (0.2409 nm) was equal to that calculated for a fully strained Ge layer (0.2412 nm) while the Si-Ge bond length was significantly shorter. The results show conclusively that substantial intermixing along with partial relaxation of the Ge-Ge bonds occurs even for the shortest anneal at 700°C
- Published
- 1992