101. Scalable hollow nanoneedle array using stepper lithography for parallel intracellular delivery
- Author
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Moeto Nagai, Takayuki Shibata, Takeshi Hizawa, and Tokuma Miyamoto
- Subjects
010302 applied physics ,Fabrication ,Materials science ,Silicon ,business.industry ,digestive, oral, and skin physiology ,technology, industry, and agriculture ,General Engineering ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,chemistry ,0103 physical sciences ,Optoelectronics ,Wafer ,Stepper ,0210 nano-technology ,business ,Lithography ,Nanoneedle - Abstract
Intracellular delivery with a nanoneedle is a versatile method of injecting various types of materials into a single cell. A single hollow needle limits the throughput of cellular delivery. This study aims to develop an array of hollow nanoneedles suitable for massively parallel delivery and mass production. The fabrication of hollow nanoneedle structures by stepper lithography looks promising, but a method for the fabrication has remained unclear. We patterned the tips of nanoneedles by i-line stepper lithography and fabricated a hollow nanoneedle array. We used silicon and silicon-on-insulator wafers and established a process for controlling needle diameter, height, and pitch. Needle tips were produced on the front side and introduction channels were formed on the backside. A fluorescent DNA solution was transported by electrokinetic ejection through a fabricated nanoneedle array.
- Published
- 2019