101. Charged particle densities and kinetics in a radio-frequency SF6 plasma
- Author
-
Kono, A., Endo, M., Ohata, K., Kishimoto, S., and Goto, T.
- Subjects
Plasma (Ionized gases) -- Research ,Particles (Nuclear physics) -- Research ,Physics - Abstract
The densities and kinetics of charged particles in a capacitively-coupled radio-frequency (rf) SF6 plasma are determined as functions of pressure and radio-frequency power. The kinetics are determined from the decay of charged particle densities in the afterglow. The charged particles include negative ions, electrons and positive ions. Microwave cavity resonance method is used to determine election density. Charged particle density is constant at low pressures, and decreases with an increase in pressure. The kinetics reveal that the recombination rate constants for the dominant ion species is about 10 to the power of -7 centimeter cubed per second.
- Published
- 1994