101. Thin Film Gas Sensors Based on Tin Oxide for Acetonitrile
- Author
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Nak-Jin Choi, Jun-Hyuk Kwak, Jae Chang Kim, Duk-Dong Lee, Byung-Su Joo, Yeon-Tae Lim, Jeung-Soo Huh, and Tae-Hyun Ban
- Subjects
chemistry.chemical_compound ,Materials science ,chemistry ,Operating temperature ,Inorganic chemistry ,Electrode ,Analytical chemistry ,Flow type ,Thin film ,Tin oxide ,Acetonitrile - Abstract
Thin film gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas is acetonitrile () that is simulant gas of blood agent gas. Sensing materials are , /Pt, and (Sn/Pt)oxidation with thickness from to . Sensor was consisted of sensing electrode with interdigit (IDT) type in front side and a heater in back side. Its dimension was . Fabricated sensor was measured as flow type and monitored real time using PC. The optimal sensing material for was {Sn()/Pt()}oxidation and its sensitivity and operating temperature were 30%, in 3 ppm.
- Published
- 2004