101. 9.2: Fabrication techniques for a THz EIK
- Author
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David Chernin, A. Roitman, Edward L. Wright, Mark Hyttinen, John H. Booske, Monica Blank, N. Scott Barker, Olga V. Makarova, Richard Dobbs, Peter Horoyski, Dan Sweeney, and Jeffrey P. Calame
- Subjects
Materials science ,Fabrication ,Klystron ,business.industry ,Terahertz radiation ,law.invention ,Surface micromachining ,Optics ,Resist ,Machining ,law ,Optoelectronics ,X-ray lithography ,Photolithography ,business - Abstract
To produce an EIK working at THz frequencies, departure from traditional fabrication techniques is required. This paper describes the investigation and results of various fabrication techniques and their suitability for application in a VED.
- Published
- 2010
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