101. Growth of device grade μc-Si film at over 50 A˚/s using PECVD
- Author
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Suzuki, S., Kondo, M., and Matsuda, A.
- Subjects
- *
SILICON crystals , *PLASMA gases - Abstract
We have developed high-rate deposition technique for device quality microcrystalline silicon using plasma-enhanced chemical vapor deposition in combination with triode technique and shower-head cathode under high-pressure-depletion conditions. A shower-head cathode improves the uniformity of film quality as well as thickness in high deposition rate regime over 50 A˚/s. A mesh electrode is placed near substrates to suppress ion-bombardment to the film growing surface. In high input power regime, a hollow-cathode effect facilitates microcrystalline silicon growth at over 50 A˚/s with good crystallinity, good photosensitivity and low defect density. A preliminary result of solar cell device using this method is demonstrated. [Copyright &y& Elsevier]
- Published
- 2002
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