901. High-performance low-frequency MEMS energy harvester via partially covering PZT thick film.
- Author
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Guimiao Li, Zhiran Yi, Yili Hu, Jingquan Liu, and Bin Yang
- Subjects
MICROELECTROMECHANICAL systems ,ENERGY harvesting ,PIEZOELECTRIC devices ,THICK films ,STRESS concentration ,MICROFABRICATION - Abstract
This paper proposes a high-performance and low-frequency MEMS piezoelectric energy harvester (PEH) via partially covering PZT thick film on beryllium bronze substrate. The simulated results of fully and partially covered structures show that the PEH with partially covering PZT thick film contributes to high performance due to more uniform stress distribution. In the experiment, the fabricated PEH with partially covered PZT thick film generates the maximum output voltage of 29.1 V, and the maximum power of 79.36 µW and power density of 16.5 mW cm
−3 at the resonant frequency of 64.6 Hz and the excited acceleration amplitude of 0.7 g. The normalized power density of the harvester can reach 365.6 µW g−1 Hz−1 cm−3 , which has a great improvement compared to other reported PEHs with fully covering piezoelectric layer. Meanwhile, the device is measured continuously under 0.7 g acceleration for 1 h and shows a good stability. It indicates that it has a potential application in self-powered electronic devices or systems to promote the rapid development of internet of things. [ABSTRACT FROM AUTHOR]- Published
- 2018
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