951. Formation of SrTiO3 nanocrystals in amorphous Lu2O3 high-k gate dielectric for floating gate memory application
- Author
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Jan Ma, Y. Setiawan, Pooi See Lee, C. L. Yuan, Peter Darmawan, and School of Materials Science & Engineering
- Subjects
Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,Gate dielectric ,Dielectric ,Pulsed laser deposition ,Amorphous solid ,Engineering::Materials [DRNTU] ,Hysteresis ,Transmission electron microscopy ,Optoelectronics ,business ,High-resolution transmission electron microscopy ,High-κ dielectric - Abstract
We have developed a method based upon pulsed laser deposition to produce SrTiO3 nanocrystals embedded in amorphous Lu2O3 high-k dielectric. The high resolution transmission electron microscopy study revealed the complete isolation of SrTiO3 nanocrystals embedded in Lu2O3 matrix with 4 nm diameter and well distributed with an area density estimated to be about 8x 10^11 cm−2. A pronounced capacitance-voltage hysteresis is observed with a memory window of ~1.5 V under the 6 V programming. In addition, the retention characteristics are tested to be robust. Published version
- Published
- 2006
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