51. Grid-Controlled Extraction of Low-Charged Ions from a Laser Ion Source
- Author
-
Masahiro Yoshida, Mitsuo Nakajima, Kazuhiko Horioka, Yoshiyuki Oguri, Jun Hasegawa, Joe W. Kwan, and Masao Ogawa
- Subjects
Materials science ,Physics and Astronomy (miscellaneous) ,Ion beam ,Grid bias ,business.industry ,General Engineering ,General Physics and Astronomy ,Ion gun ,Focused ion beam ,Beam parameter product ,Optics ,Ion beam deposition ,Physics::Accelerator Physics ,Laser beam quality ,business ,Beam (structure) - Abstract
We developed a grid-controlled laser ion source using a KrF excimer laser and investigated the effects of grid-controlled extraction on beam current waveform and beam quality. By using grid-controlled extraction in the over-dense regime, the beam current waveform was found to be stabilized. The beam current increased in proportion to V3/2, where V is the extraction voltage, which proves that the grid control worked properly and that the ion beam was extracted in a one-dimensional space-charge-limited mode. Beam quality measurement using a pepper-pot imaging method revealed that the beam optics was strongly disturbed by the grid potential in the source-limit regime. Conversely, in the over-dense regime there were no deleterious effects of the grid bias on the beam patterns. This result indicated that the virtual anode in the gap acted as a kind of momentum filter and improved the beam quality.
- Published
- 2003