51. CVD diamond thin film for IR optics and X-ray optics
- Author
-
Xinmin Xu and Xuan-Tong Ying
- Subjects
Materials science ,business.industry ,Scanning electron microscope ,Metals and Alloys ,X-ray optics ,Diamond ,Surfaces and Interfaces ,Chemical vapor deposition ,engineering.material ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,symbols.namesake ,Optics ,Carbon film ,Anti-reflective coating ,law ,Materials Chemistry ,engineering ,symbols ,Thin film ,business ,Raman spectroscopy - Abstract
Optical quality diamond thin films have been deposited using a hot filament chemical vapor deposition (HFCVD) system. The diamond films were characterized by Raman shift spectra, X-ray diffraction spectra, scanning electron microscopy. Diamond near infrared antireflective filter window and diamond X-ray window have been fabricated using above technology. The diamond near infrared antireflective filter windows have been successfully used in on-line monitoring at Shanghai Baosteel Works. It has produced annual benefit as much as 2.4 million RMB Yuan.
- Published
- 2000
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