51. Microstructures and Growth Characteristics of Self-Assembled InAs/GaAs Quantum Dots Investigated by Transmission Electron Microscopy
- Author
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Won Jun Choi, Hyung Seok Kim, Yong Ju Park, Jung Il Lee, Sam Kyu Noh, Jin Dong Song, Ju Hyung Suh, Chan Gyung Park, and Sang Jun Lee
- Subjects
congenital, hereditary, and neonatal diseases and abnormalities ,Materials science ,Strain (chemistry) ,business.industry ,technology, industry, and agriculture ,General Engineering ,nutritional and metabolic diseases ,Substrate (electronics) ,equipment and supplies ,Microstructure ,Crystallography ,Transmission electron microscopy ,Quantum dot ,Optoelectronics ,business ,Layer (electronics) ,Deposition (law) ,Wetting layer - Abstract
The microstructure and strain characteristics of self-assembled InAs/GaAs quantum dots (QDs) were studied by using transmission electron microscopy. Compressive strain was induced to uncapped QDs from GaAs substrate and the misfit strain largely increased after the deposition of GaAs cap layer. Tensile strain outside QD was extended along the vertical growth direction; up to 15 nm above the wetting layer. Vertically nonaligned and aligned stacked QDs were grown by adjusting the thickness of GaAs spacer layers. The QDs with a lens-shaped morphology were formed in the early stage of growth, and their apex was flattened by the out-diffusion of In atoms upon GaAs capping. However, aligned QDs maintained their lens-shaped structure with round apex after capping. It is believed that their apex did not flatten because the chemical potential gradient of In was relatively low due to the adjacent InAs QD layers.
- Published
- 2007
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