51. Effect of substrate material on the crystallinity and epitaxy of Pb(Zr,Ti)O3 thin films
- Author
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K.S. Hwang, S. Mizuta, Takaaki Manabe, T. Kumagai, Tsutomu Nagahama, and Iwao Yamaguchi
- Subjects
Materials science ,Metals and Alloys ,Analytical chemistry ,Mineralogy ,Surfaces and Interfaces ,Epitaxy ,Dip-coating ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Amorphous solid ,Tetragonal crystal system ,Crystallinity ,Materials Chemistry ,Sapphire ,Crystallite ,Thin film - Abstract
Pb(Zr,Ti)O3 thin films (Pb:Zr:Ti=1:0.52:0.48) were prepared on various single-crystal substrates via dipping-pyrolysis process by use of metal naphthenates as starting materials. The alignments of these films were examined by X-ray diffraction (XRD) θ–2θ scans and β scans (pole figures). The films grown on Nb-doped SrTiO3, MgO or LaAlO3 showed an epitaxial relationship with substrates after heat treatment at 750°C, while those grown on sapphire and Si wafers exhibited polycrystalline or amorphous characteristics. Epitaxial films on SrTiO3 and LaAlO3 were found to consist of a c-axis oriented tetragonal phase, to minimize the lattice misfit with the substrates. These epitaxial films exhibited very smooth surfaces by SEM and AFM observations. In addition, the fluctuation of in-plane alignment was significantly dependent on the lattice-misfit values.
- Published
- 1999
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