344 results on '"Particle contamination"'
Search Results
52. Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings
- Author
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Tzu-Ken Lin, Wei-Kai Wang, Shih-Yung Huang, Chi-Tsung Tasi, and Dong-Sing Wuu
- Subjects
yttrium fluoride (YF3) ,yttrium oxide (Y2O3) ,atmospheric plasma spraying (APS) ,particle contamination ,Chemistry ,QD1-999 - Abstract
Yttrium fluoride (YF3) and yttrium oxide (Y2O3) protective coatings prepared using an atmospheric plasma spraying technique were used to investigate the relationship between surface erosion behaviors and their nanoparticle generation under high-density plasma (1012–1013 cm−3) etching. As examined by transmission electron microscopy, the Y2O3 and YF3 coatings become oxyfluorinated after exposure to the plasma, wherein the yttrium oxyfluoride film formation was observed on the surface with a thickness of 5.2 and 6.8 nm, respectively. The difference in the oxyfluorination of Y2O3 and YF3 coatings could be attributed to Y–F and Y–O bonding energies. X-ray photoelectron spectroscopy analyses revealed that a strongly fluorinated bonding (Y–F bond) was obtained on the etched surface of the YF3 coating. Scanning electron microscopy and energy dispersive X-ray diffraction analysis revealed that the nanoparticles on the 12-inch wafer are composed of etchant gases and Y2O3. These results indicate that the YF3 coating is a more erosion-resistant material, resulting in fewer contamination particles compared with the Y2O3 coating.
- Published
- 2017
- Full Text
- View/download PDF
53. Online particle-contaminated lubrication oil condition monitoring and remaining useful life prediction for wind turbines.
- Author
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Zhu, Junda, Yoon, Jae M., He, David, and Bechhoefer, Eric
- Subjects
LUBRICATING oils ,WIND turbines ,MONITORING of machinery ,LUBRICATION & lubricants research ,VISCOSITY - Abstract
The widespread deployment of industrial wind projects will require a more proactive maintenance strategy in order to be more cost competitive. This paper describes an ongoing research project on developing online lubrication oil condition monitoring and degradation detection tools using commercially available online sensors. In particular, an investigation on particle contamination of lubrication oil is reported. Methods are presented for online lubrication oil condition monitoring and remaining useful life prediction using viscosity and dielectric constant sensors along with particle filtering technique. Physical models are derived in order to establish the mathematical relationship between lubrication oil degradation and particle contamination level. Laboratory experiments are performed to validate the accuracy of the developed models by comparing viscosity and dielectric constant sensor outputs of different particle concentration levels with those simulated by the lubricant deterioration physical models. A case study on lubrication oil degradation detection and remaining useful life prediction is provided. Discussions on the potential for extrapolating the presented methods to typical wind turbine gearbox oil and the practical implementation of particle filter-based approach for online wind turbine gearbox oil remaining useful life prediction are also included. Copyright © 2014 John Wiley & Sons, Ltd. [ABSTRACT FROM AUTHOR]
- Published
- 2015
- Full Text
- View/download PDF
54. Optimum airflow to reduce particle contamination inside welding automation machine of hard disk drive production line.
- Author
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Thongsri, Jatuporn and Pimsarn, Monsak
- Abstract
Welding automation machine (WAM), used for welding minute components to the head gimbal assembly (HGA) of a hard disk drive (HDD), needs to operate in a strictly clean environment. In today's HDD factories, to prevent airborne particle contamination to the WAM, Fan Filter Units (FFUs) are installed on top of it to supply clean air and blow away outside airborne micro particles, keeping the microenvironment clean. Furthermore, the mass of the clean air should also carry away harmful particles generated inside the microenvironment. In this research, numerical simulation of airflow inside a WAM was performed in order to verify these cleaning functions of the airflow. A transition shear stress transport turbulence model was employed to simulate airflow from the FFUs through and out of the microenvironment. The simulation results showed that the airflow from the FFUs truly performs the two cleaning functions as intended. Moreover, they also revealed that the optimum air speed, the speed resulting in the lowest particle counts, is in the range of 0.35-0.55 m/s. Our findings can be useful for developers who may use FFUs to reduce particle counts in the environment of other types of industrial machinery. [ABSTRACT FROM AUTHOR]
- Published
- 2015
- Full Text
- View/download PDF
55. Introduction of fully automated EUV pellicle mounter and demounter (EPMD)
- Author
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Seongyong Moon, Sunwoo Lee, Sungchul Jeon, and Dongyoung Shin
- Subjects
Particle contamination ,Optics ,Fully automated ,business.industry ,Computer science ,Extreme ultraviolet lithography ,business ,Lithography ,First generation - Abstract
Continuous innovations in lithography have led to the advancement of integrated chips for decades. To extend the so-called Moore's Law, chipmakers started to adopt Extreme Ultraviolet Lithography (EUVL) and have extended the use of EUV in their mass production. For the mass production using EUV lithography, EUV pellicles will are essential to prevent unexpected particle-induced yield drop and to promote productivity. However, the structure of the current EUV pellicle is different from that of optical pellicles. Thus, a new type of mounting and demounting system for EUV pellicle is required. The first generation of EUV pellicle mounting and demounting tools allowed chipmakers to handle EUV pellicles at their R&D levels. However, due to many manual processes involved with the first generation, it is necessary to introduce a fully automated tool to increase throughput and minimize particle contamination.
- Published
- 2021
56. Sex Sigma för kvalitetssäkring av Litium-jon batteriers cellmonteringsprocess : En fältstudie enligt DMAIC på Northvolt
- Author
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Mostafaee, Mani
- Subjects
Ekonomi och näringsliv ,Particle contamination ,Economics and Business ,Cell assembly process ,ISO 14644 ,Lithium-ion battery ,VDA 19 ,Technical cleanliness ,Quality Cost - Abstract
Lack of technical cleanliness and particle contaminations in Lithium-ion battery manufacturing affect the performance of batteries which are a risk for the safety and quality of the product. Therefore, part of the manufacturing process occurs inside the Clean and Dry room area to maintain technical cleanliness. This paper aims to provide a framework to control particle contamination inside the Clean and Dry room and strengthen the product's quality and safety. A literature study was conducted, which was completed by a field study at Northvolt Labs in Västerås to achieve the study's aims. The study contributes to existing theories by providing a framework to find root causes of particle contamination in the manufacturing process based on the existing literature and standards. The Six Sigma problem-solving methodology DMAIC was implemented to conduct the field study. A risk assessment was conducted to find the possible threats toward technical cleanliness in the cell assembly process. The risk sources were identified by implementing measurement methods from relevant standards. The results indicate a high risk for technical cleanliness are coming from the decontamination method, material, machines, and environment. Furthermore, several recommendations were given that are expected to decrease the amount of nonconformity in the process. Brist på teknisk renhet och partikelföroreningar vid tillverkning av litiumjonbatterier påverkar dess prestanda och utgör en risk för produktens säkerhet och kvalitet. Därför sker en del av tillverkningsprocessen i ett Clean & Dry rum för att upprätthålla teknisk renhet. Denna uppsats syftar till att ge ett ramverk för att kontrollera partikelföroreningar och därmed stärka produktens kvalitet och säkerhet. För att uppnå syftet genomfördes först en litteraturstudie vilket vidare kompletterades med en fältstudie vid Northvolt Labs i Västerås. Studien bidrar till befintliga teorier genom att tillhandahålla ett ramverk för att hitta och åtgärda rotorsaker till partikelkontaminering i tillverkningsprocessen baserat på befintlig litteratur och standarder. Sex Sigma problemlösningsmetoden DMAIC implementerades för att genomföra fältstudien. En riskbedömning genomfördes för att hitta riskfyllda aktiviteter i processen. Vidare implementerades mätmetoder från relevanta standarder för att mäta kontamineringsnivån. Resultaten indikerar stor risk för tekniskrenhet från saneringsmetoder, material, maskiner och miljön. Vidare rekommenderas flera åtgärder för att underhålla tekniskrenhet vilka förväntas minska avvikelser i processen.
- Published
- 2021
57. Performance of gas insulated substation under particle contamination with Charge Simulation Method (CSM).
- Author
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Subrahmanyam, K B V S R and Amarnath, J.
- Abstract
This paper deals with the movement of free conducting particles inside a single phase Gas Insulated Bus duct(GIB).A two dimensional mathematical model was proposed for determining the movement pattern of metallic particle in GIB by considering all the forces acting on the particle like gravitational, drag and the electric field forces. A particle resting on the inner side of the outer enclosure is chosen. The co-efficient of restitution was considered at every impact with the enclosure of GIB. Electric fields at the instantaneous contaminated particle locations were computed using Charge Simulation Method (CSM). To determine the particle trajectory in a single phase Gas Insulated Bus duct (GIB), an enclosure diameter 152 mm and conductor diameter 55 mm is considered. The simulation carried out for various bus configurations with different aluminum, copper and silver wire like particles inside 100KV, 132KV, 145KV and 175KV class enclosure of GIB. The results of the simulation have been presented and analyzed in this paper. [ABSTRACT FROM PUBLISHER]
- Published
- 2012
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58. A Microscopic Model for Pedestrian Sl ips Caused by Particle Contamination
- Author
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Tsai, Hung-Jung, Huang, Pay-Yau, Tsai, Hung-Cheng, Liao, Chih-Hsiang, Luo, Jianbin, editor, Meng, Yonggang, editor, Shao, Tianmin, editor, and Zhao, Qian, editor
- Published
- 2010
- Full Text
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59. Particles Detection and Analysis of Hard Disk Substrate after Post-CMP Cleaning
- Author
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Huang, Yating, Lu, Xinchun, Pan, Guoshun, Lee, Bill, Luo, Jianbin, Luo, Jianbin, editor, Meng, Yonggang, editor, Shao, Tianmin, editor, and Zhao, Qian, editor
- Published
- 2010
- Full Text
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60. Assessing the Risk of Failure due to Particle Contamination in GIS under various Coefficient of Restitutions.
- Author
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Kumar, G. V. Nagesh and Jinka, Amarnath
- Subjects
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ELECTRIC switchgear , *ELECTRIC fields , *ELECTRIC power transmission , *ELECTRICAL conductors , *SIMULATION methods & models , *COEFFICIENTS (Statistics) - Abstract
The development of compressed gas insulated switchgear (GIS) equipment has progressed rapidly. Conducting particles in transmission and switching equipment insulated by compressed sulphur hexafluoride (SF6) can result in loss of as much as 90% of the gas dielectric strength. These particles may be free to move in the electric field or may be fixed on the conductors, thus enhancing local surface fields. In a horizontal coaxial system with particles resting on the inside surface of the enclosure, the motion of such particles is random but the randomness depends on the coefficient of restitution and angle of incidence when approaching the coaxial conductors. The power industry has utilized several methods to control and minimize the effect of particle contamination in GIS. One such technique is to apply a dielectric (high resistivity) coating to the inside surface of the outer GIS enclosure. The electric field necessary to lift a particle resting on the inside surface of a GIS enclosure is much increased due to the coating. The simulation of the particle movement was carried under different Coefficient of Restitutions for coated busduct. The results have been presented and analyzed. [ABSTRACT FROM AUTHOR]
- Published
- 2014
61. Surface Particle Contamination Identification in Microelectronics
- Author
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Martine Simard-Normandin
- Subjects
Particle contamination ,Materials science ,business.industry ,Microelectronics ,Nanotechnology ,Identification (biology) ,business - Published
- 2020
62. CORR Insights®: Do Double-fan Surgical Helmet Systems Result in Less Gown-particle Contamination Than Single-fan Designs?
- Author
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Simon W. Young
- Subjects
Particle contamination ,business.industry ,General Medicine ,Automotive engineering ,Surgical helmet ,Basic Research ,Protective Clothing ,Medicine ,Humans ,Orthopedics and Sports Medicine ,Surgery ,Gloves, Surgical ,Head Protective Devices ,business - Abstract
BACKGROUND: Surgical helmet systems commonly are stand-alone systems with a single fan blowing air into the suit, creating positive pressure that blows particles out through areas of low resistance, possibly contaminating surgical attire and the surgical field. Two-fan systems were developed more recently to release spent air, also theoretically lowering pressure in the suit and decreasing the aforementioned risk of particle contamination. To our knowledge no study to date has measured the potential differences in gown particle contamination to support this hypothesis. QUESTIONS/PURPOSES: We compared a commonly used single-fan system versus a two-fan system and asked: (1) Which fan system results in less gown particle contamination? (2) Are there differences between the systems in the location of contamination? METHODS: Using an existing experimental study model, two surgeons performed five 30-minute TKA simulations comparing a single-fan to a double-fan helmet system after applying fluorescent powder to the hands, axillae, and chest. Both are two-piece hood and gown systems. The single-fan sits on top of the helmet blowing air into the suit; the double-fan system has a second fan positioned at the rear blowing out spent air. Ultraviolet light-enhanced photographs were subsequently obtained of the flexor and extensor surfaces of the arms, axillary areas, and front and back of the chest. We chose these locations because they all contain either a seam or an overlap between gown and hood or gloves through which particles can escape. The images were scored for contamination on a scale of 1 (zero specks) to 4 (> 100 specks) by three independent observers. Interobserver correlation was assessed through Spearman’s test yielding 0.91 (95% CI 0.86 to 0.94; p < 0.0001), 0.81 (95% CI 0.73 to 0.87; p < 0.0001) and 0.87 (95% CI 0.80 to 0.91; p < 0.0001) between observers 1 and 2, observers 1 and 3, and observers 2 and 3, rendering the used scale reliable. Results of the observers were averaged and compared using the Mann-Whitney U test. RESULTS: There was no difference in overall gown particle contamination between the systems (overall single-fan median contamination score 2.5 of 4 [interquartile range Q1-Q3 0-3.42] versus double fan 1 out of 4 (Q1-Q3 0-3); p = 0.082), but all tests showed there was contamination at the gown-glove interface. In general, there were few differences between the two systems in terms of location of the contamination; however, when comparing only the axillary regions, we found that the single-fan group (median score 3.67 [Q1-Q3 3-4]) showed more contamination than the double-fan group (2.33 [Q1-Q3 0-3.08]); p = 0.01. CONCLUSION: We found no difference in gown particle contamination between a single-fan and a double-fan helmet design. However, we note that contamination was present in all tests with both systems, so surgeons should not assume that these systems provide a contamination-free environment. CLINICAL RELEVANCE: When using such helmets, the surgeon should not place items close to the axillary region because the seam of the gown may have low resistance to particle contamination. Gown designs could be improved by creating better seals, especially at the arm-body seam.
- Published
- 2020
63. Mobile wet dust collector
- Author
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Oršanić, Mislav and Žeželj, Dragan
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TEHNIČKE ZNANOSTI. Strojarstvo ,pročišćivanje zraka ,voda ,zagađenje česticama ,water ,particle contamination ,pročišćavanje zraka ,air filtration ,TECHNICAL SCIENCES. Mechanical Engineering - Abstract
Ovaj završni rad prikazuje proces razvoja i konstruiranja premjestivog uređaja za pročišćavanje zraka vodom. Prvo je napravljena analiza tržišta i kompletnih rješenja te funkcijska struktura proizvoda. Za potrebne funkcije proizvoda u morfološkoj matrici su dani prijedlozi rješenja te su na temelju njih generirana dva koncepta. Vrednovanjem je odabran bolji koji je potom detaljno razrađen. Za odabrani koncept izrađen je 3D model korištenjem Solidworks programskog paketa, proveden potreban proračun komponenti te izrađena tehnička dokumentacija u zadanom opsegu. This bachelor thesis shows the process of developing and designing a mobile wet dust collector. In the beginning of the thesis market analysis and functional structure of the product was made. For different functions of the product several different solutions were given. Based on that two concepts were generated. Based on evaluation of them the better one was chosen. The chosen concept was then fully elaborated. For the chosen concept 3D model was made using Solidworks, alongside with required calculations and technical documentation in foreseen range.
- Published
- 2020
64. ОПРЕДЕЛЕНИЕ ОБЪЕМНОГО СОДЕРЖАНИЯ ЗАГРЯЗНЕНИЙ В РАБОЧЕЙ ЖИДКОСТИ ГИДРОСИСТЕМ МАШИН, ИСПОЛЬЗУЕМЫХ В ДОРОЖНОМ СТРОИТЕЛЬСТВЕ
- Subjects
glass tube and volumetric content ,частицы загрязнения ,стеклянная трубка и объемное содержание ,hydraulic system ,рабочая жидкость ,particle contamination ,express-analyzer ,экспресс-анализатор ,гидросистема ,working fl uid ,стакан ,glass - Abstract
В статье рассмотрены конструкция и принцип работы экспресс-анализатора для определения объемного содержания загрязнений в рабочей жидкости гидросистем машин используемых в дорожном строительстве. Приведены расчеты для определения длины заполнения стеклянной трубки частичками загрязнения, объема специального стакана, состоящего из стального усеченного конуса и стеклянной трубки и движения частицы в жидкости., The article discusses the structure and principle of operation of the express-analyzer for determining the voluminous content of in the working fl uid of hydraulic systems of machines used in road construction. The calculation is given for fi lling the glass tube with particles of contaminants, the volume of a special glass consisting of a steel truncated cone and a glass tube and the movement of a particle in a fl uid., №8(134) (2020)
- Published
- 2020
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65. Effect of recycled content and rPET quality on the properties of PET bottles, part III : Modelling of repetitive recycling
- Author
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Fresia Alvarado Chacon, Eggo Ulphard Thoden van Velzen, and M.T. Brouwer
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0301 basic medicine ,Particle contamination ,business.product_category ,Pellets ,Collection system ,Part iii ,modelling ,03 medical and health sciences ,chemistry.chemical_compound ,0404 agricultural biotechnology ,contamination ,BBP Sustainable Chemistry & Technology ,Bottle ,Polyethylene terephthalate ,General Materials Science ,PET bottles ,recycled content ,030109 nutrition & dietetics ,Mechanical Engineering ,04 agricultural and veterinary sciences ,General Chemistry ,Contamination ,Pulp and paper industry ,040401 food science ,chemistry ,Environmental science ,business ,accumulation - Abstract
The presence of contaminants in polyethylene terephthalate (PET) bottles and derived materials from the various steps in the recycling loop is studied. Based on these measurements, a model is proposed to generically describe the accumulation of these contaminants within closed‐loop recycling schemes for PET bottles. The measured levels of particle contamination and chlorine content of PET bottles, pellets, and intermediate recycling products are used to derive the modelling parameters. Previously determined relations between these measured parameters and critical bottle properties are used to model the effect of the accumulation of the contaminants on the bottle properties. The measurements reveal that the type of collection system influences the accumulation of contaminants in PET bottles greatly. PET bottles in mono‐collection systems accumulate less contaminants than PET bottles in co‐collection systems do. Therefore, PET bottles within recycling schemes using mono‐collection systems can contain more recycled content than those from co‐collection systems, without exceeding acceptation limits on critical bottle properties such as haziness, yellowing, and migration.
- Published
- 2020
66. Optimizing hydraulic reservoirs using euler-eulerlagrange multiphase cfd simulation
- Author
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Muttenthaler, Lukas, Manhartsgruber, Bernhard, and Dresdner Verein zur Förderung der Fluidtechnik e. V. Dresden
- Subjects
Optimization ,Hydraulic Reservoir ,Cfd simulation ,ddc:621.3 ,Mechanics ,Particle Contamination ,symbols.namesake ,12th International Fluid Power Conference ,Multiphase CFD Simulation ,12. IFK, Hydraulikbehälter, Partikelverunreinigung, Mehrphasen-CFD-Simulation, Optimierung ,Euler's formula ,symbols ,ddc:620 ,12th International Fluid Power Conference, Hydraulic Reservoir, Particle Contamination, Multiphase CFD Simulation, Optimization ,Geology - Abstract
Well working hydraulic systems need clean hydraulic oil. Therefore, the system must ensure the separation of molecular, gaseous, liquid and solid contaminations. The key element of the separation of contaminants is the hydraulic reservoir. Solid particles are a major source of maintenance costs and machine downtime. Thus, an Euler-Euler-Lagrange multiphase CFD model to predict the transport of solid particles in hydraulic reservoirs was developed. The CFD model identifies and predicts the particle accumulation areas and is used to train port-to-port transfer functions, which can be used in system models to simulate the long-term contamination levels of hydraulic systems. The experimental detection of dynamic particle contamination levels and particle accumulation areas validate and confirm the CFD and the system model. Both models in combination allow for parameter and design studies to improve the fluid management of hydraulic reservoirs.
- Published
- 2020
- Full Text
- View/download PDF
67. Effect of recycled content and rPET quality on the properties of PET bottles, part I: Optical and mechanical properties
- Author
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M.T. Brouwer, Fresia Alvarado Chacon, and Eggo Ulphard Thoden van Velzen
- Subjects
0301 basic medicine ,Particle contamination ,030109 nutrition & dietetics ,Materials science ,business.product_category ,Environmental stress cracking ,colour ,Mechanical Engineering ,Radiochemistry ,particle contamination ,04 agricultural and veterinary sciences ,General Chemistry ,recycling ,040401 food science ,haze ,03 medical and health sciences ,0404 agricultural biotechnology ,Linear relationship ,environmental stress cracking ,BBP Sustainable Chemistry & Technology ,Bottle ,General Materials Science ,PET bottles ,business - Abstract
The effect of recycled content and type of recycled poly (ethylene terephthalate) (rPET) on the haziness; colour parameters L*, a*, and b*; total colour change; ultraviolet‐visual spectrum (UV‐VIS) absorption; and environmental stress cracking (ESC) of PET bottles was studied. Three series of PET bottles were made at a small scale production facility with same type of virgin PET and three different types of rPET with recycled contents of 25%, 50%, 75%, and 100%. Also, the particle contamination of the produced PET bottles was studied by dissolving bottle fragments and counting the insoluble particles. A linear relationship was found between the haziness of PET bottles and the particle contamination, with a coefficient of determination of 0.96. Linear relationships were also found between the colour parameters L* and b* and the particle contamination of the PET bottles, but the slope differed for each type of rPET. The origin of rPET (mono‐collection or cocollection) seems to be the crucial factor determining particle contamination and colour of the produced bottles. No correlation was found between the recycled content and the incidence of ESC. However, PET bottles in which high intrinsic viscosity (IV) values were measured showed lower chances of ESC than PET bottles with low IV values
- Published
- 2020
68. Advanced Data Analysis Strategies for Understanding Particle Contamination in Chemical Distribution Systems
- Author
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David Green and Dan Rodier
- Subjects
Particle contamination ,Materials science ,business.industry ,General Materials Science ,Chemical distribution ,Condensed Matter Physics ,Process engineering ,business ,Atomic and Molecular Physics, and Optics - Abstract
Advanced data analysis techniques can be implemented to quantitatively assess particle contamination data in state-of-the-art chemical distribution systems. Through examining the distribution of the rate of particle detection compared to Poisson’s distribution, it is possible to determine if particle variations are random or systematic and allow for the focus of improvement efforts to reduce particle levels with time. By analyzing the particle contamination data in the frequency domain via Fourier transform analyses, periodic cycles of contamination can be identified with the goal of associating contamination events with activities within the chemical delivery system.
- Published
- 2018
69. Partide contamination effects in extreme ultraviolet lithography: enhanced theory for the analytical determination of critical particle sizes.
- Author
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Brandstetter, Gerd and Govindjee, Sanjay
- Subjects
- *
EXTREME ultraviolet lithography , *LITHOGRAPHY , *PARTICLE size determination , *RETICLES , *OPTICAL instruments - Abstract
Existing analytical and numerical methodologies are discussed and then extended in order to calculate critical contamination-particle sizes, which will result in deleterious effects during extreme ultraviolet lithography E-chucking in the face of an error budget on the image-placement-error (IPE). The enhanced analytical models include a gap-dependent clamping pressure formulation, the consideration of a general material law for realistic particle crushing and the influence of frictional contact. We present a discussion of the defects of the classical de-coupled modeling approach where particle crushing and mask/chuck-indentation are separated from the global computation of mask bending. To repair this defect we present a new analytic approach based on an exact Hankel transform method which allows a fully coupled solution. This will capture the contribution of the mask-indentation to the image-placement-error (estimated IPE increase of 20%). A fully coupled finite element model is used to validate the analytical models and to further investigate the impact of a mask backside CrN-layer. The models are applied to existing experimental data with good agreement. For a standard material combination, a given IPE tolerance of 1 nm and a 15 kPa closing pressure, we derive bounds for single particles of cylindrical shape (radius x height < 44 µm²) and spherical shape (diameter < 12 µm). [ABSTRACT FROM AUTHOR]
- Published
- 2012
- Full Text
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70. Behavior of Particles Reflected by Turbo Molecular Pump in Plasma Etching Apparatus.
- Author
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Kobayashi, Hiroyuki, Maeda, Kenji, and Izawa, Masaru
- Subjects
- *
PLASMA etching , *COLLIDERS (Nuclear physics) , *SEMICONDUCTOR wafers , *PHOTORESISTS , *PHOTOLITHOGRAPHY - Abstract
The behavior of particles that are reflected in a turbo molecular pump is investigated by measuring particle trajectories and the number of particles that fall on a wafer in a plasma etching apparatus. Some scattered particles collide with the wafer at high velocity, which damage fine patterns of the photoresist on the wafer. Particle contamination can be reduced by supplying carrier gas to form a down-flow when the etching plasma is not discharged. During plasma discharge, the number of particles that fall on the wafer decreases because particles are trapped near the plasma-sheath boundary. The down-flow gas reduces particle contamination by 90% through the etching sequence, including wafer transfer. [ABSTRACT FROM AUTHOR]
- Published
- 2009
- Full Text
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71. Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical polishing
- Author
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Huang, Yating, Lu, Xinchun, Pan, Guoshun, Lee, Bill, and Luo, Jianbin
- Subjects
- *
INDUSTRIAL contamination , *HARD disks , *SUBSTRATES (Materials science) , *NANOPARTICLES , *CLEANING , *GRINDING & polishing , *PARTICLE size distribution , *INDUSTRIAL applications of ultrasonic waves - Abstract
Abstract: Scrub, ultrasonic and megasonic are widely used in industry as post-CMP (chemical mechanical polishing/planarization) cleaning procedure. In this paper experiments and results are described to analyze the particle contaminations of hard disk substrate after each process of post-CMP cleaning. A scatter spot method has been exploited to detect the location and characteristics of the particles. SEM with EDX is used to observe and analyze the particles’ shape and size as well as the elements. The results indicate that brush scrub process can remove 99% contaminations after CMP but not that efficient for submicron particle. Megasonic is a refined method for cleaning nano-particles. However, contaminations like metallic particles and bacteria from the equipment may cause pollution. The abrasive particles embedded in the plating pits cannot be removed by mechanical force. Pollution in the dryer is also discussed. [Copyright &y& Elsevier]
- Published
- 2009
- Full Text
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72. Impact of particles in ultra pure water on random yield loss in IC production
- Author
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Wali, Faisal, Knotter, D. Martin, Mud, Auke, and Kuper, Fred G.
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INDUSTRIAL contamination , *PARTICULATE matter , *PHYSICAL measurements , *WATER analysis , *INTEGRATED circuits , *MICROELECTRONICS , *SEMICONDUCTOR defects , *SEMICONDUCTOR wafers - Abstract
Abstract: The influence of environmental particle contamination on offline measured defects and manufacturing yield in integrated circuits is discussed. One of the sources of particle contamination is ultra pure water used in different production tools at different stages of processing. Particle count data measured in ultra pure water is compared with the offline defects caused by process tools and the relation has been statistically confirmed. Particle count data is also compared with the defect density of large size products. An impact of particle contamination on yield of 4–6% has been found. In this study, fundamentals are provided to define the meaningful specifications of ultra pure water for wafer fabrication. [Copyright &y& Elsevier]
- Published
- 2009
- Full Text
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73. Bench Testing of Sensors Utilized for In-Line Monitoring of Lubricants and Hydraulic Fluids Properties.
- Author
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Pochi, Daniele, Grilli, Renato, Fornaciari, Laura, Betto, Monica, Benigni, Stefano, and Fanigliulo, Roberto
- Subjects
- *
PROPERTIES of fluids , *HYDRAULIC fluids , *ELECTRIC conductivity , *DETECTORS , *FARM tractors , *VEGETABLE oils , *TRANSPARENT ceramics , *PHORBOL esters - Abstract
This work reports the results of a study on the behaviour of five sensors recently developed for oil conditions monitoring, installed in-line in an experimental test rig for lubricants. The tests were carried out on seven oils of different origins (one synthetic ester, two bio-based synthetic esters, four vegetable oils) and use (two UTTOs and five hydraulic oils), under controlled working conditions, according to a specially designed test method. At first, the study concerned the identification of the conditions for the correct sensors' installation. Then, the tests started applying to the fluids severe work cycles intended to accelerate oil ageing. The data of viscosity, permittivity, relative humidity, electric conductivity, particle contamination, and ferro-magnetic particles provided by the sensors were compared to the results of laboratory analyses made on oil samples taken during the tests with the aim of verifying the sensors measurements accuracy and reliability and selecting the more suitable ones to in-line oil conditions monitoring, in the perspective of introducing them also in field applications, e.g., on agricultural tractors, for preventing damages due to oil deterioration, and in managing the machine maintenance. [ABSTRACT FROM AUTHOR]
- Published
- 2021
- Full Text
- View/download PDF
74. Particle Identification in Terms of Acoustic Partial Discharge Measurements in Transformer Oils.
- Author
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Sharkawy, R. M., Abdel-Galil, T. K., Mangoubi, R. S., Salama, M. M., and Bartnikas, R.
- Subjects
- *
ELECTRIC discharges , *SOUND , *ELECTRIC transformers , *COLLISIONS (Nuclear physics) , *WAVELETS (Mathematics) , *ELECTRICITY , *ELECTRICAL engineering - Abstract
Acoustic measurements of partial discharge (PD) are employed to classify particles in transformer mineral oil according to material and size. Wavelet multi-resolution analysis data of the acoustic signals together with higher order statistics of the particle intercollision times and magnitudes comprise the input features to a Support Vector Machine (SVM) classifier. The training and validation measurement data, which are contaminated by time varying noise, are first filtered using wavelet decomposition. Results indicate that the SVM algorithm with the selected features provides a remarkably high success rate when classifying particles by size and material type. A potentially significant conclusion is that acoustic measurements alone are by themselves effective in classifying discharged particles in terms of the foregoing selected features. The proposed algorithm can be employed to enhance quality control procedures based on acoustic measurements of partial discharge. [ABSTRACT FROM AUTHOR]
- Published
- 2008
- Full Text
- View/download PDF
75. Risk factors for particulate and microbial contamination of air in operating theatres.
- Author
-
Scaltriti, S., Cencetti, S., Rovesti, S., Marchesi, I., Bargellini, A., and Borella, P.
- Abstract
Summary: This study was designed to standardize dust collection in recently built operating theatres equipped with a continuous monitoring system. The objectives were to establish the relationship between microbiological and dust contamination, and then to compare those parameters with the main indicators of surgical activity in order to better define risk factors affecting air quality. The air quality during 23 surgical operations was studied in three conventionally ventilated operating theatres. Microbiological air counts were taken using both passive and active sampling methods. Air dust particles, ≥0.5 and ≥5μm in size, were measured using a light-scattering particle analyser. The overall dust load was mainly (98%) composed of fine particulate matter, most probably due to its longer suspension time before settlement. These particles positively correlated with operation length, but not with surgical technique, suggesting that fine particles may be a good tracer of operation complexity. In contrast, the surgical technique was the main predictor for the concentration of particles ≥5μm, with a higher risk from general conventional surgery compared with scope surgery. The frequency of door-opening, taken as an index of staff and visitor movement, was the main negative predictor of over-threshold values of both fine and larger dust particles but, conversely, was a positive predictor of raised bacterial counts. [Copyright &y& Elsevier]
- Published
- 2007
- Full Text
- View/download PDF
76. SVM Classification of Contaminating Particles in Liquid Dielectrics Using Higher Order Statistics of Electrical and Acoustic PD Measurements.
- Author
-
Sharkawy, R. M., Mangoubi, R. S., Abdel-Galil, T.K., Salama, M. M. A., and Bartnikas, R.
- Subjects
- *
LIQUID dielectrics , *PATTERN perception , *MACHINE learning , *MACHINE theory , *MINERAL oils - Abstract
Electrical and acoustic partial discharge (PD) measurement and pattern recognition procedures are described for detecting and identifying contaminating particles in transformer mineral oils. This work introduces the use of Support Vector Machines (SVM), a nonlinear non-parametric automatable machine learning algorithm, for the purpose of classifying the size and composition of such particles. The training and validation of acoustic and electrical PD measurement data, which are contaminated by time varying noise, are first filtered adaptively using wavelet decomposition. Statistics of a particle's impact upon collision with the walls of a tank, containing the electrode test assembly and the inter arrival time between collisions constitute the features for the SVM classifier. These statistics include higher order moments and the entropy of the estimated density function of the features. Results based on experimental training and testing data indicate that fusing of the acoustic and electric PD information at the features level provides a nearly perfect classification success rate. These observations demonstrate that, while electrical and acoustic PD data are correlated, they contain individually independent and complementary information regarding the state and condition of transformer type mineral oils. [ABSTRACT FROM AUTHOR]
- Published
- 2007
- Full Text
- View/download PDF
77. Bimodal Dielectric Breakdown Failure Mechanisms in Cu–SiOC Low- k Interconnect System.
- Author
-
Tam Lyn Tan, Nam Hwang, and Chee Lip Gan
- Abstract
The obtained bimodal VBD failure distribution for Cu/SiOC low-k dielectric is attributed to the two main failure mechanisms that are distinguished by their current-voltage curves and physical failure modes. Type 1 failures show an abrupt increase in leakage current, i.e., an electrical short, without any apparent physical damage. Extrinsic factors such as shorted Cu lines and particle contamination that is already present in between metal lines are believed to be the cause of failure, and this is supported by the temperature independence. On the other hand, Type 2 failure mode follows an intrinsic breakdown mechanism due to its high VBD, temperature dependence of VBD, and visible burn marks, indicating thermal breakdown of the dielectrics in the interconnect system. [ABSTRACT FROM PUBLISHER]
- Published
- 2007
- Full Text
- View/download PDF
78. Particle contamination, the disruption of electronic connectors in the signal transmission system.
- Author
-
Zhang, Ji-gao
- Abstract
Particle pollution in air, also sometimes known as fine dust contamination, may cause electric contact failure. Recent research further proved that the fine particle is becoming a major disruption of the electronic connectors in signal transmission system. This paper specifies the connector contact in mobile phone application. To study the contact failure of mobile phone, a series of inspections and analytical research methods are introduced. Special features that cause the contact failure are summarized. Particle accumulation is the main problem; organic material such as lactates from sweat of the human body may act as adhesives to stick the separate particles together and make them adhere on the contact surface; chemical properties of dust cause serious local corrosion. The corrosion products may trap the particles and firmly attach on the contact surface; micro motion frequently occurs at the contact interface. Hard particle can be embedded into the surface, and soft particle could be squeezed and inserted into the contact; silicon compounds in dust play the most important role in forming high resistance regions that lead to failure; deposition of particles depends on the amount of materials, static electricity attracting force and gravity force applied on the particles. Current dust test can hardly reflect the serious contact failure. It is difficult to simulate the complexity of contact failure caused by particle contamination. Thus alternative ways of simulation experiment and improvement of contact reliability are proposed. [ABSTRACT FROM AUTHOR]
- Published
- 2007
- Full Text
- View/download PDF
79. Abnormal metal oxide formation induced by residual charging in plasma etch process
- Author
-
Yen, T.F., Liang, O., Lu, C.-W., and Chiu, K.-F.
- Subjects
- *
PLASMA etching , *ELECTRON cyclotron resonance sources , *METALLIC oxides , *OXIDES - Abstract
Abstract: Electron cyclotron resonance plasma with SF6 and Cl2 gas mixture were used for tungsten plug etch-back processes. The properties of electric contacts between tungsten plugs and Al/Ti/TiN interconnect lines, fabricated by this etching process, have been studied. Particles and abnormal oxide layers at the plug/line interfaces have been found to be the main factor to cause deterioration of the electric contacts. Mechanisms for particle transportation and metal oxide formation have been proposed. The phenomenon was attributed to the residual charging effect, which occurred immediately after the plasma power being turned off. A technique to prevent the residual charging induced tungsten oxide growth has been developed and applied in industrial fabrication lines. [Copyright &y& Elsevier]
- Published
- 2007
- Full Text
- View/download PDF
80. The detection of plastic deformation in rolling element bearings by acoustic emission
- Author
-
Stefan Golling, Stephan Schnabel, Pär Marklund, and Roland Larsson
- Subjects
Particle contamination ,Materials science ,Mechanical Engineering ,Acoustics ,Rotational speed ,02 engineering and technology ,Surfaces and Interfaces ,021001 nanoscience & nanotechnology ,Surfaces, Coatings and Films ,020303 mechanical engineering & transports ,0203 mechanical engineering ,Acoustic emission ,Mechanics of Materials ,Solid mechanics ,otorhinolaryngologic diseases ,Raceway ,Transient (oscillation) ,Composite material ,0210 nano-technology - Abstract
The detection of plastic deformation caused by particle contamination in rolling element bearings using acoustic emission is reliable at low speeds as shown in several studies. However, there are no studies at greater speeds of the detection of plastic deformation by acoustic emission in rolling element bearings. The acoustic emission signals of rolling element bearings have, however, been shown to be dominated by transient force signals which are elastic waves caused by transient forces acting at the raceway surface. The results of the test showed a dominance of transient force signals at elevated speeds, which masks signals caused by plastic deformation and prohibits the detection of particle contamination, while at low rotational speed plastic deformation is detected by acoustic emission.
- Published
- 2017
81. Spectrographic approach for the diagnosis of rf breakdown in accelerating rf structures
- Author
-
Tomizawa, H., Taniuchi, T., Hanaki, H., Igarashi, Y., Yamaguchi, S., and Enomoto, A.
- Subjects
- *
SURFACE analysis , *MASS spectrometry , *SOLUTION (Chemistry) , *INTERMEDIATES (Chemistry) - Abstract
The acceleration gradient of an electron linac is limited by rf breakdown in its accelerating structure. We applied an imaging spectrograph system to study the mechanism of rf breakdown phenomena in accelerating rf structures. Excited gases released from the surface emit light during rf breakdown with the type of gases dependent upon surface treatments and rinsing methods. To study rf breakdown, we used 2-m-long accelerating structures and investigated the effects of a high-pressure ultrapure water rinsing (HPR) treatment applied to these rf structures. We performed experiments to study the gases released from the surface of rf structures with quadrupole mass spectroscopy and imaging spectrography of atomic lines. As a result, just after rf breakdown, we could observe instantly increasing signals at mass numbers 2 (H2), 28 (CO), and 44 (CO2), but not 18 (H2O). We also conducted spectral imaging of the light emissions from the atoms and ions in a vacuum excited through rf breakdown. Using an accelerating structure without HPR treatment, we observed atomic lines at 511 nm (Cu I), 622 nm (Cu II), and 711 nm (C I). With HPR treatment, the atomic lines were observed at 395 nm (O I), 459 nm (O II), 511 nm (Cu I), 538 nm (C I), 570 nm (Cu I), 578 nm (Cu I), 656 nm (H: Balmer alpha), and 740 nm (Cu II). In an additional surface analysis, we found carbon as the most dominant element, with the exception of copper, on the blackened surface of the rf-conditioned accelerating structure without HPR treatment. Based on these experiments, we concluded that some components of the plasma can affect a copper surface. We also have provided a phenomenological review of our experimental results and a simple explanation of rf conditioning with rf breakdown. [Copyright &y& Elsevier]
- Published
- 2004
- Full Text
- View/download PDF
82. Electrical Breakdown Triggered by a Free Conducting Spherical Particle in Saturated Liquid He I and He II under Uniform dc Field.
- Author
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Hara, M., Nakagawa, H., Suehiro, J., and Shinohara, T.
- Subjects
- *
ELECTRIC breakdown , *LIQUID helium , *ELECTRIC fields , *DIRECT currents , *ELECTRIC discharges , *ELECTRODES - Abstract
This paper is concerned with the pre-breakdown, phenomena and the breakdown voltage characteristics, in the presence of a free moving conducting spherical particle, of saturated normal liquid helium (He I) and saturated superfluid liquid helium (He II) under uniform dc field. Experiments show that the particle lifts off around the theoretical value of the lift-off electric field, and the particle oscillates between the electrodes at higher applied voltages. In that case, the microdischarge appears just before the charged particle collides with the oppositely charged electrode, and the bubble is generated at the moment of every collision of the particle with the electrode. it is confirmed theoretically as well as experimentally that the maximum bubble radius in He II is nearly proportional to the E[SUP1/3,SUBin], which is the released energy from the particle for the bubble generation. The insulation environment before the electrical breakdown suddenly changes at the λ-point since the bubble behavior in He I and He II greatly differs, In the characteristics of the breakdown, voltage vs. liquid pressure, a clear discontinuity appears at the λ-point. Furthermore, the breakdown voltage in the parallel plane gap contaminated by a particle is lower than that in the rod-plane gap without a particle. it is found that the breakdown voltage characteristics are closely related to the trigger effect of the microdischarge and the bubble generation. [ABSTRACT FROM AUTHOR]
- Published
- 2003
- Full Text
- View/download PDF
83. Photomask specifications for high energy physics detectors
- Author
-
Pindo, Massimiliano
- Subjects
- *
DETECTORS , *STRIP transmission lines , *ION beam lithography - Abstract
Planar technologies used for radiation detector fabrication imply an extensive use of photomasks whose characteristics are critical in determining final detector performance. Compatibly with their manufacturing process, photomasks must satisfy the application-specific requirements dictated both by wafer manufacturers and detector final users. The design and realization of microstrip and pixel detectors, widely used in high energy physics experiments, ask for intensive scientific effort, advanced technology and important economical investments. Photomask specification definition is one of the fundamental steps to optimize detector fabrication processes and fulfill experimental requirements at the most appropriate cost. [Copyright &y& Elsevier]
- Published
- 2002
- Full Text
- View/download PDF
84. Sensitivity and rejection capability of thermal asperities in a hard disk drive
- Author
-
Choa, Sung-Hoon and Sharma, Vinod
- Subjects
- *
MAGNETORESISTANCE , *MAGNETISM - Abstract
With the use of giant magneto-resistive (GMR) head, thermal asperity (TA) has been a big concern in drive industry. In this study, we investigated several heads and disk related factors that affect the TA sensitivity of the drive. TA experiments were conducted by introducing the particles in the drives using a particle injection chamber. It is found that the slider ABS shape can help to reduce TA or contamination at the head/media interface. However, TA sensitivity of the drive mainly depended on the intrinsic property of GMR sensor. TA sensitivity of head increases as the bias current increases. GMR head is much less sensitive to TA compared with MR head. However, if similar bias current is applied to both MR and GMR heads, TA sensitivity of GMR head became almost identical to that of MR head. TA sensitivity of different types of disks was also studied and the dominant factor affecting the TA sensitivity is observed to be the scratch resistance of the carbon overcoat layer. [Copyright &y& Elsevier]
- Published
- 2002
- Full Text
- View/download PDF
85. Visualization and numerical simulation of fine particle transport in a low-pressure parallel plate chemical vapor deposition reactor
- Author
-
Setyawan, Heru, Shimada, Manabu, Ohtsuka, Kenji, and Okuyama, Kikuo
- Subjects
- *
CHEMICAL vapor deposition , *AEROSOLS , *LASERS in chemistry - Abstract
The behavior of fine particles in a low-pressure parallel plate chemical vapor deposition reactor was investigated by constructing a system that permits particle motion in the reactor to be visualized. The test spherical silica aerosol particles, which were
1.0 μm in diameter and dispersed in argon gas, were fed into the reactor from the outside and particle motion was detected by a laser light scattering method. The effect of operating conditions, such as pressure and temperature, on particle transport in the reactor was investigated. The pressure was varied from 2.0 to4.0 Torr and the wafer-substrate plate temperature was varied over the range of25°C to300°C . A three-dimensional numerical simulation was performed using the commercially available computational fluid dynamics code Fluent. A detailed configuration of the reactor, including the showerhead structure was considered when investigating this mechanism. It is found, both experimentally and by numerical simulation that, when the wafer-substrate plate is not heated, the effect of pressure on particle trajectory in the space between plates cannot be observed. However, at elevated temperature, i.e. when the wafer-substrate plate is heated, the particle trajectory is apparently influenced by pressure. In addition, the effect of thermophoresis, as the result of a temperature gradient by heating of the wafer-substrate plate is very pronounced for gas pressures of both 2.0 and4.0 Torr . The experimentally observed phenomena were satisfactorily reproduced by simulation. [Copyright &y& Elsevier]- Published
- 2002
- Full Text
- View/download PDF
86. Use of MoS2T coating to reduce wear particles generated in HDD assembly
- Author
-
TuchindaKaruna, SuranuntchaiSurasak, ManonukulAnchalee, and LaksanasittiphanSomchai
- Subjects
Particle contamination ,Materials science ,Manufacturing process ,business.industry ,Metallurgy ,02 engineering and technology ,engineering.material ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,020303 mechanical engineering & transports ,0203 mechanical engineering ,Coating ,Manufacturing ,engineering ,General Materials Science ,Adhesive ,Thin film ,Composite material ,0210 nano-technology ,business - Abstract
Particle contamination is a major problem in the hard disk drive (HDD) manufacturing industry, and the tightening of screws during the manufacturing process has been found to be one of the main sources of particles. The aim of this research is to study the possibility of using molybdenum disulfide titanium (MoS2T) composite coating to reduce stainless steel particles that are generated in the screw-tightening process in HDD. The experiments used for simulating dry sliding wear mechanisms were carried out by using a TriboGear machine. MoS2T film was coated on an S2 tool steel bit and a martensitic 410 stainless steel screw; the film was deposited by the sputtering technique with a film thickness of 1·0 μm. Dry sliding wear mechanisms were simulated under both single and loading cycle contact wear. The results showed that the use of solid lubricant MoS2T coating is capable of total prevention of generation of stainless steel particles due to adhesive wear. This study also shows that no stainless steel particles were found on the carbon tape, suggesting that no particles were generated in the single loading test. However, the coating showed surface wear, with the film gradually peeling off during loading cycle contact wear experiments.
- Published
- 2016
87. An Effect on Form Particle Contamination in Biodegradable Transformer Oil
- Author
-
Siti Solehah Md Ramli, Mkm Jamil, Nur Fadhilah Jamaludin, Nur Atharah Kamarzaman, Nurul Huda Ishak, M. K. A. M. Khairudin, and Nur Darina Ahmad
- Subjects
Particle contamination ,Materials science ,Transformer oil ,Metallurgy ,chemistry.chemical_element ,Insulator (electricity) ,Contamination ,Copper ,chemistry ,medicine ,Breakdown voltage ,Mineral oil ,Corn oil ,medicine.drug - Abstract
Nowadays, power transformer is most crucial electrical equipment in a power system. Researcher has been emphasized a lot of researches on natural ester oils to replace mineral oil that act as insulating liquid in power transformer. In this paper, an effort has been made to investigate corn oil (CO) as alternate liquid insulation to mineral oil (MO). Copper are used as particles contamination in this project. There are 12 oil samples has been prepared. Two samples which are pure MO and pure CO for before aging and 10 oil samples which are five samples of pure MO and five samples of pure CO for after aging. The particles contamination that used in this experiment which is copper with different size of length was added in each sample for after aging. The length sizes of copper were 5cm, 10cm, 15 cm, 20cm, 25cm and 30cm. In this report, the investigation of AC breakdown voltage involved two stages which are before aging and after aging. For before aging, two oil samples are only conducting AC breakdown voltage. Moreover, for after aging another 10 sample has been heated in the oven with temperature 115°C at 96 hours in order to investigate the effect of particle contamination in the transformer oil. From the experiment result that conducted, pure CO higher value of AC breakdown voltage than pure MO for before aging. But, after aging process, the value of pure MO with difference size of copper is higher than pure CO. It show that CO is good oil insulator to replaced MO for the future, but for use in long term, MO still the best insulator because has higher AC breakdown voltage than CO after aging process.
- Published
- 2019
88. Progress in imaging performance with EUV pellicles
- Author
-
C. Piliego, K. Ricken, Par Broman, Felix Wahlisch, D. de Graaf, O. Romanets, and Michiel Kupers
- Subjects
Particle contamination ,Scanner ,Materials science ,Optics ,business.industry ,Extreme ultraviolet lithography ,Reticle ,Wafer ,Surface finish ,business ,Line width ,Critical dimension - Abstract
The purpose of pellicles is to protect reticles from particle contamination, thus reducing the number of defects and increasing yield. In this paper we show how recent progress in pellicle technology has succeeded in solving the main challenges in imaging with EUV pellicles. We demonstrate this using the recent results of imaging tests in scanner, EUV reflectivity measurements, and lifetime testing. EUV light reflectivity of pellicles is one of the effects that have negatively impacted imaging with pellicles in the past. Light reflected from pellicles leads to the overexposure of neighboring fields in the corners and edges. Tests with pellicles produced using a new process show EUV reflectivity within specification of 0.04%, and measured impact on critical dimension in the corners below 0.15nm for multiple pellicles. Lifetime performance was tested by exposing up to 3000 wafers with a pellicle while periodically assessing the stability of imaging metrics. The lithometrics studies include: critical dimension (CD) and critical dimension uniformity (CDU), and contrast (via line width roughness). DoseMapper, which is an EUV scanner application developed to improve CDU, was applied during the lifetime test. Here we show that it can successfully reduce the pellicle-induced CDU and CDU over lifetime (previously shown to be dominated by pellicle EUV transmission drift). Our results using DoseMapper show that whilst intrafield CDU 3sigma increases over lifetime, it stays comfortably within the 1.1nm NXE3400 ATP specification using DoseMapper.
- Published
- 2019
89. Analytical techniques for charactering radioactive particles deposited in the environment
- Author
-
Brit Salbu and Ole Christian Lind
- Subjects
Radioactive particles ,Radioactive Fallout ,Particle contamination ,Screening techniques ,Radionuclide ,Particle properties ,Particle composition ,010504 meteorology & atmospheric sciences ,Health, Toxicology and Mutagenesis ,Nuclear engineering ,Solid-state ,General Medicine ,010501 environmental sciences ,01 natural sciences ,Pollution ,Radioactivity ,Radiation Monitoring ,Environmental Chemistry ,Environmental science ,Leaching (metallurgy) ,Waste Management and Disposal ,Weather ,0105 earth and related environmental sciences - Abstract
Since 1945, a series of nuclear and radiological sources have contributed to the release of radioactive particles containing refractory elements into the environment. Several years of research have demonstrated that the particle composition will depend on the source, while the release scenarios will influence particle properties of relevance for environmental transfer. Radioactive particles can also carry sufficient amount of radioactivity (MBq) and represent point sources of radiological concern. Most radiological assessment models, however, are based on bulk concentrations, assuming that radionuclides in the environment are evenly distributed. In contrast, radioactive particles and thereby doses are unevenly distributed, while leaching of radionuclides from particles prior to measurements can be partial, potentially leading to underestimation of inventories. For areas affected by particle contamination, information on particle characteristics controlling the particle weathering rates and remobilization of particle associated radionuclides will therefore be essential to reduce the overall uncertainties of the impact assessments. The present paper will focus on analytical strategies, from screening techniques applicable for identifying hot spots in the field, fractionation techniques and single particle extraction techniques as a preparatory mean to apply non-destructive solid state speciation techniques, till leaching techniques applied sequentially to obtain information on binding mechanisms, mobility and potential bioavailability. Thus, a combination of techniques should be utilized to characterize radioactive particles in order to improve environmental assessments for areas affected by radioactive particle fallout.
- Published
- 2019
90. The Science of History: Why the Egyptians Never Smiled for Pictures [NYU School of Medicine, New York Institute of Technology, Stony Brook School of Medicine]
- Author
-
D.O. Kunal Oak, Jasmine J. Kannikal, and D.O. Mohammad Zaidi
- Subjects
Extremely Poor ,Particle contamination ,education.field_of_study ,medicine.medical_specialty ,History ,Family medicine ,Population ,medicine ,Context (language use) ,Diathesis ,medicine.symptom ,Oral health ,education - Abstract
The Ancient Nubians have historically been renowned for their significant contributions to medicine. In spite of this, extremely poor oral health plagued this population. Paleopathological studies depict pronounced dental deterioration patterns far exceeding normal physiological progression. The advanced wear is popularly attributed to sand particle contamination of their daily diets. However, considering that individual wear mechanisms rarely act in isolation, we propose that adverse biochemical factors arising from regular consumption of tetracycline- fortified beer induced calcium malabsorption, and thus provided a synergistic diathesis in potentiating these effects. We examine these implications within the context of prevalent therapeutic remedies, bone fluorescence labeling data, and sociocultural attitudes when making the link between tetracycline and the compromised integrity of teeth, while citing the emergence of antibiotics actually predating formally-accepted convention.
- Published
- 2019
91. Advanced particle contamination control in EUV scanners
- Author
-
Christian Cloin, Michael Lercel, Christophe Smeets, Mark van de Kerkhof, Tjarko Adriaan Rudolf Van Empel, Andrei Mikhailovich Yakunin, Andrey Nikipelov, Vadim Banine, and Ferdi van de Wetering
- Subjects
Scanner ,Particle contamination ,Optics ,Computer science ,business.industry ,Extreme ultraviolet lithography ,Reticle ,Node (circuits) ,Context (language use) ,Contamination ,business ,Lithography - Abstract
With the introduction of the NXE:3400B scanner, ASML has brought EUV to High-Volume Manufacturing (HVM). In this context, ASML is pursuing a dual-path approach towards zero reticle defectivity: EUV-compatible pellicle or zero particles towards reticle by advanced particle contamination control. This paper will focus on the latter approach of advanced particle contamination control and will show that we are able to reduce particle contamination towards reticle to a level that is compatible with HVM requirements for sub-10nm node lithography.
- Published
- 2019
92. Particle contamination monitoring in the backscattering light experiment for LISA
- Author
-
Nicoleta Dinu-Jaeger, Michel Lintz, Arwa Dabbech, Vitalii Khodnevych, and Sibilla Di Pace
- Subjects
Heterodyne ,Particle contamination ,heterodyne ,Chemistry ,business.industry ,interferometer ,Astrophysics::Instrumentation and Methods for Astrophysics ,space ,Space (mathematics) ,backscattering ,Interferometry ,Optics ,Straylight ,business ,Straylight, backscattering, heterodyne, space, interferometer - Abstract
In the context of space-based optics, contamination due to particle deposition on the optics is inevitable and constitutes a critical issue. This gets more challenging for the sensitive heterodyne measurements of the Laser Interferometer Space Antenna (LISA), the space-based gravitational wave observatory to be launched in 2034. Therefore, table-top experiments need to be developed for a better understanding of how micrometer to millimeter sized dust particles, present on optical surfaces, affect LISA measurements. In this work, we present an experimental setup for the simultaneous measurement of the coherent backscattering and the monitoring of particles deposition on the optics to be tested. The results of the first measurements are presented and discussed in this article.
- Published
- 2019
93. Analysis of plasma etching resistance for commercial quartz glasses used in semiconductor apparatus in fluorocarbon plasma.
- Author
-
Choi, Jae Ho, Yoon, JiSob, Jung, YoonSung, Min, Kyung Won, Im, Won Bin, and Kim, Hyeong-Jun
- Subjects
- *
FUSED silica , *PLASMA etching , *CHALCOGENIDE glass , *SILICON oxide , *SURFACE roughness , *FLUOROCARBONS , *QUARTZ - Abstract
The plasma resistance of these commercial quartz glasses was compared, and the product formed by the reaction with plasma was analyzed. Plasma etching was performed in an inductively coupled plasma (ICP) process with a mixture of CF 4 , O 2 , and Ar gases. The mean etching rate of the commercial quartz glasses was 235.5㎚/min, and the p-value of 0.638 determined from the analysis of variance (ANOVA) test showed no statistical significance difference between the impurity content and the etching rate for the samples prepared by the various methods. Thus, it was determined that impurity differences on the ppm level in commercial quartz glasses does not affect the plasma resistance. After plasma etching, the surface roughness was 6.5㎛, which is 45 times greater than the initial surface roughness of 0.14㎛. This is due to the reaction product formed by the chemical reaction of SiO 2 and fluorocarbon during plasma treatment. The product comprised spherical particles with a size of 5–10 ㎛, where silicon oxide and fluoride were the main reaction products, leading to coarsening of the plasma-treated quartz glass. • The purity differences at the ppm level for the quartz had no impact on the plasma resistance properties. • The surface roughness is 6.5㎛ for all quartz glass, which is higher than plasma resistant ceramics. • Particles of silicon oxides and fluorides with sizes of 10–100 ㎚ were formed by reaction between the SiO 2 and CF 4 plasma. • Spherical products with sizes of 5–10 ㎛ size were formed, leading to a coarsening effect. • Dipping due to SiF 4 vaporization and the starting point or falling off point of a reaction product were observed. [ABSTRACT FROM AUTHOR]
- Published
- 2021
- Full Text
- View/download PDF
94. Method for protection of lithographic components from particle contamination
- Author
-
Rader, Daniel [Lafayette, CA]
- Published
- 2001
95. Protection of lithographic components from particle contamination
- Author
-
Rader, Daniel [Lafayette, CA]
- Published
- 2000
96. The use of a flushing and cleaning protocol to remove foreign contaminants – a study from a newly built heat transfer plant with a capacity of 100 metric tonnes
- Author
-
Christopher Ian Wright
- Subjects
Particle contamination ,Waste management ,System maintenance ,020209 energy ,Environmental engineering ,Energy Engineering and Power Technology ,02 engineering and technology ,Contamination ,Industrial and Manufacturing Engineering ,Filter (aquarium) ,Heat transfer ,0202 electrical engineering, electronic engineering, information engineering ,medicine ,Environmental science ,Particle ,Flushing ,Current (fluid) ,medicine.symptom - Abstract
Heat transfer fluid (HTF) cleanliness is critical to the effectiveness and safety of an HTF system. Routine monitoring of HTF condition is a critical part of ongoing HTF system maintenance. However, the condition of any fluid introduced into a HTF system needs to be monitored closely to ensure that foreign contaminants are not introduced. Such contaminants act to accelerate the ageing of an HTF once in operation. The current research concerns the flushing and cleaning protocol that is used to remove foreign contaminants during the building of a new HTF system. The current study was performed in Scandinavia for a client building a new HTF system that had a capacity of 100 metric tons. The system was flushed with Globaltherm® C1 was used to flush and clean the system prior to filling with a synthetic HTF. The value of the protocol was assessed in terms of its ability to remove contaminants – water, environmental and system build contaminants. The protocol involved the use of a fine filter (15 microns pores) and laboratory analysis to assess cleanliness of the fluid. The results from nineteen fluid samples are presented herein. Results show the presence of water and particle contaminants (4, 6 and 14 microns in size) including silicon, aluminium, iron, calcium and zinc. The flushing and cleaning fluid works by suspending particles in solution and these are subsequently drained from the HTF system. The detection of particles in the fluid demonstrates that the flushing and cleaning fluid and the protocol are effective in removing finer particles from a system. Further analysis assessed the relationship between water and particle contaminants. Results showed a positive association between water and the presence of larger particles (i.e., 14 microns). No association was found between water and smaller particles (4 and 6 microns). These data highlight the value of monitoring both water and particle contamination, and that water may be a substitute method to measuring particles directly. The presence of water in a fluid can be observed and detected onsite, so this may be an early sign of other contaminants present in a newly build HTF system. To conclude, the flushing and cleaning protocol described herein is effective in the removal of contaminants during a HTF system build. This protocol has been shown to be effective by subsequent laboratory analysis. The presence of water may be an early sign of environmental contamination and the formation of rust.
- Published
- 2016
97. Investigation of process parameters influence in abrasive water jet cutting of D2 steel
- Author
-
N. Yuvaraj and Murugasen Pradeep Kumar
- Subjects
0209 industrial biotechnology ,Particle contamination ,Materials science ,Response Parameters ,Mechanical Engineering ,Abrasive ,Metallurgy ,Anova test ,Material removal ,02 engineering and technology ,Abrasive water jet ,Surface finish ,equipment and supplies ,021001 nanoscience & nanotechnology ,complex mixtures ,Industrial and Manufacturing Engineering ,020901 industrial engineering & automation ,Mechanics of Materials ,General Materials Science ,Jet impingement ,Composite material ,0210 nano-technology - Abstract
In the present experimental study, abrasive water jet (AWJ) cutting tests were conducted on D2 steel by different jet impingement angles and abrasive mesh sizes. The experimental data was statistically analyzed using the simos–grey relational method and ANOVA test. In addition, the outcome of influencing cutting parameters, namely jet pressure, jet impingement angle, and abrasive mesh size on the different response parameters, namely, the jet penetration, material removal rate, taper ratio, roughness, and topography, were studied. Micro-hardness test and surface morphology analysis were employed to examine the D2 cut surfaces at different AWJ cutting conditions. The chemical element study was performed to determine the abrasive particle contamination in the AWJ kerf wall cut surfaces. The ANOVA test result indicated the jet pressure and jet impingement angle as the influencing process parameters affecting the various performance characteristics of AWJ cutting. The overall AWJ cutting performance o...
- Published
- 2016
98. Particle contamination of parenteralia and in-line filtration of proteinaceous drugs
- Author
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Benjamin Patrick Werner and Gerhard Winter
- Subjects
Drug ,Particle contamination ,Chromatography ,Drug Contamination ,Chemistry ,media_common.quotation_subject ,Pharmaceutical Science ,Particle (ecology) ,law.invention ,Protein Aggregates ,Biopharmaceutical ,Pharmaceutical Preparations ,law ,Animals ,Humans ,In line filtration ,Infusions, Parenteral ,Drug adsorption ,Particle Size ,Filtration ,media_common - Abstract
Protein drug products play an important role in the treatment of severe diseases. However, due to the instability of these complex molecules, protein aggregates can form which can compromise drug safety and efficacy including immunogenic reactions. In-line filtration during the administration of these drugs can serve as a final safeguarding step to protect patients from risks associated with proteinaceous particles. A unique analysis of more than 300 marketed protein drug products revealed that already around 16% of all these products are filtered during preparation or administration. Further, the research revealed that no standardized filtration practice exists. Broad variances regarding filter membrane or pore size are found and sometimes no specifications are mentioned at all. The benefits as well as possible negative impacts of filtration like filter shedding, extractables or drug adsorption are critically assessed. Several proposals to improve the current filtration practice and to expand the number of in-line filtered protein drug products are made. The suggestions include the demand for the specific usage of one filter membrane type, the establishment of a filtration routine for unfiltered protein drugs and a statistical analysis between filtered and non-filtered products with similar formulations to identify possible differences in the immunogenicity rate.
- Published
- 2015
99. Risk assessment of airborne transmission of COVID-19 by asymptomatic individuals under different practical settings
- Author
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Siyao Shao, Shufan Zou, Jiaqi Li, Ruichen He, Santosh Kumar, Kevin Mallery, Suo Yang, Dezhi Zhou, and Jiarong Hong
- Subjects
Atmospheric Science ,Environmental Engineering ,010504 meteorology & atmospheric sciences ,Coronavirus disease 2019 (COVID-19) ,FOS: Physical sciences ,010501 environmental sciences ,complex mixtures ,01 natural sciences ,Airborne transmission ,Article ,law.invention ,Orders of magnitude (specific energy) ,Particle contamination ,law ,Simulation ,0105 earth and related environmental sciences ,Fluid Flow and Transfer Processes ,Mechanical Engineering ,Digital inline holography ,Fluid Dynamics (physics.flu-dyn) ,Physics - Fluid Dynamics ,respiratory system ,Physics - Medical Physics ,Pollution ,Ventilation ,3. Good health ,13. Climate action ,Exhaled particles ,Ventilation (architecture) ,Breathing ,Particle ,Environmental science ,Medical Physics (physics.med-ph) ,Risk assessment ,Particle deposition - Abstract
The lack of quantitative risk assessment of airborne transmission of COVID-19 under practical settings leads to large uncertainties and inconsistencies in our preventive measures. Combining in situ measurements and computational fluid dynamics simulations, we quantify the exhaled particles from normal respiratory behaviors and their transport under elevator, small classroom, and supermarket settings to evaluate the risk of inhaling potentially virus-containing particles. Our results show that the design of ventilation is critical for reducing the risk of particle encounters. Inappropriate design can significantly limit the efficiency of particle removal, create local hot spots with orders of magnitude higher risks, and enhance particle deposition causing surface contamination. Additionally, our measurements reveal the presence of a substantial fraction of faceted particles from normal breathing and its strong correlation with breathing depth., Highlights • Provide in situ characterization of particle generation through normal breathing. • Reveal presence of droplet and crystalline particles generated through breathing. • Risk assessment of airborne transmission of infectious diseases through virus-containing particles. • Inappropriate ventilation enhances the risk of airborne disease transmission.
- Published
- 2020
100. Consideration of emerging environmental contaminants in africa: Review of occurrence, formation, fate, and toxicity of plastic particles
- Author
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Francis Attiogbe, Bismark Mensah, and Prosper Naah Angnunavuri
- Subjects
Emerging contaminants ,Particle contamination ,Microplastics ,Multidisciplinary ,Ecological health ,Biodiversity ,Contamination ,Developing countries ,Global population ,Environmental protection ,Africa ,Biological dispersal ,Environmental science ,lcsh:Q ,Nanoplastics ,Water quality ,Plastic particles ,lcsh:Science - Abstract
Plastic particles are small micro and nano range materials internationally produced for industrial applications or as a result of the breakdown of larger plastics. The accumulation of plastic particles varies spatially and temporally, with locations, hydrodynamic conditions, environmental pressure, time, and anthropogenic factors accounting for the disparities in dispersal and distribution. The accelerating global release of plastic particles into the environment seems unending, with long-term consequences for water quality, biodiversity, biological conservation, and human health. In this paper, we review the formation, presence, and toxicity of plastic particles in water, land, and air. Plastic wastes and plastic particles are increasing in abundance every year with increased consumption and rise in the global population. These materials are easily transported over long distances and become ubiquitous in their distribution on land, water, and air with unknown and unproven ecological and human health risks. Notwithstanding the potential threats to ecological health, literary records of plastic particle contamination of environmental media in Africa are very scanty. Managing environmental waste plastics and plastic particles and ensuring effective intervention policies and practices requires an understanding of plastic particles sources, transport, and fate, through regional and international collaboration, and interdisciplinary research. In consideration of the potential threats of plastic particles to ecological functions and human health risks, we recommend specific regulation of microplastics in consumer products. The information contained in this paper adds to the growing body of knowledge in the study of micro- and nano-plastic particles worldwide but with particular reference to developing countries.
- Published
- 2020
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