51. Inversion behavior in Sc[sub 2]O[sub 3]/GaN gated diodes.
- Author
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Kim, Jihyun, Mehandru, R., Luo, B., Ren, F., Gila, B. P., Onstine, A. H., Abernathy, C. R., Pearton, S. J., and Irokawa, Y.
- Subjects
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DIODES , *DIELECTRICS - Abstract
The capacitance-voltage (C-V) characteristics of Sc[sub 2]O[sub 3]/p-GaN gate-controlled diodes show unusual hook shapes due to the charging of surface states. From the drain-voltage dependence of the C-V curves, the total surface state density was estimated to be ∼ 8.2 × 10[sup 12] cm[sup -2] for diodes undergoing an implant activation anneal at 950°C. The accumulation capacitance showed a significant dependence on measurement frequency and is suggested to result from the presence of an interfacial dielectric between the Sc[sub 2]O[sub 3] and GaN. The Si-implanted n [sup +] regions in the gated diode structure are effective in providing a source of inversion charge. [ABSTRACT FROM AUTHOR]
- Published
- 2002
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