60 results on '"Juang, M.H."'
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52. Formation of excellent shallow n + junctions by As + implantation into thin CoSi films on Si substrate
53. Film thickness effect on the epitaxial growth of CoSi 2 on Si(111)
54. Characterization of silicided shallow n+p junctions formed by P + implantation into thin Ti films on Si substrates
55. Formation of self-aligned TiSi 2p+− n junctions by implanting BF 2+ ions through thin Ti or SiO 2 film on Si substrate rapid thermal annealing
56. Formation of shallow p+n junctions by implanting BF 2− ions into thin cobalt films on silicon substrates
57. Silicide-caused anomalous reverse current-voltage characteristics of CoSi 2 shallow p+n junctions
58. Reduction of boron penetration for a p + polycide gate by using cobalt silicides as a boron diffusion source
59. Formation of NiSi-silicided shallow p +n junctions by BF 2+ implantation into thin Ni or NiSi Films on Si substrates and subsequent anneal
60. Growth of single-crystalline CoSi 2 on (111)Si at low annealing temperatures by a nonultrahigh vacuum method
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