51. Efficient nanoscale photonic devices and monolithic electronic-photonic subsystems in sub-100 nm SOI CMOS
- Author
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Mark T. Wade, B. Moss, Vladimir Stojanovic, Sen Lin, Jelena Notaros, Jeffrey M. Shainline, Luca Alloatti, Amir H. Atabaki, Michael Georgas, Rajesh Kumar, Milos A. Popovic, Fabio Pavanello, Rajeev J. Ram, Christopher V. Poulton, and Chen Sun
- Subjects
Materials science ,business.industry ,Transistor ,Photonic integrated circuit ,ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION ,Physics::Optics ,Hardware_PERFORMANCEANDRELIABILITY ,Grating ,GeneralLiterature_MISCELLANEOUS ,law.invention ,Computer Science::Hardware Architecture ,CMOS ,law ,Modulation ,Hardware_INTEGRATEDCIRCUITS ,Optoelectronics ,Photonics ,business ,Nanoscopic scale ,ComputingMethodologies_COMPUTERGRAPHICS ,Photonic crystal - Abstract
We demonstrate efficient photonic devices that rely on sub-100nm features in unmodified 45nm SOI CMOS, including photonic crystals, array-antenna grating couplers, and modulators. We then show monolithically integrated electronic-photonic systems comprising millions of transistors and thousands of photonic devices, including a complete chip-to-chip photonic link.
- Published
- 2015